• 한국기계가공학회지
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• 제12권4호
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• pp.75-80
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• 2013

Single crystal sapphire being used in high technology industry is a brittle material with a high hardness and excellent physical properties. ELID(Electrolytic In-Process Dressing) grinding technology was applied to material removal machining process of single crystal sapphire wafer. Ultrasonic vibration which added to material using ultrasonic table was adopted to efficient ELID grinding of sapphire materials. The evaluation of the ground surface of single crystal sapphire wafer was carried out by means of surface measuring by using AFM(Atomic Force Microscope), surface roughness tester and optical microscope device. As the results of experiment, it was shown that more efficient grinding was conducted when using ultrasonic table. In case of using #170 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was superior to ELID ground specimen without ultrasonic table. However, In case of using #2000 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was inferior to ELID ground specimen without ultrasonic table.

• Nuclear Engineering and Technology
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• 제54권12호
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• pp.4441-4448
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• 2022

The electrochemical oxidation process has been widely studied in the field of wastewater treatment for the decomposition of organic materials through oxidation using ·OH generated on the anode. Pt anode electrodes with high durability and long-term operability have a low oxygen evolution potential, making them unsuitable for electrochemical oxidation processes. Therefore, to apply Pt electrodes that are suitable for long-term operation and large-scale processes, it is necessary to develop a new method for improving the decomposition rate of organic materials. This study introduces a method to improve the decomposition rate of organic materials when using a Pt anode electrode in the electrochemical oxidation process for the treatment of organic decontamination liquid waste. Electrochemical decomposition tests were performed using sodium dodecylbenzenesulfonate (SDBS) as a representative organic material and a Pt mesh as the anode electrode. Y₂O₃ particles were introduced into the electrolytic cell to improve the decomposition rate. The decomposition rate significantly improved from 21% to 99%, and the current efficiency also improved. These results can be applied to the electrochemical oxidation process without additional system modification to enhance the decomposition rate and current efficiency.

• 한국산학기술학회논문지
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• 제19권6호
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• pp.160-166
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• 2018

세계적으로 반도체장비 시장은 오래전부터 성장하고 있다. 유체제어시스템은 반도체 제조 장비에 사용되어지는 배관을 집적화시켜 유체의 공급을 제어할 수 있도록 모듈화, 소형화한 시스템이다. 반도체의 제조공정은 여러 종류의 맹독성 가스를 필수적으로 다루어야 한다. 특히 실제 작업 공정에서는 이러한 맹독성 가스의 정밀한 제어가 필요하다. 이러한 맹독성가스를 제어하는 시스템은 피팅, 밸트, 튜브, 필터, 레귤레이터 등 다양한 부품들로 구성되어 있다. 이 부품들은 누출 없이 고압 가스를 계속 제어해야 하기 때문에 정밀하게 제조되어야 하고 내부식성이 있어야 한다. 이를 위해 금속 블록 및 금속 가스킷의 표면 가공 및 경화 기술을 연구해야 한다. 본 논문에서는 이러한 유체제어시스템에서 가장 기본이 되는 V-Block의 직경, 유량, 각도를 다르게 설계하여 내부에서 어떠한 유동흐름을 보이는지 파악하고자 하며, 유체제어시스템에서 가장 기본이 되는 유체제어벨브 시스템의 내부 유동해석을 통하여 안정적인 유량을 공급할 수 있는 설계의 최적화에 대해 연구하고 분석하였다.

• 한국해양환경ㆍ에너지학회지
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• 제6권3호
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• pp.45-53
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• 2003

본 연구에서는 선저폐수 중에 유화된 상태의 유분이 존재할 경우엔 기존의 유처리 분리장치에 의해 선박의 배출허용기준치를 만족하는데 어려움이 있는 것을 감안하여 기존의 유처리 분리시스템에 전기화학적 처리장치를 추가하는 방안을 검토하고자한다. 이를 위해 실험실 규모의 전기화학적 처리장치를 설계ㆍ제작하여 각종 변수인 수력학적 체류시간, 전류밀도, 양극과 음극간의 간격 등을 변화시키며 유화유 폐수중의 유분 제거성능실험을 실시하였으며, 유화된 선저폐수 중의 유분 제거성능실험을 수행하였다. 본 실험결과 전기화학적 처리장치에 의해 유화유 폐수를 효과적으로 처리할 수 있는 가능성을 확인할 수 있었다.

• 한국유기농업학회지
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• 제11권4호
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• pp.93-102
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• 2003

This research was made to determine the optimum mixing ratio cattle manure and food waste investigating the effect that gets the growth and reproductive efficiency of earthworm and productivity of earthworm casts at processing process when handled cattle manure and food waste by vermicomposting, in order to establish the treatment system of organic wastes by vermicomposting. Survival ratio of earthworm was highest in the mixing ratio 80~100% : 20~0% of cattle manure and food Waste, and the increasing ratio was highest in cattle manure 100%, and the number of young worms, the weight of young worms and the productivity of earthworm casts in plots more than the mixing ratio 60% of cattle manure were significantly higher than in the other treatment plots(p<0.05). Total nitrogen and carbon contents in earthworm cast were decreased when rearing time of earthworm was increased. Carbon and nitrogen rate(C/N) of earthworm cast in plots more than the mixing ratio 80% of cattle manure was significantly higher than in the other treatment plots(p<0.05). pH in earthworm cast was higher than that in residual matter. The contents of electrolytic conductivity in the higher mixing ratio of food waste were significantly higher than those in the other treatment plots(p<0.05).

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.660-665
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of grinding wheel in the in-feed machining method. In this study, grinding experiments by the rotary surface grinding machine with straight type wheels ware conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding n/c equipment with an ELID wit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2 - 6 nm in Ra.

• 한국재료학회지
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• 제22권1호
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• pp.8-15
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• 2012

Silicon-based thin film was prepared at room temperature by an electrochemical deposition method and a feasibility study was conducted for its use as an anode material in a rechargeable lithium battery. The growth of the electrodeposits was mainly concentrated on the surface defects of the Cu substrate while that growth was trivial on the defect-free surface region. Intentional formation of random defects on the substrate by chemical etching led to uniform formation of deposits throughout the surface. The morphology of the electrodeposits reflected first the roughened surface of the substrate, but it became flattened as the deposition time increased, due primarily to the concentration of reduction current on the convex region of the deposits. The electrodeposits proved to be amorphous and to contain chlorine and carbon, together with silicon, indicating that the electrolyte is captured in the deposits during the fabrication process. The silicon in the deposits readily reacted with lithium, but thick deposits resulted in significant reaction overvoltage. The charge efficiency of oxidation (lithiation) to reduction (delithiation) was higher in the relatively thick deposit. This abnormal behavior needs to clarified in view of the thickness dependence of the internal residual stress and the relaxation tendency of the reaction-induced stress due to the porous structure of the deposits and the deposit components other than silicon.

• 한국표면공학회지
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• 제49권2호
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• pp.125-129
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• 2016

Anodizing is a technology to generate thicker and high-quality films than natural oxide films by treating metals via electrochemical methods. Electrochemical manufacturing method of nano structure is an efficient technology in terms of cost reduction, high productivity and complicated shapes, which receives the spotlight in diverse areas. Especially, artificial films generated by anodizing technology possess excellent mechanical characteristics including hardness and wear resistance. It is also easy to modify thickness and adjust shape of those artificial films so that they are mainly used in sensors, filters, optical films and electrolytic condensers. In this study, experiment was performed to observe the effect of current density on porous film formation in two-step anodizing for Al alloy. Anodizing process was performed with 10 vol.% sulfuric acid electrolyte while the temperature was maintained at $10^{\circ}C$ using a double beaker. and $10{\sim}30mA/cm^2$ was applied for 40 minutes using a galvanostatic method. As a result, both pore diameters and distances between pores tended to increase as the local temperature and electrolysis activity increased due to the increase in applied current density.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.173.2-173.2
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• 2016

A two-step oxidation method was applied on Al6061 to debate the growth mechanism of plasma electrolytic oxidation (PEO) coating. The specimens were first oxidized in the primary electrolyte solution {$Na_3PO_4$ (8g/l), NaOH (2g/l), consequently, the specimens were transferred into a different electrolyte {$K_2ZrF_6$ (8g/l), NaOH (2g/l), $Na_2SiF_6$ (0.5g/l)} for further oxidation. The processes was conducted for various processing times. It was found the second step electrolyte component were reached to inner layers, in contrast to the primary step components which were thrustle to the outer layer. The presence of the secondary component in the inner layers were significantly varied with processing time which suggest the change in growth properties with processing time. further more the inside growth of the secondary component confirmed the increasing trend in the downward growth of the coating layer. The corrosion and hardness properties of the coatings were found highly improved with change in growth features with increasing the processing time.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.999-1002
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• 1997

In this study, in order to set ELID conditions in the internal grinding wheel, the characteristics with the variations of grit size, output voltage and peak current were examined by using conventional machining center(M/C) equipped with electrolytic in-process dressing(EL1D). The initial working voltage was lowered and the working current was high with increasing grit size. The insulating layer thickness increased, as the final voltage increased with the output voltage and peak current. The initial wear rate of the wheel machined with ELID were measured indirectly by using surface roughness tracer. The initial wear rate of the wheel with ELID increased along with high grit size. In case that the grit size with ELID was low, the output voltage and peak current had to be increased to increase the insulating layer thickness. In case of the high grit size, the output voltage and the peak current were established low, which made the insulating layer thickness decreased.