• Proceedings of the Korea Electromagnetic Engineering Society Conference
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• 2003.11a
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• pp.140-144
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• 2003

To investigate failure analysis of surface acoustic wave (SAW) filter for radio frequency, high temperature storage test was carried out. The failure criteria were insertion loss at passband and rejection level at stopband. As a result, the insertion loss at passband increase about 4 dB was due to damages of interdigital transducer (IDT). That is caused by poor adhesion between metal electrode(AI) and piezoelectric substrate and defects on a manufacturing process. This result indicates that good adhesion between electrode and ceramic substrate is important factor And also we investigated the demage factors of electrode. Screen possible of saw filter using high temperature storage test(HTOL) in the manufacturing phase be presented.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.7 no.8
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• pp.1767-1775
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• 2003

The SAW device is extensively used as a electro$.$mechanical band­pass filter in which a two­pairs of interdigital transducers are provided over the surface of the piezoelectric substrate. For the design requirement, the central frequency and the bandwidth of the passband, and the attenuation level of the stopband region are specified. The configuration is made so as to satisfy the specification given. The central frequency is mainly determined by the distance between the pair of the finger electrodes. The design is considered as an optimization problem with which the error norm, the distance between the desired characteristics and the calculated for a given model is to be minimized. The delta function model and the electrical equivalent circuit model are utilized to represent the SAW filter characteristics. Genetic algorithm is used for optimization in which apodization of the transducer fingers is chosen as a design variable.

• Journal of the Korean Society for Nondestructive Testing
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• v.14 no.4
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• pp.237-243
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• 1995

We have studied methods of detecting attenuation of solid materials such as silicon wafer and piezoelectric $LiTaO_3$ by means of optical probing techniques. We have performed measurements of surface acoustic waves(SAW) generated from 90 degree wedge type transducer and also from inter-digital transducers(IDT). SAW of 20.0 MHz was generated on a silicon wafer from the 90 degree wedge type transducer and those of 20.8 and 14.5 MHz are generated on a $LiTaO_3$ from the IDT. Then any surface-corrugation resulted from the above SAW was investigated by He-Ne laser beams. We projected laser beams, which were modulated by an optical chopper, on the SAW of the same frequency and then measured the scattered beam by the lock-in amplifier. We modulated and synchronized both SAW and the incident laser beam as well as the phase sensitive detector(PSD) to the same frequency in order to simplify our measurement system. We obtained the attenuation coefficients of SAW to be $0.62{\sim}0.75dB/mm$(from IDT1, 20.8 MHz), and $0.60{\sim}0.72dB/mm$(from IDT2, 14.5 MHz), $0.83{\sim}1.28dB/mm$(from the wedge type), respectively.

• The Journal of the Acoustical Society of Korea
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• v.19 no.2
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• pp.33-39
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• 2000

We have studied to obtain the frequency characteristics of the Surface Acoustic Wave(SAW) bandpass filter, having low shape factor, it's interdigital transducer(IDT) was formed on the 35° Y-cut X-propagation Quartz substrate and was evaporated by Aluminium. And then, we performed computer-simulation by a simulator. And, we can design that the apodization weighted type IDT as an input transducer of the filter and the withdrawal weighted type IDT as an output transducer of the filter from the results of our computer-simulation. Also, we have employed that the number of pairs of the input and output IDT are 2200 pairs and 1000pairs, respectively and used the Kaiser-Bessel window function in order to minimize the effect of ripple. And, while the width and the space of IDT's finger are 6㎛ m and 5.75㎛, respectively and we could obtain the resonable results when the IDT thickness was 6000Å in consideration of the ratio of SAW's wavelength, and IDT aperture is 2mm. Frequency response of the fabricated SAW bandpass filter has the property that the center frequency is about 70MHz, shape factor is less than 1.3, bandwidth at the 1.5dB is probably 1.3MHz, out-band attenuation is almost -45dB, insertion loss is 19dB and ripple in the width of bandpass is 1dB approximately. Therefore, these frequency characteristics of the fabricated SAW bandpass filter are agreed well with the designed values.

• The Journal of the Acoustical Society of Korea
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• v.18 no.1
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• pp.10-15
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• 1999

We have studied a method to design and fabricate the Intermediate Frequency(IF) band pass filter with low shape factor which is used for CDMA base station on the 35°Y-cut X-propagation Quartz substrate. In order to fabricate a device of the low shape factor for the IF SAW filter on this substrate, we employed apodization weighted type interdigital transducer(IDT) as an input and withdrawal weighted type IDT as an output by using impulse modelling method. Also, using the Kaiser-Bessel window function, we have adopted 2200pairs and 1000pairs of input and oueut IDT respectively to minimize the effect of ripple. Furthermore, the width and the space of IDT finger are 3.6 ㎛ and 3.5 ㎛ respectively. Thus, we can have optimal results when the IDT thickness is 6000Å in consideration of the ratio of SAW's wavelength while it's aperture is 2mm for impedance matching. The fabricated SAW filter for CDMA had the property of almost 115.2MHz of a center frequency, less then 1.27MHz of bandwidth, less than 1.3 of shape factor, - l5dB of out band attenuation insertion loss and -45dB of rejection band.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.04b
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• pp.13-16
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• 2009

In this study, AlN thin films were deposited on a polycrystalline (poly) 3C-SiC buffer layer for surface acoustic wave (SAW) applications using a pulsed reactive magnetron sputtering system. AFM, XRD and FT-IR were used to analyze structural properties and preferred orientation of the AlN/3C-SiC thin film. Suitability of the film in SAW applications was investigated by comparing the SAW characteristics of an interdigital transducer (IDT)/AlN/3C-SiC structure with the IDT/AIN/Si structure at 160 MHz in the temperature range $30-150^{\circ}C$. These experimental results showed that AlN films on the poly 3C-SiC layer were highly (002) oriented. Furthermore, the film showed improved temperature stability for the SAW device, $TCF\;=\;-18\;ppm//^{\circ}C$. The change in resonance frequency according to temperature was nearly linear. The insertion loss decrease was about $0.033dB/^{\circ}C$. However, some defects existed in the film, which caused a slight reduction in SAW velocity.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.563-567
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• 2004

In this paper, a remote temperature sensor based on surface acoustic wave is introduced and the issues on design, manufacturing, and test of the sensor are addressed. SAW sensors having single and double electrode are prepared on the 128$^{\circ}$ YX-LiNbO$_3$ Substrate. The frequency responses of SAW sensors on the temperature change are compared. To measure the change of center frequency, two center frequencies on the 3dB and 20dB are measured and compared. Since the center frequency on the temperature change from -30$^{\circ}C$ to 80$^{\circ}C$ is linearly changed, the SAW sensor is applicable to the temperature sensor.

• Journal of the Korean Society for Nondestructive Testing
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• v.10 no.2
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• pp.56-62
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• 1990

Surface Acoustic Waves(SAW) are generated on silicon wafer and $YZ-LiTaO_3$ substrate and are detected by noncontact method. As wave sources two kinds of transducers are used : the wedge-type of 20.0 MHz and fabricated Interdigital Transducer(IDT) of 20.8 MHz. SAW are modulated by the optical chopper frequency and are syncronized with a laser beam. In signal processing, intensity variations of light due to the intensity of SAW are analyzed using lock- in amplifier. From the results, corresponding to the applied input power, the intensity variations of a deflected light by corrugations on the substrates are increased and saturation phenomenon is observed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.11
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• pp.947-952
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• 2001

In this paper, a wideband SAW convolver using a parabolic horn waveguide was designed and its characteristics were investigated. The convolver was made with parabolic horn waveguide at compression ratio 9:1 for reducing propagation loss and for improving convolution efficiency between two input IDTs of center frequency 193.78 ㎒. The SAW convolver utilizing acoustic nonlinearities of piezoelectric material demonstrated that it can provide large S/N ratio and can be use for programmable matched filter(PMF) in spread spectrum communication system.

• Journal of the Microelectronics and Packaging Society
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• v.16 no.1
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• pp.13-19
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• 2009

A 440MHz wireless and passive surface acoustic wave (SAW) based chemical sensor was developed on a $41^{\circ}YX\;LiNbO_3$ piezoelectric substrate for simultaneous measurement of $CO_2$ gas and relative humidity (RH) using a reflective delay line pattern as the sensor element. The reflective delay line is composed of an interdigital transducer (IDT) and several shorted grating reflectors. A Teflon AF 2400 and a hydrophilic $SiO_2$ layer were used as $CO_2$ and water vapor sensitive films. The coupling of mode (COM) modeling was conducted to determine optimal device parameters prior to fabrication. According to simulation results, the device was fabricated and then wirelessly measured using the network analyzer. The measured reflective coefficient $S_{11}$ in the time domain showed high signal/noise (S/N) ratio, small signal attenuation, and few spurious peaks. In the $CO_2$ and humidity testing, high sensitivity ($2^{\circ}/ppm$ for $CO_2$ detection and $7.45^{\circ}/%$RH for humidity sensing), good linearity and repeatability were observed in the $CO_2$ concentration ranges of $75{\sim}375ppm$ and humidity levels of $20{\sim}80%$RH. Temperature and humidity compensations were also investigated during the sensitivity evaluation process.