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http://dx.doi.org/10.3795/KSME-A.2009.33.3.185

Development of Focused Ion Beam Column Using Ga Source  

Gim, Tzang-Jo (아텍시스템 부설연구소)
Lee, Jae-Seung (아텍시스템 부설연구소)
Choi, Yoon (아텍시스템 부설연구소)
Choi, Eun-Ha (광운대학교 전자물리학과)
Park, Chul-Woo (한국산업기술대 기계공학과)
Kim, Jong-Kuk (한국기계연구원)
Kim, Young-Gweon ((주) FTLab)
Um, Chang-Yong ((주) 컨벡스)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.33, no.3, 2009 , pp. 185-189 More about this Journal
Abstract
Focused ion beam system was designed, which includes LMIS, electrostatic lens and high voltage power supply. Control program is updated for high speed image processing. The details of vibration-free vacuum system and other important electrical parts were trouble-shooted for appropriately controlling high acceleration voltages.
Keywords
FIB; Electro Static Lens; Deceleration Mode; LMIS; Chromatic Aberration;
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