• 제목/요약/키워드: In-situ gas addition

검색결과 33건 처리시간 0.021초

증착시 및 플라즈마 후처리에 의한 수소 주입이 투명 박막 트랜지스터에서 산화아연 채널층의 물성에 미치는 영향 (Effects of Hydrogen Injection by In-Situ and Plasma Post-Treatment on Properties of a ZnO Channel Layer in Transparent Thin Film Transistors)

  • 방정환;김원;엄현석;박진석
    • 반도체디스플레이기술학회지
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    • 제9권1호
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    • pp.35-40
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    • 2010
  • We have investigated the effects of hydrogen injection via in-situ gas addition ($O_2$, $H_2$, or $O_2$ + $H_2$ gas) and plasma post-treatment (Ar or Ar + H plasma) on material properties of ZnO that is considered to be as a channel layer in transparent thin film transistors. The variations in the electrical resistivity, optical transmittance and bandgap energy, and crystal quality of ZnO thin films were characterized in terms of the methods and conditions used in hydrogen injection. The resistivity was significantly decreased by injection of hydrogen; approximately $10^6\;{\Omega}cm$ for as-grown, $1.2\;{\times}\;10^2\;{\Omega}cm$ for in-situ with $O_2/H_2\;=\;2/3$ addition, and $0.1\;{\Omega}cm$ after Ar + H plasma treatment of 90 min. The average transmittance of ZnO films measured at a wavelength of 400-700 nm was gradually increased by increasing the post-treatment time in Ar + H plasma. The optical bandgap energy of ZnO films was almost monotonically increased by decreasing the $O_2/H_2$ ratio in in-situ gas addition or by increasing the post-treatment time in Ar + H plasma, while the post-treatment using Ar plasma hardly affected the bandgap energy. The role of hydrogen in ZnO was discussed by considering the creation and annihilation of oxygen vacancies as well as the formation of shallow donors by hydrogen.

RF 스퍼터링으로 Si 기판위에 제작된 ZnO 박막에서 ZnO 버퍼층의 가스분위기 영향 (Effects of the Gas Atmosphere of ZnO Buffer Layers in the ZnO films grown on Si Substrates by RF Magnetron Sputtering)

  • 박태은;조형균;공보현;홍순구
    • 한국전기전자재료학회논문지
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    • 제18권7호
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    • pp.656-661
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    • 2005
  • The effects of gas atmosphere and in-situ thermal annealing in buffet layers on the characteristic of the ZnO grown by RF magnetron sputtering have been investigated. It was shown that the introduction of buffer layers grown at the gas atmospheres of the mixed $Ar/O_2$ and the in-situ thermal treatment of the ZnO buffer layer improved the structural and optical properties. In addition, the ZnO films on the buffer layer thermal-annealed at $N_2$ gas ambience showed the strong emission of the near band gap exciton with narrow linewidth by combining the high-temperature growth of the ZnO film.

실시 측정시스템을 활용한 실내 환경에서 HONO 농도 조사 (Application of an In-situ Measurement System to Determine HONO Levels in an Indoor Environment)

  • 홍진의;이재훈;박승식
    • 한국대기환경학회지
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    • 제23권2호
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    • pp.191-202
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    • 2007
  • We developed an in-situ analyzer to understand the HONO levels in indoor environments. The in-situ measurement system utilizes a diffusion scrubber and luminol chemiluminescence to measure the HONO concentration with time resolution of 4-minute. Concentrations of NO, $NO_{2}$, and HONO were determined at an indoor air of an apartment for 9 days using the developed in-situ analyzer. Indoor HONO concentrations were highly elevated when a gas range was operated. Enhancements of the indoor NO, $NO_{2}$, and HONO concentrations during combustion indicate that the observed indoor HONO was formed by direct emission. In addition to the direct emission, the indoor HONO was partially generated from heterogeneous reactions of $NO_{2}$ on indoor surfaces, which was supported by strong relationships between peak NO, $NO_{2}$, and HONO concentrations, high HONO/$NO_{2}$ ratio and a weak correlation between NO and HONO concentrations. Additionally, three combustion experiments during the whole measurement period were performed to investigate the effects of unvented and vented gas burning on the HONO, NO, and $NO_{2}$ concentrations and their decay. The decay rate of the HONO concentration was significantly less than the NO and $NO_{2}$ decay rates for all the experiments, indicating that the lifetimes of trace nitrogen species in indoor environment varied in the order approximately HONO>$NO_{2}$>NO.

연료전지용 고분자전해질막의 실시간 수소 투과도 측정법 연구 (The Study on In-situ Measurement of Hydrogen Permeability through Polymer Electrolyte Membranes for Fuel Cells)

  • 임윤재;이창현
    • 멤브레인
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    • 제26권2호
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    • pp.141-145
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    • 2016
  • 고분자전해질막은 전극 이외에 전기 화학 연료전지의 성능을 결정하는 중요한 요소이다. 고분자전해질막은 가스나 양성자 등의 작은 분자를 선택적으로 수송해야 한다. 고분자전해질막을 투과한 가스는 급속히 전기 화학적 환원을 발생시켜 음극 촉매의 열화를 유발하기 때문에 수소 장벽으로 작동해야 하며 가능한 한 빨리 양성자를 이동시켜야 한다. 지금까지 고분자전해질막의 수소 기체 투과도를 측정하는데 한정된 방법(예 : Constant volume/variable pressure (Time-lag)법)을 사용했다. 그러나 측정의 대부분은 고분자전해질막은 건조된 진공 하에서 이루어진다. 그렇지 않으면 얻어진 수소 투과도는 측정 오차가 커지는 원인이 되기 쉽다. 이 연구에서는 일반적으로 고분자전해질막으로 사용되는 Nafion212의 수소 가스 투과 특성을 온도와 습도가 동시에 제어되는 in-situ 측정 시스템을 이용하여 평가하였다.

쌀, 보리, 옥수수의 반추위내 In situ 및 In vitro 분해율, 미생물 성장과 Gas 발생량에 대한 연구 (Studies on In situ and In vitro Degadabilities, Microbial Growth and Gas Production of Rice, Barley and Corn)

  • 이상민;강태원;이신자;옥지운;문여황;이성실
    • Journal of Animal Science and Technology
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    • 제48권5호
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    • pp.699-708
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    • 2006
  • 본 시험은 반추위 누관이 시술된 한우 수소 3두를 이용하여 쌀, 옥수수 및 보리의 in situ 분해율과 in vitro 시험으로서 영양소 분해율, 미생물 성장량, pH 변화 및 gas 발생량을 비교분석함으로써 쌀의 사료적 이용성을 평가해 보고자 수행되었다.In situ 건물 및 유기물 소실율은 반추위내 24시간 발효 시, 보리와 쌀은 거의 대부분이 소실된 반면, 옥수수는 약 67%만 소실되어 분해 속도가 매우 느린 것으로 나타났다. 수용성 물질인 ‘a’ 부분은 옥수수, 쌀, 보리 순으로 많았으며, 천천히 분해되는 ‘b’ 부분은 ‘a’ 부분과 정 반대의 경향으로서 ‘b’ 부분의 분해 상수(‘c’ 부분)로부터 시간당 건물과 유기물의 분해속도는 보리의 경우 각각 38.3%, 37.2%로서 쌀(7.7%, 5.6%)이나 옥수수(4.1%, 1.3%)에 비해 매우 빠르게 일어났다. In vitro 건물 및 유기물 분해율은 in situ 분해율에 비해 수준은 현저히 낮았으나, 보리, 쌀, 옥수수 순으로 높아 곡류 간 순서는 일치하였다. In vitro 미생물 성장은 쌀이 옥수수나 보리보다 상대적으로 낮았으나, 가스 발생량은 높게 나타났으며, pH는 발효시간에 따른 저하속도가 쌀에서 가장 느린 것으로 나타났다. 발효시간에 따른 미생물 성장량은 발효 12시간까지 높아졌다가 이후로 감소하였고, 배양액의 pH는 발효초기에는 높았다가 이후로 점차 감소하였으며, gas 발생량은 발효 9시간까지는 빠르게 증가하였다가 이후로 증가폭이 둔화되었다.이상의 결과에서 반추위내 건물과 유기물의 분해율과 발효시간의 경과에 따른 pH의 저하속도 등을 고려하면, 쌀은 옥수수와 함께 반추위내 발효 안정을 위한 에너지원으로서 사용 할 수 있을 것으로 사료된다.

MOVPE 단결정층 성장법 IV. MOVPE 및 ALE 반응경로 (Metal-Organic Vapor Phase Epitaxy IV. MOVPE and ALE Reaction Mechanisms)

  • 정원국
    • 한국표면공학회지
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    • 제24권1호
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    • pp.1-17
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    • 1991
  • Understanding of the detailed reaction mechanisms during MOVPE and ALE is essential to further improve the properties of the grown crystals and the controllability of the growth parameters. The unified models for the detailed reaction paths are not available at this stage. The study, however, has been advanced to the extent that consensus on some of the reaction paths can be drawn from the scattered data. Metalakyls such as TMGa and TMIn seem to nearly fully decompose in the gas phase through homogeneous reaction at the typical MOVPE growth temperature. Hydrides such as AsH3 and PH3, on the contrary. seem to decompose heterogeneously onthe substrate surfaces as well as homogeneously in the gas phase. However, at lower temperatures, where ALE crystals are typically grown, the growth process is strongly dependent on the surface reactions. It seems that steric hindrance effects which the radicals reaching the substrate exhibit on the surface the growth rate a function of the metalalkyle supply durations. In addition, dydrogens released from hydrides seem to play an essential role in removing carbons leberated from the metalalkyls. High growth temperatures also seem to be effective in desorbing carbons from surface. The understanding of the reaction mechanisms was possible though diverse appraaches utilizing many ex-situ and in-situ diagnostic techniques and genuine experimental designs. It is the purpose of this paper to review and discuss many of these efforts and to draw some possible conclusions from them.

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MOVPE 단결정층 성장법 IV. MOVPE 및 ALE 반응경로 (Metal-Organic Vapor Phase Epitaxy IV. MOVPE and ALE Reaction Mechanisms)

  • 정원국
    • 한국표면공학회지
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    • 제24권1호
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    • pp.1.1-1.1
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    • 1991
  • Understanding of the detailed reaction mechanisms during MOVPE and ALE is essential to further improve the properties of the grown crystals and the controllability of the growth parameters. The unified models for the detailed reaction paths are not available at this stage. The study, however, has been advanced to the extent that consensus on some of the reaction paths can be drawn from the scattered data. Metalakyls such as TMGa and TMIn seem to nearly fully decompose in the gas phase through homogeneous reaction at the typical MOVPE growth temperature. Hydrides such as AsH3 and PH3, on the contrary. seem to decompose heterogeneously onthe substrate surfaces as well as homogeneously in the gas phase. However, at lower temperatures, where ALE crystals are typically grown, the growth process is strongly dependent on the surface reactions. It seems that steric hindrance effects which the radicals reaching the substrate exhibit on the surface the growth rate a function of the metalalkyle supply durations. In addition, dydrogens released from hydrides seem to play an essential role in removing carbons leberated from the metalalkyls. High growth temperatures also seem to be effective in desorbing carbons from surface. The understanding of the reaction mechanisms was possible though diverse appraaches utilizing many ex-situ and in-situ diagnostic techniques and genuine experimental designs. It is the purpose of this paper to review and discuss many of these efforts and to draw some possible conclusions from them.

PREFERRED ORIENTATION OF TIN FILM STUDIED BT A REAL TIME SYNCHROTRON X-RAY SCATTERING

  • Je, J.H.;Noh, D.Y.
    • 한국표면공학회지
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    • 제29권5호
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    • pp.399-406
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    • 1996
  • The orientational cross-over phenomena in an RF sputtering growth of TiN films were studied in an in-situ, real-time synchrotron x-ray scattering experiment. For the films grown with pure Ar sputtering gas, the cross-over from the more strained (002)-oriented grains to the less strained (111)-oriented grains occurred as the film thickness was increased. As the sputtering power was increased, the cross-over thickness, at which the growth orientation changes from the <002> to the <111> direction, was decreased. The addition of $N_2$ besides Ar as sputtering gas suppressed the cross-over, and consequently resulted in the (002) preferred orientation without exhibiting the cross-over. We attribute the observed cross-over phenomena to the competition between the surface and the strain energy. The x-ray powder diffraction, the x-ray reflectivity, and the ex-situ AFM surface topology study consistently suggest that the microscopic growth front was in fact always the (002) planes. In the initial stage of growth, the (002) planes were aligned to the substrate surface to minimize the surface energy. At later stages, however, the (002) growth front tilted away from the surface by about $60^{\circ}$ to relax the strain, which caused the cross-over of the preferred growth direction to the <111> direction.

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토양의 자연정화능과 다기능성 Colloidal Gas Aphron을 이용한 지하 환경에서의 BTEX 처리기술 개발

  • 박주영;남경필
    • 한국지하수토양환경학회:학술대회논문집
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    • 한국지하수토양환경학회 2004년도 임시총회 및 추계학술발표회
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    • pp.269-272
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    • 2004
  • The use of colloidal gas aphron (CGA), as an external oxygen carrier, provides a promising alternative to promote aerobic bioremediation of BTEX in the subsurface environment. CGA is a stable bubble supported by three surfactant layers and can supply oxygen below the soil surface uniformly due to its plug-flow characteristic. Since CGA has a hydrophobic layer that can act as a partitioning medium for hydrophobic contaminants it is known to facilitate desorption of soil-sorbed contaminants. In addition, bioaugmentation and biostimulation are possibly achieved by using CGA when generated from a solution containing BTEX-degrading microorganisms and appropriate nutrients. In this study, we presented the physico-chemical characteristics of CGA generated from a solution composed of microorganisms and nutrients. The applicability of CGA as an in situ aerobic bioremediation technology of BTEX will be further evaluated.

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토착 미생물의 활성에 의한 유류오염 토양 정화 실험

  • 이지훈;이종규;최상진
    • 한국지하수토양환경학회:학술대회논문집
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    • 한국지하수토양환경학회 2002년도 총회 및 춘계학술발표회
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    • pp.199-202
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    • 2002
  • Many methods have been developed for the remediation of contaminated soil and groundwater. Among those technologies, in-situ bioremediation is most likely to be cost-effective method for petroleum hydrocarbon contamination. But the in-situ bioremediation can require more time to remediate hydrocarbon-contaminated soil and groundwater than other methods. Therefore we intended to save time of in-situ bioremediation using a biological additive to activate indigenous microbes in soil. The additive, 'Inipol EAP 22' stimulates the growth of specific flora, significantly accelerating the speed at which hydrocarbons are biodegraded. And it hans been tested in accordance with protocol approved by the USEPA and is registered on the National Contingency Plan Product Schedule List. In the experiment, three soil samples contaminated with fuel oil were prepared in the same concentration. Inipol EAP 22 was not added to one sample and was added to the other two samples with 5% and 10% of hydrocarbon by weight respectively. And $CO_2$gas derived from bacterial respiration was analyzed in each samples for 15 days. As a result, 145% and 153% of $CO_2$ evolution (microbial respiration) against the sample without 'Inipol EAP 22' occurred in samples with 'Inipol EAP 22' addition of 5% and 10%, respectively

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