• Journal of Sensor Science and Technology
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• v.24 no.6
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• pp.379-384
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• 2015

An infrared image sensor is a core device in a thermal imaging system. The fabrication method of a focal plane array (FPA) is a key technology for a high resolution infrared image sensor. Each pixels in the FPA have $Si_3N_4/SiO_2$ membranes including legs to deposit bolometric materials and electrodes on Si readout circuits (ROIC). Instead of polyimide used to form a sacrificial layer, the feasibility of an amorphous silicon (${\alpha}-Si$) was verified experimentally in a $8{\times}8$ micro-bolometer array with a $50{\mu}m$ pitch. The elimination of the polyimide sacrificial layer hardened by a following plasma assisted deposition process is sometimes far from perfect, and thus requires longer plasma ashing times leading to the deformation of the membrane and leg. Since the amorphous Si could be removed in $XeF_2$ gas at room temperature, however, the fabricated micro-bolomertic structure was not damaged seriously. A radio frequency (RF) sputtered nickel oxide film was grown on a $Si_3N_4/SiO_2$ membrane fabricated using a low stress silicon nitride (LSSiN) technology with a LPCVD system. The deformation of the membrane was effectively reduced by a combining the ${\alpha}-Si$ and LSSiN process for a nickel oxide micro-bolometer.

• Journal of Sensor Science and Technology
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• v.6 no.3
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• pp.188-193
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• 1997

The lanthanum-modified lead titanate (PLT) thin films on (100) cleaved MgO single crystal substrate have been prepared by RF magnetron sputtering method using PbO-rich target with varing La contents. The substrate temperature, working pressure, $Ar/O_{2}$, and RF power density of PLT thin films were $580^{\circ}C$ 10mTorr, 10/1, and $1.7W/cm^{2}$, respectively. In these conditions, the c-axis growth and tetragonality of the PLT thin films decreased for addition of La content and the PLT thin films showed diffuse phase transition from high temperature XRD patterns. The infrared sensor was fabricated. The remanent polarization was above $1.71{\mu}C/cm^{2}$ and the pyroelectric voltage was above 500mV with 10:1 signal to noise ratio.

• 제어로봇시스템학회:학술대회논문집
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• 1993.10a
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• pp.883-888
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• 1993

This paper proposes a monitoring method using an infrared temperature sensor in laser surface hardening process. To investigate the validity of the method a series of experiments are performed for various conditions. The experimental results show that the surface temperature depends upon the laser power, travelling speed and surface conditions of a specimen. Especially, the laser surface hardening process is greatly influenced by the surface conditions of the specimen, such as coating thickness and materials.

• Journal of the Korea Society of Computer and Information
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• v.21 no.12
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• pp.19-26
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• 2016

In this paper, we propose an efficient design method for a thermal camera with continuous zoom based on the research and manufacturing experience of the thermal camera. In addition, it is divided into system design method, optical design method, mechanical design method, and electronic design method. First, we propose an effective NUC compensation method and a lens-specific sensitivity design method in terms of system. Second, we propose a zoom trajectory design method considering the temperature effect on the optical aspect. Third, it suggests the minimization of optical axis shaking between magnification conversion in terms of mechanism. Finally, we propose a lens-specific temperature compensation method and a speed conversion algorithm according to the zoom interval as an electronic aspect.

• Journal of Sensor Science and Technology
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• v.17 no.4
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• pp.250-255
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• 2008

A vanadium pentoxide ($V_2O_5$)-based bolometric infrared (IR) sensor has been designed and fabricated using micro electro mechanical systems (MEMS) technology for glucose detection and its resistive characteristics has been illustrated. The proposed bolometric infrared sensor is composed of the vanadium pentoxide array that shows superior temperature coefficient of resistance (TCR) and standard silicon micromachining compatibility. In order to achieve the best performance, deposited $V_2O_5$ thin film is optimized by adequate rapid thermal annealing (RTA) process. Annealed vanadium oxide thin film has demonstrated a linear characteristic and relatively high TCR value (${-4}%/^{\circ}C$). The resistance of vanadium oxide is changed by IR intensity based on glucose concentration.

• Electrical & Electronic Materials
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• v.9 no.10
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• pp.1047-1052
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• 1996

In this study, the thermal and optical proper-ties of multicomponent oxide glass fiber for IR sensor by adding heavy metal oxide Ga$_{2}$O$_{3}$ were investigated. The fiber samples were made by rod-in tube method. The optical loss of fiber was measured in 0.3-1.8/M wavelength region. As Ga$_{2}$O$_{3}$ increased up to 12wt%, the transition and softening temperature of bulk glass were increased from 495.deg. C to 564.deg. C and from 548.deg. C to 612.deg. C respectively. Whereas the thermal expansion coefficient was decreased from 102 to 88.2*10$^{-7}$ /.deg. C. The refractive index was increased from 1.621 to 1.662, and IR cut-off wavelength was enlarged from 4.64.mu.m to 5.22.mu.m. The optical loss of fiber was decreased and more remarkably decreased in 1.146.mu.m-1.8.mu.m wavelength region.

• Proceedings of the KSRS Conference
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• 2003.11a
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• pp.667-669
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• 2003

A bio-optical model was developed specific for turbid and shallow waters. Special studies were carried out to estimate absorption and scattering properties as well as backscattering probability of suspended matter. The inversion of bio-optical model allows for direct retrieval of turbidity and chlorophyll- a from the visible-near infrared (VNIR) range sensor. Time-series satellite imagery from ASTER AM-1 sensor, were used to monitor the Laguna de Bay water quality condition. Spatial distribution of temperature for the lake was extracted from the thermal infrared (TIR) sensor. Corresponding field surveys were conducted to parameterize the bio -optical model. In-situ measurements include suspended particle and chlorophyll-a concentrations profiles from nephelometric devices and processing of water samples. Hyperspectral measurements were used to validate results of the bio -optical model and satellite- based estimation. This study provides a theoretical basis and a practical illustration of applying space- based measurements on an operational basis.

• Journal of the Society of Naval Architects of Korea
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• v.44 no.4
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• pp.459-465
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• 2007

This paper deals with the development of measuring methodology and the requirement for its evaluation of the infrared radiation from a naval ship to optical sensors, considering the Meteorological conditions. Factors required for measuring the apparent temperature and infrared radiation are identified and two methods are suggested based on the measuring instruments carried by ship or aircraft. and target operation in the Meteorological conditions is considered. This study describes some factors affecting the IR signature. required instruments to obtain the IR signal considering the naval ship.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.40 no.8
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• pp.1606-1612
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• 2015

In this paper, a portable high efficiency nondispersive infrared(NDIR) $CO_2$ sensor module with a smart device interface is developed. For low power consumption design, an IR LED was used instead of tungsten lamp for light source and an optical waveguide optimized to the sensor module is designed. With the smart device interface, power of the sensor module is applied from the battery of smart phone. The measured data of the sensor module such as $CO_2$ concentration, temperature, and humidity are displayed on the smart phone using android application. From measured results, the developed sensor module shows ${\pm}60ppm$ tolerance error from 0 to 3,000ppm $CO_2$ concentration range among $-10^{\circ}C$ and $50^{\circ}C$ ranges.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.12
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• pp.825-830
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• 2014

$[(Co_{1-x}Cu_x)_{0.2}(Ni_{0.3}Mn_{0.7})_{0.8}]_3O_4$ ($0{\leq}x{\leq}1$) thin films prepared by metal organic decomposition process were fabricated on SiN/Si substrate for infrared sensor application. Their structural and electrical properties were investigated with variation of Cu dopant. The $[(Co_{1-x}Cu_x)_{0.2}(Ni_{0.3}Mn_{0.7})_{0.8}]_3O_4$ (CCNMO) film annealed at $500^{\circ}C$ exhibited a dense microstructure and a homogeneous crystal structure with a cubic spinel phase. Their crystallinity was further enhanced with increasing doped Cu amount. The 120 nm-thick CCNMO (x=0.6) thin film had a low resistivity of $53{\Omega}{\cdot}cm$ at room temperature while the Co-free film (x=1) showed a significantly decreased resistivity of $5.9{\Omega}{\cdot}cm$. Furthermore, the negative temperature coefficient of resistance (NTCR) characteristics were lower than $-2%/^{\circ}C$ for all the specimens with $x{\geq}0.6$. These results imply that the CCNMO ($x{\geq}0.6$) thin films are a good candidate material for infrared sensor application.