A Study on the Detection of Surface Acoustic Waves by Noncontact Method

비접촉 방법에 의한 표면탄성파의 검출

  • 유일현 (인하대학교 응용물리학과) ;
  • 윤정심 (인하대학교 응용물리학과) ;
  • 김동일 (인하대학교 응용물리학과)
  • Published : 1990.11.30

Abstract

Surface Acoustic Waves(SAW) are generated on silicon wafer and $YZ-LiTaO_3$ substrate and are detected by noncontact method. As wave sources two kinds of transducers are used : the wedge-type of 20.0 MHz and fabricated Interdigital Transducer(IDT) of 20.8 MHz. SAW are modulated by the optical chopper frequency and are syncronized with a laser beam. In signal processing, intensity variations of light due to the intensity of SAW are analyzed using lock- in amplifier. From the results, corresponding to the applied input power, the intensity variations of a deflected light by corrugations on the substrates are increased and saturation phenomenon is observed.

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