Development of Focused Ion Beam Column Using Ga Source
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Gim, Tzang-Jo
(아텍시스템 부설연구소)
Lee, Jae-Seung (아텍시스템 부설연구소) Choi, Yoon (아텍시스템 부설연구소) Choi, Eun-Ha (광운대학교 전자물리학과) Park, Chul-Woo (한국산업기술대 기계공학과) Kim, Jong-Kuk (한국기계연구원) Kim, Young-Gweon ((주) FTLab) Um, Chang-Yong ((주) 컨벡스) |
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