• 센서학회지
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• 제18권4호
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• pp.301-306
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• 2009

This paper describes the design and fabrication of 16$\times$16 microbolometer infrared focal plane arrays based on iMEMS technology. Amorphous silicon was used for infrared-sensitive material, and it showed the resistance of 18 Mohm and the temperature coefficient of resistivity of -2.4 %. The fabricated sensors exhibited responsivity of 78 kV/W and thermal time constant of 8.0 msec at a bias voltage of 0.5 V. The array performances had satisfactory uniformity less than 5 % within one-sigma. Also, 1/f noise of pixel was measured and the noise factor of $6\times10^{-11}$ was extracted. Finally, we obtained detectivity of $1.27\times10^9cmHz^{0.5}/W$ and noise equivalent temperature difference of 200 mK at a frame rate of 30 Hz.

• 센서학회지
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• 제18권4호
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• pp.311-315
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• 2009

This paper describes the characteristics of a poly 3C-SiC micro heater which was fabricated on AlN(0.1 $\mu$m)/3C-SiC(1.0 $\mu$m) suspended membranes by surface micro-machining technology. The 3C-SiC and AlN thin films which have wide energy band gap and very low lattice mismatch were used sensors for high temperature and voltage environments. The 3C-SiC thin film was used as micro heaters and temperature sensor materials simultaneously. The implemented 3CSiC RTD(resistance of temperature detector) and the power consumption of micro heaters were measured and calculated. The TCR(thermal coefficient of the resistance) of 3C-SiC RTD is about -5200 ppm/$^{\circ}C$ within a temperature range from 25 $^{\circ}C$ to 50 $^{\circ}C$ and -1040 ppm/$^{\circ}C$ at 500 $^{\circ}C$. The micro heater generates the heat about 500 $^{\circ}C$ at 10.3 mW. Moreover, durability of 3C-SiC micro heaters in high voltages is better than Pt micro heaters. A thermal distribution measured and simulated by IR thermovision and COMSOL is uniform on the membrane surface.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.175-175
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• 2011

인체감지 적외선 센서로 사용되는 마이크로볼로미터 센서 감지재료인 $V_{2-x}W_xO_5$를 증착하고 단위소자를 제작하여 저항 및 센서성능을 측정 조사하였다. 감지재료는 $V_2O_5$에 W을 첨가하여 $V_{2-n}W_nO_5$ 타겟을 제작하였으며 RF sputtering 장비를 이용하여 $V_{1.85}W_{0.15}O_5$ 박막을 증착하였다. 증착온도 $400^{\circ}C$, $Ar/O_2$ 가스비율 50/20, 두께 200nm로 증착된 센서 재료의 특성을 조사한 결과 저항은 약 $20{\sim}70k{\Omega}$이었으며, TCR 값은 -3%/$^{\circ}C$ 이상으로 매우 우수한 박막특성을 얻었다. 볼로미터소자는 $40{\times}40{\sim}140{\times}140um^2$의 셀면적으로 설계하여 전극패턴과 습식식각공정으로 센서 구조체를 제작하였다. 소자의 성능평가는 검출기 측정장비를 이용하여 반응도 및 탐지도 특성을 조사하였다.

• 센서학회지
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• 제14권4호
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• pp.244-249
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• 2005

In this study, radiation sensor tips are fabricated for remote sensing of X or gamma ray with inorganic scintillators and plastic optical fiber. The visible range of light from the inorganic scintillator that is generated by radiation source is guided by the plastic optical fiber and is measured by optical detector and power-meter. Two kinds of sensor tips are designed and fabricated such as film type and powder type. Many kinds of inorganic scintillators are used to fabricate both sensor tips, and the different wavelength of emitting lights from them are measured to determine the optimal inorganic scintillator which has maximum light output. As a radiation source X-ray generator and Ir-192 are selected to test a performance of sensor tip. It is expected that the fiber-optic radiation sensor is widely used in nuclear industry and medical applications due to its special characteristics such as good flexibility, easy in processing, long lengths and no interference to electro magnetic field.

• 반도체디스플레이기술학회지
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• 제11권4호
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• pp.19-23
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• 2012

We report microbolometer characteristic with n-type and p-type amorphous silicon thin film. The n-type and p-type amorphous silicon thin films were made by PECVD. The electrical properties of n-type and p-type a-Si:H thin films were investigated as a function of doping gas flow rate. The doping gas used $B_2H_6/Ar$ (1:9) and $PH_3/Ar$ (1:9). In general, the conductivity of doping a-Si:H thin films increased as doping gas increase but the conductivity of a-Si:H thin films decreased as the doping gas increase because doping gas concentration increase led to dilution gas (Ar) increase as the same time. We fabricated an amorphous silicon microbolometer using surface micromachining technology. The fabricated microbolometer had a negative TCR of 2.3%. The p-type microbolometer had responsivity of $5{\times}10^4V/W$ and high detectivity of $3{\times}10^8cm(Hz)^{1/2}/W$. The p-type microbolometer had more detectivity than n-type for less noise value.

• 천문학회보
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• 제38권1호
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• pp.73.2-73.2
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• 2013

An autoguiding system for astronomical observations should be accurate and stable for efficient data taking. IGRINS (Immersion Grating Infrared Spectrograph) is a high resolution near-IR spectrograph which is now developed by Korea Astronomy and Space Science Institute and the University of Texas. We plan to attach this instrument on the 2.7m telescope at the McDonald observatory in 2013. IGRINS consists on three detector modules, i. e., H and K band spectrograph modules and a K band slit camera module. We use the slit camera for autoguiding of the telescope. In this poster, we describe the system architecture of the hardware and software of the autoguiding system, and the algorithm which would effectively find centers of stellar images on or outside of the slit of the infrared array.

• 한국광학회지
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• 제18권2호
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• pp.135-141
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• 2007

완전한 2차원 배열을 갖는 중적외선 대역의 $320\times240$ 검출기를 사용하는 3세대 열상 장비의 설계 및 제작은 이차원 배열 검출기 제작 기술의 발달과 영상 신호처리 기술의 진전으로 인해 최근 더욱 더 활발히 이루어지고 있다. 본 논문은 다양한 응용 분야에서 적외선 센서로 사용될 수 있도록 하기 위하여 소형 경량화 제작을 목표로 한 3세대 열상장비의 이중 배율 적외선 카메라의 설계와 Defocus용 셔터 렌즈에 의한 영상기반 불균일 보정 방식에 대해 다룬다.

• 한국가스학회지
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• 제7권1호
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• pp.47-52
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• 2003

본 연구에서는 부취물질인 tert-butyl mercaptan을 효율적으로 제거하기 위해 활성탄에 염화구리나 요오드화칼륨이 첨착된 첨착활성탄과 비첨착 활성탄의 흡착능을 비교 고찰하였다. 염화구리나 요오드화칼륨이 첨착된 활성탄이 비침착활성탄에 비해 흡착능이 월등히 우수하였다. 또한 첨착률에 따른 흡착능을 조사하였으며 첨착률이 일정량이상 증가하면 흡착성능이 감소하였다. 첨착 후 탈착되는 물질을 적외선 분광 분석기를 사용하여, 분석한 결과 tert-butyl mercaptan이 부취능이 1/1000이하인 tert-butyl dimethyl sulfide로 전환되었으며 질소분위기하에서의 반응실험을 통해 반응 메카니즘을 규명 하고자 하였다.

• 한국통신학회논문지
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• 제24권8B호
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• pp.1593-1600
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• 1999

본 논문은 적외선 유도 무기의 표적 추적 시뮬레이션을 위한 공중 표적 추적 모델링에 대한 연구이다. 표적의 적외선 특성, 대기 투과 특성, 및 검출기 특성에 대한 모델링이 핵심 기술을 이루는 이 모델링은 시선, 거리, 및 대기 상태에 따른 다양한 추적 조건에서 공중 표적을 포착하는 과정을 보여준다. 계산된 결과를 측정값과 비교하거나 제안된 모델링을 적외선 표적 추적에 관련된 여러 시뮬레이션들에 적용하여 그 효용성을 확인하였다. 또한, 제안된 모델링은 유사 표적으로부터 표적만을 효과적으로 찾아내기 위한 최적 검출기 및 검출 대역 설정을 위한 이정표로 활용될 수 있다.

• Journal of Communications and Networks
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• 제14권5호
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• pp.501-509
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• 2012

This paper proposes a joint timing synchronization, channel estimation, and data detection for the impulse radio ultra-wideband systems. The proposed timing synchronizer consists of coarse and fine timing estimation. The synchronizer discovers synchronization points in two stages and performs adaptive threshold based on the maximum pulse averaging and maximum (MAX-PA) method for more precise synchronization. Then, iterative channel estimation is performed based on the discovered synchronization points, and data are detected using the selective rake (S-RAKE) detector employing maximal ratio combining. The proposed synchronizer produces two signals-the start signal for channel estimation and the start signal for start frame delimiter (SFD) detection that detects the packet synchronization signal. With the proposed synchronization, channel estimation, and SFD detection, an S-RAKE receiver with binary pulse position modulation binary phase-shift keying modulation was constructed. In addition, an IEEE 802.15.4a channel model was used for performance comparison. The comparison results show that the constructed receiver yields high performance close to perfect synchronization.