• Journal of the Korean Society for Precision Engineering
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• v.16 no.4 s.97
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• pp.155-162
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• 1999

Input shaping technique has been used as a simple method of controlling the residual vibration of a flexible manipulator. With the conventional methods previously proposed by several authors, the frequency range that shows a good performance is restricted. When the designed frequency being different from the natural frequency of a system, the performance of control degrades remarkably. This paper introduced a new technique that designs input shaping with robustness in the z-domain.

• Journal of the Semiconductor & Display Technology
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• v.11 no.2
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• pp.33-38
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• 2012

The wafer positioning robot in the semiconductor industry is required to operate at high speed for the improvement of productivity. The residual vibration caused by the high speed of the wafer positioning robot, however, makes the life of the robot shorter and the cycle time longer. In this study, the input shaping and the path of the system are designed for the reduction of the residual vibration and the improvement of the cycle time. The followings are the process for the reduction and the improvement; 1) System modeling of the wafer positioning robot, 2) Verification of dynamic characteristics of the wafer positioning robot, 3) Input shaping plan using impulse response reiteration, 4) Simulation test using SIMULINK program, 5) Analysis of result.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.559-563
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• 2005

The wafer positioning robot used in the semiconductor industry is required to operate at high speed for the improvement of productivity. However, the residual vibration produced by the high speed of the wafer positioning robot makes the life of the robot shorter and the cycle time longer. In this study, the input shaping and the path of the system are designed for the reduction of the residual vibration and the optimization of the cycle time. The followings are the process for the reduction and the optimization; 1)System modeling of wafer positioning robot, 2)Verification of dynamic characteristic of wafer positioning robot, 3)Input shaping plan using impulse response reiteration, 4)Simulation test using simulink, 6)Analysis of result.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.23-24
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• 2007

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1997.04a
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• pp.316-323
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• 1997

This paper compares input shaping techniques for controlling residual vibration of flexible structures. Input shaping generates vibration-reducing shaped commands through convolution of an impulse sequence with the desired command. Both feedforward and feedback control approaches with/without input shaper for uncertain dynamical systems are investigated to evaluate the control performances. The control objective is to achieve a fast settling time and robustness to plant uncertainty, to eliminate residual vibrations. It is shown by a series of simulation that a properly designed feedback controller with input shaper performs well, as compared with open-loop controller with input shaper.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.7
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• pp.756-763
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• 2008

This paper presents an inchworm with three piezoelectric actuators. The dynamic stiffness of the inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. The dynamic model of inchworm is identified by curve fitting technique based on the experimental frequency response function. For the precision motion control and low residual vibration of inchworm, driving input signal is designed by using cycloid step input and LQG control technique. Experimental result shows that proposed input shaping method is applicable effectively to the inchworm.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.6
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• pp.83-90
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• 2008

Input shaping is an efficient tool to eliminate transient and residual vibration caused by motion of mechanical systems. However, the rise time of the systems tends to increase due to the presence of input shapers. This paper is concerned with the rise time reduction when using input shaping. To this end, this paper proposes an input shaper design method for an undamped single mode vibration system using a virtual mode, which is not an actual mode but reflected in the design process. The essence of the proposed method is to design a three-impulse input shaper as if a single mode system has two modes: one actual mode and one virtual mode. The natural frequency of the virtual mode is a design parameter to change the rise time of the system. This paper discusses the performance of the proposed input shapers by simulation.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.7 s.178
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• pp.1854-1862
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• 2000

Input shaping method is to convolute input shaper, which is sequence of impulses, with reference input command not to excite the natural frequency of system. To reduce residual vibration for the ch ange of frequency, the number of impulses should be increased. Until now, amplitudes and time interval of those has been searched from the derivative of residual vibration. However, if time interval of impulses is fixed as the half of vibration period of system, input shaper H(z) in z-domain becomes (I-pz-1)n/K in which increasing n is the mean that robustness for change of parameter is improved. Also, design of many types of input shapers in z-domain is very easy because sensitivity curve is displayed with $\mid$H(z)zn$\mid$$\times$100. In the z-domain, EI(Extra-Insensitive) input shaper could be designed without solving nonlinear simultaneous equations as design in continuous time domain. In addition to, the design possibility of input shaper for a damped system was shown.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.171-172
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.243-244
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• 2012