• Title/Summary/Keyword: In-situ gas addition

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Effects of Hydrogen Injection by In-Situ and Plasma Post-Treatment on Properties of a ZnO Channel Layer in Transparent Thin Film Transistors (증착시 및 플라즈마 후처리에 의한 수소 주입이 투명 박막 트랜지스터에서 산화아연 채널층의 물성에 미치는 영향)

  • Bang, Jung-Hwan;Kim, Won;Uhm, Hyun-Seok;Park, Jin-Seok
    • Journal of the Semiconductor & Display Technology
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    • v.9 no.1
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    • pp.35-40
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    • 2010
  • We have investigated the effects of hydrogen injection via in-situ gas addition ($O_2$, $H_2$, or $O_2$ + $H_2$ gas) and plasma post-treatment (Ar or Ar + H plasma) on material properties of ZnO that is considered to be as a channel layer in transparent thin film transistors. The variations in the electrical resistivity, optical transmittance and bandgap energy, and crystal quality of ZnO thin films were characterized in terms of the methods and conditions used in hydrogen injection. The resistivity was significantly decreased by injection of hydrogen; approximately $10^6\;{\Omega}cm$ for as-grown, $1.2\;{\times}\;10^2\;{\Omega}cm$ for in-situ with $O_2/H_2\;=\;2/3$ addition, and $0.1\;{\Omega}cm$ after Ar + H plasma treatment of 90 min. The average transmittance of ZnO films measured at a wavelength of 400-700 nm was gradually increased by increasing the post-treatment time in Ar + H plasma. The optical bandgap energy of ZnO films was almost monotonically increased by decreasing the $O_2/H_2$ ratio in in-situ gas addition or by increasing the post-treatment time in Ar + H plasma, while the post-treatment using Ar plasma hardly affected the bandgap energy. The role of hydrogen in ZnO was discussed by considering the creation and annihilation of oxygen vacancies as well as the formation of shallow donors by hydrogen.

Effects of the Gas Atmosphere of ZnO Buffer Layers in the ZnO films grown on Si Substrates by RF Magnetron Sputtering (RF 스퍼터링으로 Si 기판위에 제작된 ZnO 박막에서 ZnO 버퍼층의 가스분위기 영향)

  • Park, Tae-Eun;Cho, Hyung-Koun;Kong, Bo-Hyun;Hong, Soon-Ku
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.7
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    • pp.656-661
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    • 2005
  • The effects of gas atmosphere and in-situ thermal annealing in buffet layers on the characteristic of the ZnO grown by RF magnetron sputtering have been investigated. It was shown that the introduction of buffer layers grown at the gas atmospheres of the mixed $Ar/O_2$ and the in-situ thermal treatment of the ZnO buffer layer improved the structural and optical properties. In addition, the ZnO films on the buffer layer thermal-annealed at $N_2$ gas ambience showed the strong emission of the near band gap exciton with narrow linewidth by combining the high-temperature growth of the ZnO film.

Application of an In-situ Measurement System to Determine HONO Levels in an Indoor Environment (실시 측정시스템을 활용한 실내 환경에서 HONO 농도 조사)

  • Hong, Jin-Hee;Lee, Jai-Hoon;Park, Seung-Shik
    • Journal of Korean Society for Atmospheric Environment
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    • v.23 no.2
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    • pp.191-202
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    • 2007
  • We developed an in-situ analyzer to understand the HONO levels in indoor environments. The in-situ measurement system utilizes a diffusion scrubber and luminol chemiluminescence to measure the HONO concentration with time resolution of 4-minute. Concentrations of NO, $NO_{2}$, and HONO were determined at an indoor air of an apartment for 9 days using the developed in-situ analyzer. Indoor HONO concentrations were highly elevated when a gas range was operated. Enhancements of the indoor NO, $NO_{2}$, and HONO concentrations during combustion indicate that the observed indoor HONO was formed by direct emission. In addition to the direct emission, the indoor HONO was partially generated from heterogeneous reactions of $NO_{2}$ on indoor surfaces, which was supported by strong relationships between peak NO, $NO_{2}$, and HONO concentrations, high HONO/$NO_{2}$ ratio and a weak correlation between NO and HONO concentrations. Additionally, three combustion experiments during the whole measurement period were performed to investigate the effects of unvented and vented gas burning on the HONO, NO, and $NO_{2}$ concentrations and their decay. The decay rate of the HONO concentration was significantly less than the NO and $NO_{2}$ decay rates for all the experiments, indicating that the lifetimes of trace nitrogen species in indoor environment varied in the order approximately HONO>$NO_{2}$>NO.

The Study on In-situ Measurement of Hydrogen Permeability through Polymer Electrolyte Membranes for Fuel Cells (연료전지용 고분자전해질막의 실시간 수소 투과도 측정법 연구)

  • Lim, Yoon Jae;Lee, Chang Hyun
    • Membrane Journal
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    • v.26 no.2
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    • pp.141-145
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    • 2016
  • Polymer electrolyte membranes (PEMs) are key components to determine electrochemical fuel cell performances, in addition to electrode materials. The PEMs need to satisfy selective transport behaviors to small molecules including gases and protons; the PEMs have to transport protons as fast as possible, while they should act as hydrogen barriers, since the permeated gas induces the thermal degradation of cathode catalyst, resulting in rapid electrochemical reduction. To date, limited tools have been used to measure how fast hydrogen gas permeates through PEMs (e.g., Constant volume/variable Pressure (time-lag) method). However, most of the measurements are conducted under vacuum where PEMs are fully dried. Otherwise, the obtained hydrogen permeance is easily changeable, which causes the measurement errors to be large. In this study, hydrogen permeation properties through Nafion212 used as a standard PEM are evaluated using an in-situ measurement system in which both temperature and humidity are controlled at the same time.

Studies on In situ and In vitro Degadabilities, Microbial Growth and Gas Production of Rice, Barley and Corn (쌀, 보리, 옥수수의 반추위내 In situ 및 In vitro 분해율, 미생물 성장과 Gas 발생량에 대한 연구)

  • 이상민;강태원;이신자;옥지운;문여황;이성실
    • Journal of Animal Science and Technology
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    • v.48 no.5
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    • pp.699-708
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    • 2006
  • Ground rice, barley and corn were fed separately to the ruminally cannulated Hanwoo (Korean native cattle) for comparing their in situ and in vitro degradabilities, microbial growth, pH and gas production. It has been found that nearly all the dry matter (DM) and organic matter (OM) in barley and rice disappeared during 24 hr suspension in the rumen, but those in corn were only reduced by around 67%. Water soluble DM and OM fractions(‘a’), ranked from highest to lowest was corn, then rice and finally barley, but the order was reversed for content ‘b’, degradable fraction during time ‘t’. Judging by the degradation parameter of ‘b’ fraction, degradation rates per hour of DM and OM for barley were 38.3% and 37.2% respectively, significantly higher than those for rice (7.7% and 5.6%) and corn (4.1% and 1.3%). In general, results obtained from in vitro degradability of DM and OM were lower than those from in situ trials, but the ranking order of degradability was in agreement between both trials. In particular, ground rice has relatively lower in vitro microbial growth than corn or barley, but exhibited higher gas production. In addition, in vitro microbial growth of ground rice increased with up to 12 hr of incubation period, thereafter experienced a decrease with extended incubation time. pH of in vitro solution of rice decreased following 9 hr of incubation but gas production increased rapidly during the same period. From the results of DM and OM degradabilities and pH changes of in vitro solution with incubation time, it is concluded that rice represents a good source of energy for stability of rumen fermentation.

Metal-Organic Vapor Phase Epitaxy IV. MOVPE and ALE Reaction Mechanisms (MOVPE 단결정층 성장법 IV. MOVPE 및 ALE 반응경로)

  • 정원국
    • Journal of Surface Science and Engineering
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    • v.24 no.1
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    • pp.1-17
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    • 1991
  • Understanding of the detailed reaction mechanisms during MOVPE and ALE is essential to further improve the properties of the grown crystals and the controllability of the growth parameters. The unified models for the detailed reaction paths are not available at this stage. The study, however, has been advanced to the extent that consensus on some of the reaction paths can be drawn from the scattered data. Metalakyls such as TMGa and TMIn seem to nearly fully decompose in the gas phase through homogeneous reaction at the typical MOVPE growth temperature. Hydrides such as AsH3 and PH3, on the contrary. seem to decompose heterogeneously onthe substrate surfaces as well as homogeneously in the gas phase. However, at lower temperatures, where ALE crystals are typically grown, the growth process is strongly dependent on the surface reactions. It seems that steric hindrance effects which the radicals reaching the substrate exhibit on the surface the growth rate a function of the metalalkyle supply durations. In addition, dydrogens released from hydrides seem to play an essential role in removing carbons leberated from the metalalkyls. High growth temperatures also seem to be effective in desorbing carbons from surface. The understanding of the reaction mechanisms was possible though diverse appraaches utilizing many ex-situ and in-situ diagnostic techniques and genuine experimental designs. It is the purpose of this paper to review and discuss many of these efforts and to draw some possible conclusions from them.

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Metal-Organic Vapor Phase Epitaxy IV. MOVPE and ALE Reaction Mechanisms (MOVPE 단결정층 성장법 IV. MOVPE 및 ALE 반응경로)

  • 정원국
    • Journal of Surface Science and Engineering
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    • v.24 no.1
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    • pp.1.1-1.1
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    • 1991
  • Understanding of the detailed reaction mechanisms during MOVPE and ALE is essential to further improve the properties of the grown crystals and the controllability of the growth parameters. The unified models for the detailed reaction paths are not available at this stage. The study, however, has been advanced to the extent that consensus on some of the reaction paths can be drawn from the scattered data. Metalakyls such as TMGa and TMIn seem to nearly fully decompose in the gas phase through homogeneous reaction at the typical MOVPE growth temperature. Hydrides such as AsH3 and PH3, on the contrary. seem to decompose heterogeneously onthe substrate surfaces as well as homogeneously in the gas phase. However, at lower temperatures, where ALE crystals are typically grown, the growth process is strongly dependent on the surface reactions. It seems that steric hindrance effects which the radicals reaching the substrate exhibit on the surface the growth rate a function of the metalalkyle supply durations. In addition, dydrogens released from hydrides seem to play an essential role in removing carbons leberated from the metalalkyls. High growth temperatures also seem to be effective in desorbing carbons from surface. The understanding of the reaction mechanisms was possible though diverse appraaches utilizing many ex-situ and in-situ diagnostic techniques and genuine experimental designs. It is the purpose of this paper to review and discuss many of these efforts and to draw some possible conclusions from them.

PREFERRED ORIENTATION OF TIN FILM STUDIED BT A REAL TIME SYNCHROTRON X-RAY SCATTERING

  • Je, J.H.;Noh, D.Y.
    • Journal of Surface Science and Engineering
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    • v.29 no.5
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    • pp.399-406
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    • 1996
  • The orientational cross-over phenomena in an RF sputtering growth of TiN films were studied in an in-situ, real-time synchrotron x-ray scattering experiment. For the films grown with pure Ar sputtering gas, the cross-over from the more strained (002)-oriented grains to the less strained (111)-oriented grains occurred as the film thickness was increased. As the sputtering power was increased, the cross-over thickness, at which the growth orientation changes from the <002> to the <111> direction, was decreased. The addition of $N_2$ besides Ar as sputtering gas suppressed the cross-over, and consequently resulted in the (002) preferred orientation without exhibiting the cross-over. We attribute the observed cross-over phenomena to the competition between the surface and the strain energy. The x-ray powder diffraction, the x-ray reflectivity, and the ex-situ AFM surface topology study consistently suggest that the microscopic growth front was in fact always the (002) planes. In the initial stage of growth, the (002) planes were aligned to the substrate surface to minimize the surface energy. At later stages, however, the (002) growth front tilted away from the surface by about $60^{\circ}$ to relax the strain, which caused the cross-over of the preferred growth direction to the <111> direction.

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토양의 자연정화능과 다기능성 Colloidal Gas Aphron을 이용한 지하 환경에서의 BTEX 처리기술 개발

  • 박주영;남경필
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2004.09a
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    • pp.269-272
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    • 2004
  • The use of colloidal gas aphron (CGA), as an external oxygen carrier, provides a promising alternative to promote aerobic bioremediation of BTEX in the subsurface environment. CGA is a stable bubble supported by three surfactant layers and can supply oxygen below the soil surface uniformly due to its plug-flow characteristic. Since CGA has a hydrophobic layer that can act as a partitioning medium for hydrophobic contaminants it is known to facilitate desorption of soil-sorbed contaminants. In addition, bioaugmentation and biostimulation are possibly achieved by using CGA when generated from a solution containing BTEX-degrading microorganisms and appropriate nutrients. In this study, we presented the physico-chemical characteristics of CGA generated from a solution composed of microorganisms and nutrients. The applicability of CGA as an in situ aerobic bioremediation technology of BTEX will be further evaluated.

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토착 미생물의 활성에 의한 유류오염 토양 정화 실험

  • 이지훈;이종규;최상진
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2002.04a
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    • pp.199-202
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    • 2002
  • Many methods have been developed for the remediation of contaminated soil and groundwater. Among those technologies, in-situ bioremediation is most likely to be cost-effective method for petroleum hydrocarbon contamination. But the in-situ bioremediation can require more time to remediate hydrocarbon-contaminated soil and groundwater than other methods. Therefore we intended to save time of in-situ bioremediation using a biological additive to activate indigenous microbes in soil. The additive, 'Inipol EAP 22' stimulates the growth of specific flora, significantly accelerating the speed at which hydrocarbons are biodegraded. And it hans been tested in accordance with protocol approved by the USEPA and is registered on the National Contingency Plan Product Schedule List. In the experiment, three soil samples contaminated with fuel oil were prepared in the same concentration. Inipol EAP 22 was not added to one sample and was added to the other two samples with 5% and 10% of hydrocarbon by weight respectively. And $CO_2$gas derived from bacterial respiration was analyzed in each samples for 15 days. As a result, 145% and 153% of $CO_2$ evolution (microbial respiration) against the sample without 'Inipol EAP 22' occurred in samples with 'Inipol EAP 22' addition of 5% and 10%, respectively

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