• 한국결정성장학회지
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• 제27권2호
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• pp.75-79
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• 2017

고밀도 플라즈마 식각 및 lift-off 두 가지 공정으로 honeycomb 형상의 Ag-grid 투명전극층을 제작하였고 제조 공법에 따른 광학적 및 전기적 특성을 비교하였다. 플라즈마 식각 조건 선정을 위하여 Ag 박막의 $10CF_4/5Ar$ 유도결합 플라즈마 식각특성을 조사하였다. 비교적 낮은 ICP source power 또는 rf chuck power 영역에서는 power 증가에 따라 Ag 식각속도가 증가하였고, 높은 power 조건에서는 $Ar^+$ 이온 에너지 감소 또는 $Ar^+$ 이온에 의한 F radical 제거로 인해 식각속도가 감소하였다. $10CF_4/5Ar$ 플라즈마 식각 공정에 의해 제작된 Ag-grid 전극층은 lift-off 공정으로 제작된 전극층에 비해 grid 패턴 형상의 왜곡이나 단절이 없는 더 우수한 grid 패턴 전사 효율과 가시광선 영역에서 더 높은 83.3 %(pixel 크기 $30{\mu}m$/선폭 $5{\mu}m$)와 71 %(pixel 크기 $26{\mu}m$/선폭 $8{\mu}m$)의 광투과율을 각각 나타내었다. 반면에 lift-off 공정으로 제작된 Ag-grid 전극층은 플라즈마 식각 공정 시편보다 더 우수한 $2.163{\Omega}/{\square}$(pixel 크기 $26{\mu}m$/선폭 $8{\mu}m$)과 $4.932{\Omega}/{\square}$(pixel 크기 $30{\mu}m$/선폭 $5{\mu}m$)의 면저항 특성을 나타내었다.

• 멤브레인
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• 제26권6호
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• pp.432-448
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• 2016

최근 이온 교환 고분자 전해질 막을 활용한 고효율 에너지 전환 및 저장 장치에 대한 연구가 활발히 이루어지고 있다. 고분자 전해질 연료전지, 레독스 흐름전지 및 역전기투석 등 다양한 에너지 시스템에서 에너지 효율 향상을 위해 이온교환 전해질 막의 양/음이온의 선택적 수송 거동이 중요시되고 있다. 본 총설은 각각의 고효율 전해질 전지 시스템에 따라 요구되는 다양한 이온 교환막의 선택적 양/음이온 투과 거동의 한계점을 고찰하고, 한계를 극복하기 위한 다양한 구조의 고분자 이온 교환 복합막의 장점 및 단점을 정리하였다. 고분자 가교법 및 다공성 지지체 복합막 이외에 다양한 구조의 신규다공성 무기 나노입자를 유-무기 이온교환 복합막에 도입하는 시도가 이루어지고 있는 동시에, 이온 선택도 향상을 위한 다양한 형태의 표면 개질 방법이 개발되고 있으며, 이를 통해 이온 교환 복합막의 선택적 양/음이온 거동의 한계를 극복하는 전략을 제시하고 있다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.1410-1412
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• 2002

TFT의 게이트 전극을 형성하기 전에 소오스/드레인 이온 주입과 ELA를 수행함으로써 이온 주입에 의해 발생하는 결정 결함을 줄이는 새로운 poly-Si TFT를 제안한다. 한번의 ELA 공정을 통해서 채널 실리콘 박막의 결정화와 소오스/드레인의 불순물 활성화를 동시에 이루어 접합부의 결함을 치유하였고, 이온 주입에 의해서 비정질화된 소오스/드레인 실리콘과 채널 비정질 실리콘의 용융조건 차이를 이용하여 소오스/드레인 접합부에 실리콘 그레인의 수평성장을 유도하였다. 제안된 소자는 기존의 소자(이동도 : 86 $cm^2/V{\cdot}S$, ON/OFF 전류비 $6.1{\times}10^6$)에 비해 우수한 특성(이동도 : 171 $cm^2/V{\cdot}S$, ON/OFF 전류비 $4.1{\times}10^7$)을 나타내었다. LDD나 off-set 구조 없이도 소오스/드레인 접합부의 결함이 완전히 제거되어 누설전류가 감소하였고 소오스/드레인 접합부 결함이 있던 자리에 1 ${\mu}m$ 이상의 수평성장 그레인이 위치함으로써 ON 전류도 증가하여 ON/OFF 전류비가 크게 개선되었다.

• 방사성폐기물학회지
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• 제2권3호
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• pp.219-230
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• 2004

Most of the low-level liquid radioactive wastes generated from PWR plants are classified into high or low total suspended solid(HTDS or LTDS), and into radiochemical and radioactive laundry waste. Although the evaporation process has a high decontami- nation ability, it has several problems such as corrosion, foam, and congestion. A new liquid waste disposal process using the ion-exchange demineralizer(IED), instead of the current evaporation process, has been introduced into the Yonggwang NPP #5 and 6. These two methods have been compared to understand the differences in this study. Aspects compared here were the released radioactivity amount of the liquid radioactive wastes, the dose of off-site residents, the decontamination factor, and the amount of the solid radioactive wastes. The IED system is designed to discharge higher radioactivity about 20% than the evaporating system, and the actual radioactivity released from the evaporating and IED system were 0.473mCi and 1.098mCi, respectively. The radioactivity released from the IED was 2.32 times higher than that of the evaporating system. The dose of off-site residents was $2.97{\times}10^{-6}$mSv for the evaporating system, and $6.47{\times}10^{-6}$mSv for IED. The decontamination factor(DF) of the evaporator is, in most cases, far lower than the lower limits of detection(LLD) with the Ge-Li detector. Due to the low concentration of the liquid wastes collected from the liquid waste system, the decontamination factor of IED is very low. Since there is not enough data on the amount of solid radioactive wastes generated by the evaporation system, the comparison on these two systems has been conducted on the basis of the design, and the comparison result was that the evaporating system generated more wastes about 40% than IED.

• Journal of Electrochemical Science and Technology
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• 제13권4호
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• pp.472-478
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• 2022

Solar energy harvesting is practiced by various nations for the purpose of energy security and environment preservation in order to reduce overdependence on oil. Converting solar energy into electrical energy through Photovoltaic (PV) module can take place either in on-grid or off-grid applications. In recent time Lithium battery is exhibiting its presence in on-grid applications but its role in off-grid application is rarely discussed in the literature. The preliminary capacity and Peukert's study indicated that the battery quality is good and can be subjected for life cycle test. The capacity of the battery was 10.82 Ah at 1 A discharge current and the slope of 1.0117 in the Peukert's study indicated the reaction is very fast and independent on rate of discharge. In this study Lithium Iron Phosphate battery (LFP) after initial characterization was subjected to life cycle test which is specific to solar off-grid application as defined in IEC standard. The battery has delivered just 6 endurance units at room temperature before its capacity reached 75% of rated value. The low life of LFP battery in off-grid application is discussed based on State of Charge (SOC) operating window. The battery was operated both in high and low SOC's in off-grid application and both are detrimental to life of lithium battery. High SOC operation resulted in cell-to-cell variation and low SOC operation resulted in lithium plating on negative electrode. It is suggested that to make it more suitable for off-grid applications the battery by default has to be overdesigned by nearly 40% of its rated capacity.

• 전기화학회지
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• 제19권3호
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• pp.114-121
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• 2016

본 연구에서는 리튬이온전지의 충방전시 발생하는 발열특성을 CFD 모델링하고, 발열에 따른 충방전 특성을 해석하였다. 리튬이온전지는 직교 파우치형 구조로서 두께방향으로의 1차원계로 설정하여, 전류밀도 방정식, 열 및 물질전달 지배방정식을 도입하였다. Cut-off 전압이 3 V에서 충방전 전류밀도가 1C($17.5A/m^2$), 3C($52.5A/m^2$) 와 5C($87.5A/m^2$)에 대하여, 298K의 등온계와 충방전 전류밀도 별 발열계로 각각 설정하였다. 등온계와 발열계에서 모두 충방전 전류밀도가 높을수록 전지의 용량은 감소되는 것으로 나타났다. 등온계에 비하여 발열계에서 충방전 시간이 증가하였으며, 이는 발열에 의한 온도의 증가로 인해 전극의 평형전위가 감소하고, 리튬이온의 확산계수가 증가하기 때문인 것으로 고려된다. 또한, 리튬이온전지의 충전과 방전에 의한 열 발생 영향을 제어하기 위한 냉각효과를 분석하였다.

• Bulletin of the Korean Chemical Society
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• 제28권4호
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• pp.567-573
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• 2007

The crystal structure of ZnI2 molecule synthesized in zeolite A (LTA) has been studied by single-crystal X-ray diffraction techniques. A single crystal of |Zn6|[Si12Al12O48]-LTA, synthesized by the dynamic ion-exchange of |Na12|[Si12Al12O48]-LTA with aqueous 0.05 M Zn(NO3)2 and washed with deionized water, was placed in a stream of flowing 0.05 M KI in CH3OH at 294 K for four days. The resulting crystal structure of the product (|K6Zn3(KI)3(ZnI2)0.5|[Si12Al12O48]-LTA, a = 12.1690(10) A) was determined at 294 K by single-crystal X-ray diffraction in the space group Pm3m. It was refined with all measured reflections to the final error index R1 = 0.078 for 431 reflections which Fo > 4σ (Fo). At four crystallographically distinct positions, 3.5 Zn2+ and nine K+ ions per unit cell are found: three Zn2+ and five K+ ions lie on the 3-fold axes opposite 6-rings in the large cavity, two K+ ions are off the plane of the 8-rings, two K+ ions are recessed deeply off the plane of the 8-rings, and the remaining a half Zn2+ ion lie on the 3-fold axes opposite 6-rings in the sodalite cavity. A half Zn2+ ion and an I- ion per unit cell are found in the sodalite units, indicating the formation of a ZnI2 molecule in 50% of the sodalite cavities. Each ZnI2 (Zn-I = 3.35(5) A) is held in place by the coordination of its one Zn2+ ion to the zeolite framework oxygens and by the coordination of its two I- ions to K+ ions through 6-rings (I-K = 3.33(8) A). Three additional I- ions per unit cell are found opposite a 4-ring in the large cavity and form a K3I2+ and two K2ZnI3+ ionic clusters, respectively.

• 동굴
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• 제82호
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• pp.1-4
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• 2007

In this paper, the etching of Au films using photoresist masks on Si substrates was investigated using a capacitively coupled plasma etch reactor. The advantages of plasma etch techniques over current methods for Au metalization include the ability to simplify the metalization process flow with respect to resist lift-off schemes, and the ability to cleanly remove etched material without sidewall redeposition, as is seen in ion milling. The etch properties were measured for different gas mixing ratios of CF4/Ar, and chamber pressures while the other conditions were fixed. According to statistical design of experiment (DOE), etching process of Au films was characterized and also 20 samples were fabricated followed by measuring etch rate, selectivity and etch profile. There is a chemical reaction between CF4 and Au. Au- F is hard to remove from the surface because of its high melting point. The etching products can be sputtered by Ar ion bombardment.

• Nuclear Engineering and Technology
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• 제30권1호
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• pp.17-25
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• 1998

Transport of carbon and boron impurity ions parallel to magnetic field lines in the tokamak SOL (scrape-off layer) is numerically investigated for a one-dimensional steady state. The spatial distributions of density and velocity of the impurity ions in a steady state are calculated by finite difference method for a single-fluid model. The calculated results show that among forces acting on SOL particles thermal force produced tv plasma temperature gradient is a principal force determining the feature of impurity distribution profiles in the tokamak edge. However, strong collisional friction forces appearing dominant in front of the diverter plate restrain impurity ion flows due to temperature gradients from moving toward the midplane. Consequently, the stagnation point develops in the impurity flow by these two forces near the diverter region, in which ion flows change their directions. Impurity ions turn out to be accumulated at the stagnation points, where peaked profiles of highly-ionized state ions are relatively predominant over those of low-ionized state ions.

• 전자공학회논문지A
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• 제30A권10호
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• pp.51-58
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• 1993

N-channel TFTs fabricated on the pre-amorphized (by Si ion implantation) and recrystallized Si film having 10.1V threshold voltage, 20.7cm$^{2}$/V$\cdot$s field effect mobility and ~10$^{5}$/ ON/OFF ratio, whowed improved characteristics comparing to those obtained from the as-deposited (by LPCVD) poly Si film which had 11.2V, 9cm$^{2}$/V$\cdot$s and ~10$^{4}$ respectively.