• Journal of the Semiconductor & Display Technology
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• v.18 no.1
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• pp.5-9
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• 2019

Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 1996.10b
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• pp.18-28
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• 1996

The outer-most electrons of metal atoms and the remaining valence electrons of any molecular atoms make three-dimensional crystallizing $\pi$-bondings. The rotating electrons on the three-dimensional crystallizing $\pi$-bonding orbitals of atoms make $\pi$-far infrared rays. Longitudinal wave is a propagation of a bundle of $\pi$-far infrared rays, which are produced by a dynamic impact on a solid bar. The $\pi$-far infrared rays make three-dimensional crystallizing $\pi$-bondings in the material, which reproduce the same $\pi$-far infrared rays. If a current signal is input into water molecules under a given electric potential field with $\pi$-far infrared rays (input information), the signal can be amplified because the $\pi$-far infrared rays make the $\pi$-bondings, which reduce electric resistance. The three-dimensional crystallizing $\pi$-bondings can induce normal electrons to move from one orbital to next one with a aid of potential electric field. Quantum Resonance Spectrometer is composed of tesla coil absorbing $\pi$-far infrared rays, tesla coil emitting varying electromagnetic waves signal generator, signal storage, human body amplifier, signal analyzer and data indicator. The absorbing tesla coil making varying magnetic field and downward and upward electric field, which resonates the $\pi$-far infrared rays coming out from specimen and absorbs them. The modulated current signal from the input square signal can generate and emit varying electromagnetic waves from the tesla coil. The varying electro-magnetic waves make the three-dimensional crystallizing $\pi$-bondings and the $\pi$-far infrared rays in the water molecules.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.583-586
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• 2017

Infrared signal measurement are conducted from a micro-turbo jet engine with different nozzle configurations. The conventional cone type, a S-shaped type with aspect ratio 5.2 and five rectangular type nozzle with different aspect ratios are used for this experiment work. The result show that infrared signal from the exhaust gas decrease as the aspect ratio increase. In case of S-shaped nozzle, the maximum infrared signal is reduced about 28.4% when compared of rectangular nozzle with aspect ratio 5(AR5).

• Journal of the Korean Society of Propulsion Engineers
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• v.26 no.2
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• pp.28-39
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• 2022

An experimental study was carried out to understand the characteristics of the long wave infrared signal emitted from the exhaust plume when water is sprayed around it. The micro-jet engine was used to generate the exhaust plume, and eight water spray nozzles were installed around the exhaust nozzle. Two water injection angles were applied, one is sparying parallel to the exhaust plume, and the other is spraying water into the exhaust plume. The measurement results are as follows. When spraying water parallel to the exhaust plume, the long wave infrared signal is decreased with water spray flow rate. When spraying water the exhaust plume, the long wave infrared signal shows a larger value than plume only.

• IEMEK Journal of Embedded Systems and Applications
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• v.7 no.1
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• pp.25-31
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• 2012

We propose a method for an indoor mobile robot to track user with infrared transmitter. Several infrared receivers attached around by the mobile robot enable the robot to determine the moving direction by comparing the received signal patterns. The cost of the proposed system is not only cheaper than ultrasonic system, image signal processing, RFID, and RSSI method, but also robust against environment change because any complex algorithm is not necessary. In the mobile robot, ultrasonic sensors are equipped to avoid obstacles located in the moving direction, and a simple algorithm is embedded to avoid the case of poor signal reception.

• Journal of Industrial Technology
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• v.34
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• pp.27-32
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• 2014

Infrared remote controllers are widely used in controlling electronic devices due to its simplicity and convenience. This paper presents a smart phone application unifying any infrared remote controllers. We can select a device from device list menu of the application. Any new device can be added easily by downloading the protocol file of the device from protocol file server. Remote controller protocol files are stored in audio file format, and the file related to a specific menu button is transmitted through the audio jack of smart phones. The protocol file server is a standard file server, and protocol files for various devices are collected by infrared receiver module. For smart phones without infrared facility, a small infrared module translating audio signal to infrared signal is applied.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.21 no.4
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• pp.43-49
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• 2021

A small infrared image homing system is a tracking system that has an infrared image sensor that identifies a target through the day and night infrared image processing of the target on the ground and searches for and detects the target with respect to the main target. This paper describes the development of a board equipped with a high-speed CPU and FPGA (Field Programmable Gate Array) to identify target through real-time image processing by acquiring target information through infrared image. We propose a CPU-FPGA combining architecture for CPU and FPGA selection and video signal processing, and also describe a controller design using FPGA to control infrared sensor.

• Journal of the Korean Society of Propulsion Engineers
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• v.25 no.4
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• pp.28-35
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• 2021

Infrared (IR) stealth technology to protect aircraft from heat-tracking missiles is a very important factor in the development of military aircraft. In this study, the intensities of signal generation were compared by observing the IR signals generated from the plumes of the engine and identifying them for each measurement angle. To simulate a jet engine applied to an actual aircraft, a small turbojet engine was constructed, the infrared signal characteristics for each wavelength were identified according to the measurement angle, and the total infrared radiance was derived by integrating the signal for each wavelength. Through this study, we intend to present basic data for improving the infrared stealth performance of aircraft.

• Smart Media Journal
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• v.7 no.3
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• pp.29-34
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• 2018

This paper presents a study on adapting optical communication technology using infrared ray for the enhancement of hearing aids in noisy environment. The transmitter module containing microphone and infrared ray-emitting diode converts audio signal to infrared optical signal and sends it out in the air. The receiver module located in a distance receives the infrared signal, converts it to electrical signal, and transfers it to an input of a digital hearing aid. Especially, the receiver module needs to be small, low voltage, and consume low power since it will be attached to hearing aids. Experiments with applying infrared communication technology of digital modulation method and analog non-modulation method show that the analog non-modulation method is adequate for infrared communication of approximately 5m distance indoor. Prototypes of transmitter module and receiver module were manufactured, and internal parameters of the digital hearing aid were adjusted to confirm normal transmit-receive operation of audio signals.

• Journal of the Korean Society of Propulsion Engineers
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• v.20 no.5
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• pp.1-8
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• 2016

Micro turbojet engine test and infrared signal measurement were conducted to understand the characteristics of the engine performance and infrared signal with the variants of the exhaust nozzle configuration. A cone type nozzle and five rectangle type nozzles which has aspect ratio from one to five were used for the experimental work. The results show that there are not much difference between cone and rectangle nozzles of the thrust and specific fuel consumption. However infrared signal from exhaust gas become smaller as increasing aspect ratio.