• 제목/요약/키워드: InGaN/GaN

검색결과 1,809건 처리시간 0.028초

GaOOH로부터 GaN 분말의 합성에 미치는 B2O3의 첨가효과 (Effect of B2O3 Additives on GaN Powder Synthesis from GaOOH)

  • 송창호;신동휘;변창섭;김선태
    • 한국재료학회지
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    • 제23권2호
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    • pp.104-111
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    • 2013
  • In this study, GaN powders were synthesized from gallium oxide-hydroxide (GaOOH) through an ammonification process in an $NH_3$ flow with the variation of $B_2O_3$ additives within a temperature range of $300-1050^{\circ}C$. The additive effect of $B_2O_3$ on the hexagonal phase GaN powder synthesis route was examined by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and Fourier transformation infrared transmission (FTIR) spectroscopy. With increasing the mol% of $B_2O_3$ additive in the GaOOH precursor powder, the transition temperature and the activation energy for GaN powder formation increased while the GaN synthesis limit-time ($t_c$) shortened. The XPS results showed that Boron compounds of $B_2O_3$ and BN coexisted in the synthesized GaN powders. From the FTIR spectra, we were able to confirm that the GaN powder consisted of an amorphous or cubic phase $B_2O_3$ due to bond formation between B and O and the amorphous phase BN due to B-N bonds. The GaN powder synthesized from GaOOH and $B_2O_3$ mixed powder by an ammonification route through ${\beta}-Ga_2O_3$ intermediate state. During the ammonification process, boron compounds of $B_2O_3$ and BN coated ${\beta}-Ga_2O_3$ and GaN particles limited further nitridation processes.

AIGaN/GaN 이종접합 디바이스를 위한 GaN 에피층의 전기적 특성 (Electrical Characteristics of GaN Epi Layer on Sapphire Substrates for AIGaN/GaN Heterostructures)

  • 문도성
    • 한국전기전자재료학회논문지
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    • 제15권7호
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    • pp.591-596
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    • 2002
  • In this work, epitaxial GaN is grown on sapphire substrate in AlGaN/GaN heterostructures. Deliberate oxygen doping of GaN grown by MOVPE has been studied. The electron concentration increased as a function of the square root of the oxygen partial Pressure. Oxygen is a shallow donor with a thermal ionization energy of $27\pm2 meV$ measured by temperature dependent Hall effects. A compensation ratio of $\theta$=0.3~0.4 was determined from Hall effect measurements. The formation energy of $O_N$ of $E^F$ =1.3eV determined from the experimental data, is lower than the theoretically predicted vague.

Strain-free AlGaN/GaN 자외선 센서용 나노선 소자 연구 (Strain-free AlGaN/GaN Nanowires for UV Sensor Applications)

  • 안재희;김지현
    • Korean Chemical Engineering Research
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    • 제50권1호
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    • pp.72-75
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    • 2012
  • Strain-free AlGaN/GaN 나노선을 기판에 분산시킨 후 E-beam lithography(EBL)를 이용해 단일 나노선 자외선 센서를 제작하였다. 나노선의 구조적, 광학적 특성을 분석하기 위해 focused ion beam(FIB), photoluminescence, micro-Raman spectroscopy를 이용하여 나노선의 strain 및 형태를 조사하였다. 자외선 센서로서의 특성 여부를 확인하기 위하여 빛을 차단 한 조건과 자외선을 조사하는 조건하에서 current-voltage(I-V) 특성을 측정하였으며 각각 9.0 ${\mu}S$과 9.5 ${\mu}S$의 전기전도도(conductance)를 얻었다. 자외선 조사 조건하에서 excess carrier의 증가로 인해 전기전도도가 약 5%가 향상되었음을 알 수 있었다. 자외선을 반복적으로 조사하는 과정의 실험을 통해 우수한 포화 시간(saturation time)과 감쇠 시간(decay time)을 얻었다. 따라서 AlGaN/GaN 나노선은 자외선 센서로서 많은 가능성을 가지고 있음을 확인하였다.

열화학기상증착법을 이용한 GaN nanowire 합성 (Synthesis of GaN nanowires using thermal chemical vapor deposition)

  • 류승철;이태재;이철진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.931-934
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    • 2001
  • GaN nanowires has much interest as one-dimensional materials for blue light LED. GaN-based materials have been the subject of intensive research for blue light emission and high temperature/high power electronic devices. In this letter, the synthesis of GaN nanowires by the reaction of mixture of GaN nanowires by the reaction of mixture of Ga meta and GaN powder with NH$_3$ using thermal chemical vapor deposition is reported. X-ray diffraction, energy dispersive x-ray spectrometer, scanning electron microscopy, and transmission electron microscopy indicate that those GaN nanowires with hexagonal wurtzite structure were about 60nm in diameter and up to several hundreds of micrometers in length.

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Analysis of Electrical Characteristics of AlGaN/GaN on Si Large SBD by Changing Structure

  • Lee, Hyun-Soo;Jung, Dong Yun;Park, Youngrak;Jang, Hyun-Gyu;Lee, Hyung-Seok;Jun, Chi-Hoon;Park, Junbo;Mun, Jae Kyoung;Ryu, Sang-Ouk;Ko, Sang Choon;Nam, Eun Soo
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제17권3호
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    • pp.354-362
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    • 2017
  • We investigated the improvement in electrical characteristics of large AlGaN/GaN on Si Schottky barrier diode (SBD) induced by structural change to achieve a better trade-off between the forward and reverse performance to obtain high power conversion efficiency in PFC converter. Using an optimized dry etch condition for a large device, we fabricated three-types of SBD with 63 mm channel width: conventional, recessed, recessed dual-anode-metal SBD. The recessed dual-anode-metal SBD exhibited a very low turn-on voltage of 0.34 V, a high forward current of 1.63 A at 1.5 V, a leakage current of $114{\mu}A$ at -15 V, a breakdown voltage of 794 V.

GaOOH로부터 합성된 GaN 분말의 구조적, 광학적 특성 (Structural and Optical Properties of GaN Powders Synthesized from GaOOH)

  • 조성룡;이종원;박인용;김선태
    • 한국재료학회지
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    • 제12권6호
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    • pp.476-481
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    • 2002
  • In this work, we report on the synthesis of the GaN powders from gallium oxide hydroxide (GaOOH) powders and on the structural and optical properties of them. Simple heat treatment of GaOOH in the flow of $NH_3$ gas leads to the formation of submicron hexagonal GaN powders even at the low reaction temperature of $800^{\circ}C$. XRD measurements show that the powders obtained are the single phase GaN. EDS, FTIR, and PL measurements indicate the oxygen-associated characteristics. It is shown from the low temperature PL measurement on GaN powders synthesized at $1000^{\circ}C$ that the shallow donor-acceptor recombination induced emission is more intense than the near band-edge excitonic emission.

HVPE 법을 통한 GaN 성장 시 기판 종류 및 V/III 비에 따른 잔류 stress 특성 연구 (Study on residual stress characteristics according to the substrate type and V/III ratio during GaN growth by HVPE)

  • 이주형;이승훈;이희애;강효상;오누리;이성철;이성국;박재화
    • 한국결정성장학회지
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    • 제30권2호
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    • pp.41-46
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    • 2020
  • 본 연구에서는 HVPE 성장법으로 GaN 성장 시 GaN 내에 잔류하는 stress로 인한 crack 현상을 감소시키고자 기판 종류 및 V/III 비를 조절하여 잔류 stress 특성을 알아보고자 하였다. Sapphire, GaN template 위에 각각 V/III 비 5, 10, 15의 조건으로 GaN을 성장시켜 형성된 hexagonal pit의 분포 및 깊이를 분석하였다. 이를 통해 GaN on GaN template 성장에서 V/III 비가 높을수록 hexagonal pit의 분포 영역 및 깊이가 증가하는 것을 확인하였다. Raman 측정을 통해 hexagonal pit 영역 및 깊이가 컸던 GaN on GaN template 성장에서 V/III 비가 높을수록 stress가 감소하는 것을 확인하였다. 이를 통해 hexagonal pit의 분포 및 깊이가 증가할수록 잔류 stress가 낮아짐을 확인할 수 있었으며, 향후 후막 GaN 성장 시 stress 감소 가능성에 대해 확인하였다.

광결정 Nanocavity를 갖는 InGaN/GaN 양자우물구조의 청색 광소자 공정 및 특성평가 (Fabrications and Characterizations of InGaN/GaN Quantum Well Light Emitting Devices Including Photonic Crystal Nanocavity Structures)

  • 최재호;이정택;김근주
    • 한국전기전자재료학회논문지
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    • 제22권12호
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    • pp.1045-1057
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    • 2009
  • The authors investigated the InGaN/GaN multi-quantum well blue light emitting devices with the implementation of the photonic crystals fabricated at the top surface of p-GaN layer and the bottom interface of n-GaN layer. The top photonic crystals result in the lattice-dependent photoluminescence spectra at the wavelength of 450 nm and however, the bottom photonic crystal shows a big shift of the photoluminescence peak from 444 nm to 394 nm. The sample with the bottom photonic crystal structure also shows the lasing effect at the wavelength of 468 nm. Furthermore, the quality enhancement for the crystal growth of GaN thin film on the bottom photonic crystal comes from the modulated compressive stress which was measured by the micro-Raman spectroscopy.

Bias-Dependent Photoluminescence Analysis on InGaN/GaN MQW Solar Cells

  • Shim, Jae-Phil;Jeong, Hoonil;Choi, Sang-Bae;Song, Young Ho;Jho, Young-Dahl;Lee, Dong-Seon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.347-348
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    • 2013
  • To obtain high conversion efficiency in InGaN-based solar cells, it is critical to grow high indium (In) composed InGaN layer for increasing sun light absorption wavelength rage. At present, most InGaN-based solar cells adopt InGaN/GaN multi-quantum-well (MQW) structure for high crystalline quality of InGaN with high In composition. In this study, we fabricated and compared the performances of two types of InGaN/GaN MQW solar cells which have the 15% (SC 15) and 25% (SC 25) of In composition at quantum well layer. Although both devices showed similar dark current density and leakage current, SC 15 showed better performance under AM 1.5G illumination as shown in Fig. 1. It is interesting to note that SC 25 showed severe current density decrease as increasing voltages. As a result, it lowered short circuit current density and fill factor of the device. However, SC 15 showed steady current density and over 75 % of fill factor. To investigate these differencesmore clearly, we analyzed their photoluminescence (PL) spectra under various applied voltages as shown in Fig. 2. At the same time, photocurrent, which was generated by PL excitation, was also measured as shown in Fig. 3. Further, we investigated the relationship between piezoelectric field and performance of InGaN based solar cell varying indium composition.

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GaN 기반 광전극을 이용한 광전기화학적 물분해 수소 생산 (Photoelectrochemical (PEC) Water Splitting using GaN-based Photoelectrode)

  • 허지원;배효정;하준석
    • 마이크로전자및패키징학회지
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    • 제28권1호
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    • pp.13-20
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    • 2021
  • GaN은 III-V족 화합물 반도체로 밴드갭을 조절하는 것이 가능하고 화학적으로 안정하기 때문에 다른 물질에 비해 산성, 염기성 용액에서 부식이 적다. 또한 GaN의 밴드갭이 물의 산화·환원 준위를 포함하고 있어 외부전압 없이 물 분해가 가능하다는 장점이 있다. 하지만 GaN 자체만으로는 태양광-수소 변환 효율(solar-to-hydrogen conversion efficiency, STH)이 낮아 이를 개선하기 위해 최근 활발한 연구가 이루어지고 있다. 본 총설에서는 GaN을 PEC 물분해의 광전극으로 사용하기 위한 방법들과 연구에 대해 정리하였다.