Browse > Article

Application of an Input Shaping Method for Reduction of Residual Vibration in the Wafer Positioning Robot  

Ahn, Tae-Kil (Dept. of Automotive Engineering, Hoseo University)
Yim, Jae-Chul (Structural/RLDA Lab. Team, GM Korea Co.)
Kim, Seong-Kun (Dept. of Automotive Engineering, Hoseo University)
Kim, Kug Weon (Dept. of Mechanical Engineering, Soonchunhyang University)
Publication Information
Journal of the Semiconductor & Display Technology / v.11, no.2, 2012 , pp. 33-38 More about this Journal
Abstract
The wafer positioning robot in the semiconductor industry is required to operate at high speed for the improvement of productivity. The residual vibration caused by the high speed of the wafer positioning robot, however, makes the life of the robot shorter and the cycle time longer. In this study, the input shaping and the path of the system are designed for the reduction of the residual vibration and the improvement of the cycle time. The followings are the process for the reduction and the improvement; 1) System modeling of the wafer positioning robot, 2) Verification of dynamic characteristics of the wafer positioning robot, 3) Input shaping plan using impulse response reiteration, 4) Simulation test using SIMULINK program, 5) Analysis of result.
Keywords
Wafer Positioning Robot; Reduction of Residual Vibration; Input Shaping;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Singer, N.C. and Seering, W.P., "Preshaping Command Inputs to Reduce System Vibration," ASME Journal of Dynamic System, Measurement and Control, Vol. 112, pp. 76-82, 1990.   DOI
2 Singh, T. and Vadali, S.R., "Robust Time Delay Control," ASME Journal of Dynamic System, Measurement and Control, Vol. 115, pp. 303-306, 1993.   DOI
3 Kim, M., Yun, S. and Kang, S., "Safe Design and Vibration Control of a Manipulator with Passive Compliant Joints," 2nd International Conference on Autonomous Robots and Agents, December 13-15, 2004.
4 박주이, 장평훈, "입력 다듬기기법을 이용한 유연관절을 갖는 로봇의 잔류진동 제거," 대한기계학회논문집 제 11 권, pp. 3066-3074, 1994.
5 이지형, 이재원, 주해효, "성형입력에 의한 유연한 로봇의 잔류진동 제어," 한국자동제어학술회의논문집, pp. 603-607, 1994.
6 장중원, 박상원, 홍성욱, "위치결정 스테이지의 고속 정밀 위치결정을 위한 입력성형명령 생성 기법", 한국정밀공학회지 제 25 권 제 10 호, pp. 122-129, 2008.
7 김병섭, "공작기계의 서보제어와 입력성형기법," 한국정밀공학회지 제 28 권 9 호, pp. 1011-1017, 2011.