• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2001.11a
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• pp.165-170
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• 2001

AIC$_3$:$^{t}$ BuNH$_2$단일 전구체를 이용하여 MOCVD방법에 의해 상압하에서 1$\mu\textrm{m}$의 두께로 증착하였다. 증착된 AIN 박막을 XRD, SEM, RBS 그리고 AES로 분석했으며 IDT전극을 형성하기 위해 1500＋ 의 두께로 증착했다. 중심주파수 1.5GHz를 갖고 입출력 개수가 각각 500개이며 IDT선폭이 l$\mu\textrm{m}$인 전송형의 SAW filter를 제작하고자 하였다.

• Proceedings of the Korean Institute of Communication Sciences Conference
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• 1983.10a
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• pp.35-38
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• 1983

It is described a novel SAW oscillator which can be varriable its frequenis by using two output IDT. The results show that frequencies staility is good and variable frequencies range can be broaden by design of IDT.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.30A no.11
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• pp.88-98
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• 1993

In this paper, the effective permittivity in the piezoelectric material is numerically obtained and greens function is derived from that. It is shown that the admittance and the transfer function of an interdigital transducer is represented by electrostatic charge distribution using Quasi-static approximation. To prove the validity of the quasi-static approximation, numerical results for the uniform IDT of a filter mounted on 128 $^{\circ}$ rotated Y-cut X-propagating Lithium Niobate are compared with the measured ones.

• Knowledge Management Research
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• v.16 no.4
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• pp.191-213
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• 2015

With the advancement of virtual reality technology, virtual reality contents and devices are being competitively released. This research deals with an early stage adoption model of a motion-sensing input device which enhances the user experience of these virtual reality contents and devices. In contrast to the previous research on the adoption or resistance of innovative products, this work compares and analyzes the antecedents in MIR(Model of Innovation Resistance) of resistance-perspective as well as those in UTAUT2(Extended Unified Theory of Acceptance and Use of Technology) and IDT(Innovation Diffusion Theory) of adoption-perspective, and suggests a resistance-incorporated adoption model from a new viewpoint. The analysis of questionnaire data indicates the following results: Performance expectancy, effort expectancy, price value, hedonic motivation in UTAUT2 and visibility in IDT have a significant negative influence on innovation resistance. Compatibility in IDT and MIR exerts a positive influence on perceived value. Social influence and hedonic motivation in UTAUT2 positively relates to perceived value. Higher innovation resistance results in lower perceived value, with innovation resistance and perceived value negatively and positively affecting intention to use, respectively.

• Journal of the Korean Ceramic Society
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• v.40 no.6
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• pp.547-552
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• 2003

ZnO thin films on glass substrate were deposited by RF magnetron reactive sputtering at 100 W, 1.33 Pa, Ar/O2=50 : 50, 200$^{\circ}C$, and a target/substrate distance of 4 cm. Crystallinities, surface morphologies, chemical compositions, and electrical properties of the films were investigated by XRD, SEM, AFM, RBS, and electrometer. All films showed a strong preferred c-axis orientation and the chemical stoichiometry. The propagation velocity of ZnO/IDT/glass of single electrode and double electrode types SAW filter was about 2,589 m/sec, 2,533 m/sec and insertion loss was a minimum value of about -11 dB and -21 dB, respectively.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.11 no.10
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• pp.1916-1923
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• 2007

We have studied to obtain the SAW filter for the passband was formed on the Langasite substrate and was evaporated by Aluminum-Copper alloy and thin we performed computer-simulated by simulator. We cm fabricate that the block weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulation. Also, we have performed to obtain the properly design conditions about phase shift of the SAW filter for WCDMA. We have employed that the number of pairs of the input and output IDT are 50 pairs and the thickness and the width of reflector are $5000\;{\AA}$ and $3.6{\mu}m$ respectively. And we have employed that the distances from the hot electrode to the reflector are $2.0{\mu}m$, $2.4{\mu}m$ and the distance from the hot electrode to the ground is $1.5{\mu}m$ respectively. Frequency response of the fabricated SAW filter has the property that the center frequency is about 190MHz and bandwidth at the 3dB is probably 7,8MHz. And we could obtain that return loss is less then -18dB, ripple characteristics is probably 3dB and triple transit echo is less then -25dB after when we have matched impedance.

• Proceedings of the Acoustical Society of Korea Conference
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• 1985.10a
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• pp.43-46
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• 1985

In this paper, the SAW Comb filter which consists of 1 apodized IDT, 2 uniform IDTs, and the grating reflector is studied. The apodized IDT is designed by utilizing the Chebyshev window function, and the output IDTs are arrayed with 0.5$\mu$sec time delay to obtain the Comb characteristics. And also the frequency response below the first peak is sufficiently suppressed by the grating reflector which is constituted 180 electrodes. In experiment the SAW Comb filter is fablicated by depositing Al on the surface of YZ-LiNbO3 substrate. As the experimental result, the frequency characteristics of the SAW Comb filter are consistent with theoretical values in admitted errors.

• Smart Structures and Systems
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• v.4 no.3
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• pp.291-304
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• 2008

Piezoelectric materials have been widely used in ultrasonic nondestructive testing (NDT). PZT ceramics can be used to receive and generate surface acoustic waves. It is a common application to attach PZT transducers to the surface of structures for detecting cracks in nondestructive testing. However, not until recently have piezoelectric polymers attracted more and more attention to be the material for interdigitated (IDT) surface and guided-wave transducers. In this paper, an interdigitated gold-on-polyvinylidene fluoride (PVDF) transducer for actuating and sensing Lamb waves has been introduced. A specific etching technology is employed for making the surface electrodes into a certain finger pattern, the spacings of which yield different single mode responses of Lamb waves. Experiments have been performed on steel and carbon fiber composite plates. Results from PVDF IDT sensors have been compared with those from PZT transducers for verification.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.852-855
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• 2008

In this paper, we proposed a new type's PZT actuator using surface acoustic wave. This actuator uses Rayleigh wave as an operational traveling wave. For the development of the actuator, each components of surface acoustic wave motor like PZT substrate, slider and IDT was studied theoretically and fabricated. For the measurement of transfer function of PZT substrate and operation of surface acoustic wave motor, network analyzer and 13.56MHz RF generator were used. Also the model which expresses the driving characteristic best was suggested and simulation was executed for the suggested model. And the future research works for improvement of SAW actuator was suggested.

• Proceedings of the IEEK Conference
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• 2001.06a
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• pp.241-244
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• 2001

The design and fabrication of the surface acoustic wave(SAW) bandpass filters using slanted finger interdigital electrode transducers(IDTs) is investigated. The slanted finger IDTs are used to design SAW filters with good shape factor, a flat passband, and good out-of-band rejection characteristic. The slanted finger IDTS filter was simulated of three kind of IDTs structure. uniform-uniform IDT, uniform-withdrawal weighting IDTS, withdrawal weighting-withdrawal weighting IDTS. Uniform-withdrawal weighting IDTs structure SAW filters was designed and fabricated on 112$^{\circ}$ LiTaO$_3$, 128$^{\circ}$LiNbO$_3$ substrates. Designed SAW filter has about a 30% fractional bandwidth and a 70MHz center frequency.