• Title/Summary/Keyword: InGaN/GaN

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Optical Characterization on Undoped and Mg-doped GaN Implanted with Nd (Nd이 이온주입된 undoped와 Mg-doped GaN의 분광 특성 연구)

  • Song, Jong-Ho;Rhee, Seuk-Joo
    • Journal of the Korean Vacuum Society
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    • v.15 no.6
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    • pp.624-629
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    • 2006
  • The energy transfer process between GaN and Nd ions as well as Mg codoping effect were investigated in Nd-implanted GaN films. Photoluminescence (PL) and PL excitation spectroscopies were performed on $^4F_{3/2}{\rightarrow}^4I_{9/2}$ Nd ionic level transition. At least three below bandgap traps were identified in the energy transfer process. The number of one particular trap, which is assigned to be an isoelectronic Nd trap, is increased with the Mg-codoping. The emission efficiency with above gap excitation, which emulates the electrical excitation, is further increased in GaN:Mg,Nd.

Effect of Nutrient Composition and $GA_{4+7}$ on Flower Quality and Bulb Development in Hydroponics of Cut Tulip

  • Suh, Jeung-Keun;Lee, Jung-Chul
    • Proceedings of the Korean Society for Bio-Environment Control Conference
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    • 2001.04b
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    • pp.51-56
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    • 2001
  • This study was carried out to research the effect of nutrient composition and GA4+7 on growth, flower quality and bulb development in special hydroponics of cut tulip. Flowering of 'Cassini' was markedly accelerated by standard+GA4+7, K200+GA4+7, N250+GA4+7 treatment, last internode was increased by N250 as compared with other treatment. For 'Christmas Marvel', flowering was promoted by K250+GA4+7, last infernode and total length were also increased with K250+GA4+7 as compared to other treatment. For 'Golden Apeldoorn', flowering was accelerated by K200+GA4+7, last internode was increased with N300+GA4+7 treatment and total length was increased in N250+GA4+7 treatment as compared with the standard plants. Bulb weight and number of 'Cassini', 'Christmas Marvel'and 'Golden Apeldoorn' were decreased by GA4+7 as compared to non-treatment, and bulb diameter was not affected by GA4+7.

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The characteristics of AlN buffered GaN on ion beam modified Si(111) substrates (Si(111) 위에 Ion beam 처리 후 AlN layer를 완충층으로 이용하여 성장시킨 GaN의 특성)

  • Kwang, Min-Gu;Chin, Jeong-Geun;Lee, Jae-Seok;Oh, Seung-Seok;Hyun, Jin;Byun, Dong-Jin
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.03a
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    • pp.99-99
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    • 2003
  • The growth of GaN on Si is of great interest due to the several advantages : low cost, large size and high-quality wafer availability as well as its matured technology. The crystal quality of GaN is known to be much influenced by the surface pretreatment of Si substrate[1]. In this work, the properties of GaN overlayer grown on ion beam modified Si(111) have been investigated. Si(111) surface was treated RIB with 1KeV-N$_2$$\^$+/(at 1.9 ${\times}$ 10$\^$-5/) to dose ranging from 5${\times}$10$\^$15/ to 1${\times}$10$\^$17/ prior to film growth. GaN epilayers were grown at 1100$^{\circ}C$ for 1 hour after growing AlN buffer layers for 5∼30 minutes at 1100$^{\circ}C$ in Metal Organic Chemical Vapor Deposition (MOCVD). The properties of GaN epilayers were evaluated by X-Ray Diffraction(XRD), Raman spectroscopy, Photoluminescence(PL) and Hall measurement. The results showed that the ion modified treatment markedly affected to the structural, optical and electrical characteristic of GaN layers.

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A Schottky Type Ultraviolet Photo-detector using RUO$_2$/GaN Contact (RUO$_2$/GaN 쇼트키 다이오드 형 자외선 수광소자)

  • Sin, Sang-Hun;Jeong, Byeong-Gwon;Bae, Seong-Beom;Lee, Yong-Hyeon;Lee, Jeong-Hui;Ham, Seong-Ho
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.10
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    • pp.671-677
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    • 2001
  • A RuO$_2$ Schottky photo-detector was designed and fabricated with GaN layers on the sapphire substrate. For good absorption of UV light, an epitaxial structure with undoped GaN(0.5 ${\mu}{\textrm}{m}$)/n ̄-GaN(0.1${\mu}{\textrm}{m}$)/n+-GaN(1.5${\mu}{\textrm}{m}$) was grown by MOCVD. The structure had the carrier concentrations of 3.8$\times$10$^{18}$ cm ̄$^3$, the mobility of 283$\textrm{cm}^2$/V.s. After ECR etching process for mesa structure with the diameter of about 500${\mu}{\textrm}{m}$, Al ohmic contact was formed on GaN layer. After proper passivation between the contacts with Si$_3$/N$_4$, was formed on undoped GaN layer. The fabricated Schottky diode had a specific contact resistance of 1.15$\times$10$^{-5}$$\Omega$.$\textrm{cm}^2$]. It has a low leakage current of 305 pA at -5 V, which was attributed by stable characteristics of RuO$_2$ Schottky contact. In optical measurement, it showed the high UV to visible extinction ratio of 10$^{5}$ and very high responsivity of 0.23 A/W at the wavelength of 365nm.

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Polarization of Stimulated Emission from Optically Pumped AIGaN/GaInN DH (AIGaN/GaInN DH의 광여기 유도방출광의 편광)

  • ;;H. Amano;I. Akasaki
    • Proceedings of the Materials Research Society of Korea Conference
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    • 1994.11a
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    • pp.98-98
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    • 1994
  • 최근 청색반도체레이저의 실현을 위하여 ZnSe가 대표하는 II-Ⅵ족 화합물반도체와 Gan가 대표하는 III족 질화물반도체분야에서 집중적인 연구가 이루어지고 있으며, 아직까지 실용화 되지 않고 있는 청색반도체레이저의 출현에 대하여 많은관심이 모아지고 있다. III족 질화물반도체는 InM(Eg:1.9eV)부터 AIN(Eg: 6.2eV)에 이르기까지 전 조성영역에서 완전한 고용체를 이루며, 실온에서 직접천이형 에너지 대구조를 가지므로 청색 혹은 자외영역에서 동작하는 발광소자를 제작하는데 있어 유망시 되고 있는 소재이다. 특히 GaN와 InN의 3원흔정인 GaInN를 활성층으로 이용하면 그 발전파장을 370nm부터 650nm까지 즉 가시 전 영역으로부터 근 자외영역을 포함할 수 있게 된다. 이 연구에서는 AIGaN/GaInN 이중이종접합(DH) 구조의 고아여기에 의한 유도방출고아의 편광 특성을 조사하였다. 유기금속기상에피텍셜(MOVPE)법으로 성장한 AIGaN/GaInN DH 구조의 표면에 수직으로 펄스 발진 질소레이저(파장: 337.1cm, 주기 10Hz, 폭: 8nsec) 빔을 조사하고 DH구조의 단면으로부터의 유도방출광을 편광기를 통과 시킨 후 스펙트럼을 측정하였다. 입사고아 밀도가 증가함에 따라 약 402nm의 파장에서 유도발출에 의한 가도가 큰 피크가 나타났고, 그 반치폭은 약 18meV이었다. 실온에서 AIGaN/GaInN DH 구조로 부터의 유도방출에 필요한 입사광밀도의 임계치는 약 130㎾/$\textrm{cm}^2$이었다. 한편 편광각이 90$^{\circ}$일때는 발광스펙트럼의 강도가 매우 낮고 단지 자연방출에 의한 스펙트럼만이 나타났다. 편광각이 0$^{\circ}$일 때 최대의 방출광 강도를 나타내었으며, 편광각이 -90$^{\circ}$로 회전함에 따라 발고아강도의 강도가 감소하였다. 이와 같은 결과는 광여기에 의하여 AIGaN/GaInN DH 로 부터의 유도방출광이 GaInN활성층의 단면에 평행한 전기장의방향으로, 즉 TE모드로 선형적으로 편광됨을 의미한다. AIGaN/GanN DH 로 부터의 유도방출이 선형적으로 TE모드로 편광되는 것은 이 구조를 이용한 청색 및 자외선 반도체 레이저다이오드의 실현에 매우 유익한 것이다.

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Time-Resolved Photoluminescence Measurement of Frenkel-type Excitonic Lifetimes in InGaN/GaN Multi-quantum Well Structures

  • Kim, Keun-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.08a
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    • pp.121-125
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    • 2003
  • Time-resolved photoluminescence from InGaN/GaN multi-quantum well structures was investigated for two different shapes of square- and trapezoidal wells grown by metal-organic chemical vapor deposition. To compare to the conventional square well structure with a radiative recombination lifetime of 0.170 nsec, the large value of lifetime of 0.540 nsec from trapezoidal well were found at room temperature. This value is similar to the value for GaN host material indicating no confinement effect of quantum well. Furthermore, the high resolution transmission electron microscopy image provides the In clustering effect in the trapezoidal well structure.

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Time-Resolved Photoluminescence Measurement of Frenkel-type Excitonic Lifetimes in InGaN/GaN Multi-quantum Well Structures

  • Shin, Gwi-Su;Hwang, Sung-Won;Kim, Keun-Joo
    • Transactions on Electrical and Electronic Materials
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    • v.4 no.5
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    • pp.19-23
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    • 2003
  • Time-resolved photoluminescence from InGaN/GaN multi-quantum well structures was investigated for two different shapes of square-and trapezoidal wells grown by metal-organic chemical vapor deposition. To compare to the conventional square well structure with a radiative recombination lifetime of 0.170 nsec, the large value of lifetime of 0.540 nsec from trapezoidal well were found at room temperature. This value is similar to the value for GaN host material indicating no confinement effect of quantum well. Furthermore, the high resolution transmission electron microscopy image provides the In clustering effect in the trapezoidal well structure.

Effect of metal buffer layers on the growth of GaN on Si substrates (실리콘 기판위에 금속 완충층을 이용한 GaN 성장과 특성분석)

  • Lee, Jun Hyeong;Yu, Yeon Su;Ahn, Hyung Soo;Yu, Young Moon;Yang, Min
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.23 no.4
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    • pp.161-166
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    • 2013
  • AlN buffer layers have been used for the growth of GaN layers on Si substrates. However, the doping of high concentration of carriers into AlN layers is still not easy, therefore it may cause the increase of series resistance when it is used for the electrical or optical devices. In this work, to improve such a problem, the growth of GaN layers on Si substrates were performed using metal buffer layers instead of AlN buffer layer. We tried combinations of Ti, Al, Cr and Au as metal buffer layers for the growth of GaN on Si substrates. Surface morphology was measured by optical microscope and scanning electron microscope (SEM), and optical properties and crystalline quality were measured by photoluminescence (PL) and X-ray diffractometer (XRD), respectively. Electrical resistances for both cases of AlN and metal buffer layer were compared by current-voltage (I-V) measurement.

Properties of GaN Film Grown on AlN/PSS Template by Hydride Vapor Phase Epitaxy (AlN/PSS Template 위에 HVPE로 성장한 GaN 막의 특성)

  • Son, Hoki;Lee, YoungJin;Lee, Mijai;Kim, Jin-Ho;Jeon, Dae-Woo;Hwang, Jonghee;Lee, Hae-Yong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.6
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    • pp.348-352
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    • 2016
  • In this paper, GaN film was grown on AlN/PSS by hydride vapor phase epitaxy compared with GaN on planar sapphire. Thin AlN layer for buffer layer was deposited on patterned sapphire substrate (PSS) by metal organic chemical vapor deposition. Surface roughness of GaN/AlN on PSS was remarkably decreased from 28.31 to 5.53 nm. Transmittance of GaN/AlN grown on PSS was lower than that of planar sapphire at entire range. XRD spectra of GaN/AlN grown on PSS corresponded the wurzite structure and c-axis oriented. The full width at half maximum (FWHM) values of ${\omega}$-scan X-ray rocking curve (XRC) for GaN/AlN grown on PSS were 196 and 208 arcsec for symmetric (0 0 2) and asymmetric (1 0 2), respectively. FWHM of GaN on AlN/PSS was improved more than 50% because of lateral overgrowth and AlN buffer effect.

GaN epitaxy growth by low temperature HYPE on $CoSi_2$ buffer/Si substrates (실리콘 기판과 $CoSi_2$ 버퍼층 위에 HVPE로 저온에서 형성된 GaN의 에피텍셜 성장 연구)

  • Ha, Jun-Seok;Park, Jong-Sung;Song, Oh-Sung;Yao, T.;Jang, Ji-Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.19 no.4
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    • pp.159-164
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    • 2009
  • We fabricated 40 nm-thick cobalt silicide ($CoSi_2$) as a buffer layer, on p-type Si(100) and Si(111) substrates to investigate the possibility of GaN epitaxial growth on $CoSi_2$/Si substrates. We deposited GaN using a HVPE (hydride vapor phase epitaxy) with two processes of process I ($850^{\circ}C$-12 minutes + $1080^{\circ}C$-30 minutes) and process II ($557^{\circ}C$-5 minutes + $900^{\circ}C$-5 minutes) on $CoSi_2$/Si substrates. An optical microscopy, FE-SEM, AFM, and HR-XRD (high resolution X-ray diffractometer) were employed to determine the GaN epitaxy. In case of process I, it showed no GaN epitaxial growth. However, in process II, it showed that GaN epitaxial growth occurred. Especially, in process II, GaN layer showed selfaligned substrate separation from silicon substrate. Through XRD ${\omega}$-scan of GaN <0002> direction, we confirmed that the combination of cobalt silicide and Si(100) as a buffer and HVPE at low temperature (process II) was helpful for GaN epitaxy growth.