Development of 80 kW RF Thermal Plasma Torch System for Mass Production and Research of Si Nano-Powder Manufacturing Process (양산용 80 kW급 RF Plasma Torch System 개발 및 Si 나노분말 제조 공정 연구)
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- Journal of the Korean Vacuum Society
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- v.22 no.2
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- pp.66-78
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- 2013