• 분석과학
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• 제26권6호
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• pp.375-380
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• 2013

본 연구에서는 암석과 퇴적물 시료를 대상으로 이플루오린화 암모늄을 이용한 시료 분해법을 적용하여 open vessel digestion 후 유도결합 플라즈마 질량분석법(Inductively coupled plasma mass spectrometry, ICP/MS)으로 게르마늄을 분석하였다. 미국 지질조사소 표준물질 중 QLO-1, SDO-1을 사용하였고, 실제 시료로 GeoPT용 퇴적물, 현무암, 점토를 사용하였다. 휘발하여 손실되기 쉬운 것으로 알려진 게르마늄을 이플루오린화 암모늄($NH_4HF_2$) 시료 분해법을 사용함으로서 게르마늄 휘발 억제와 동시에 암석 및 퇴적물을 open vessel digestion하에서 간단하고 빠르게 분해 가능하였으며, 또한 이플루오린화 암모늄 분해법에 과산화수소를 함께 사용해도 게르마늄의 회수율에 영향을 끼치지 않았다. ICP/MS에 의한 게르마늄 분석 결과, MDL (method detection limit)은 0.015 ${\mu}g/g$, 게르마늄 회수율은 106~128% 이었다.

• 한국재료학회지
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• 제13권4호
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• pp.266-270
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• 2003

We studied BCl$_3$ dry etching of GaAs in a planar inductively coupled plasma system. The investigated process parameters were planar ICP source power, chamber pressure, RIE chuck power and gas flow rate. The ICP source power was varied from 0 to 500 W. Chamber pressure, RIE chuck power and gas flow rate were controlled from 5 to 15 mTorr, 0 to 150 W and 10 to 40 sccm, respectively. We found that a process condition at 20 sccm $BCl_3$ 300 W ICP, 100 W RIE and 7.5 mTorr chamber pressure gave an excellent etch result. The etched GaAs feature depicted extremely smooth surface (RMS roughness < 1 nm), vertical sidewall, relatively fast etch rate (> $3000\AA$/min) and good selectivity to a photoresist (> 3 : 1). XPS study indicated a very clean surface of the material after dry etching of GaAs. We also noticed that our planar ICP source was successfully ignited both with and without RIE chuck power, which was generally not the case with a typical cylindrical ICP source, where assistance of RIE chuck power was required for turning on a plasma and maintaining it. It demonstrated that the planar ICP source could be a very versatile tool for advanced dry etching of damage-sensitive compound semiconductors.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 유기절연재료 방전 플라즈마연구회
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• pp.77-80
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• 2003

MEMS(Micro Electro Mechanical System) 기술에서 실리콘 식각기술의 중요성으로 플라즈마 식각기술의 개발이 꾸준히 진행되고 있다. 이중에서 ICP(Inductive Coupled Plasma)는 기존의 증착장치에 유도결합식 플라즈마를 추가로 발생시켜 증착막의 특성을 획기적으로 개선시키는 가장 최근에 개발된 기술이며, 이용에너지를 증가시키지 않고도 이용밀도를 높이고 이용업자들에 방향성을 가할 수 있는 새로운 플라즈마 기술로, 주로 MEMS 제조공정에 응용되고 있다. 본 연구에서는 STS-ICP $ASE^{HR}$을 이용하여 식각과 증착공정을 반복하여 식각을 하는 Bosch 식각에 관하여 연구하였다 STS-ICP $ASE^{HR}$ 장비의 Platen power, Coil power 및 Process pressure에 다양한 변화를 주어 각 변수에 따른 식각속도를 관찰하였다. 각 공정별 변수를 변화시킨 결과 Platen power 12W, Coil power 500W, 식각/Passivation Cycle 6/7sec 일 경우 식각속도는 $1.2{\mu}m$/min 이었고, Sidewall profile은 $90{\pm}0.7^{\circ}$로 나타나 매우 우수한 결과를 보였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2017년도 춘계학술대회 논문집
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• pp.103.1-103.1
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• 2017

Nanocrystalline HfN coatings were prepared by reactively sputtering Hf metal target with N2 gas using a magnetron sputtering system operated in DC and ICP (inductively coupled plasma) condition with various powers. The effects of ICP power, ranging from 0 to 200 W, on the coating microstructure, corrosion and mechanical properties were systematically investigated with FE-SEM, AFM, potentiostat and nanoindentation. The results show that ICP power has a significant influence on coating microstructure and mechanical properties of HfN coatings. With the increasing of ICP power, coating microstructure evolves from the columnar structure of DC process to a highly dense one. Average grain size and nano hardness of HfN coatings were also investigated with increasing ICP powers.

• 한국표면공학회지
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• 제45권4호
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• pp.168-173
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• 2012

A real-time monitoring of an immersed antenna type inductively coupled plasma (ICP) was done with optical emission spectroscopy (OES) to check the reports that sputtered atom density is decreasing as the ICP power is increased. At 10 mTorr pressure of Ar, Mg was sputtered by a bipolar pulsed power supply into 2 MHz ICP which has an insulator covered 2.5 turn antenna. Emitted light was collected in two different positions: above the target and inside the ICP region. With 100 W of Mg sputtering power, the intensities of Mg I (285.06 nm), Mg II (279.48 nm), Ar I (420.1 nm) were increased constantly with ICP power from 100 W to 600 W. At 500 W, the intensity of $Mg^+$ exceeded that of Mg under PID controlled discharge voltage of 180 V. The ratio of Mg II/Mg I was increased from 0.45 to 2.71 approximately 6 times.

• 한국측량학회지
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• 제33권5호
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• pp.443-451
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• 2015

사진측량기법으로 외부표정요소 결정과 지형의 DEM 제작을 위해선 전통적으로 지상기준점을 이용하였다. 그러나 접근이 곤란한 지역은 측량이 어렵기 때문에 기 확보된 DEM을 기준점 대용으로 활용할 수 있다. 이를 위해선 DEM 매칭을 수행해야만 한다. 본 연구에서는 DEM 매칭의 정확도 향상을 위해 ICP와 RT 매칭을 혼용하는 방법을 제안하였다. 그리고 제안방법의 성능평가를 위해 ICP 방법과 비교하였다. 실험을 위해 기준 DEM과 기준 DEM을 변형시킨 DEM(높이 값에 난수 0부터 2까지, 축척은 0.9, 이동은 3축 모두 100m, 회전은 3축 모두 10°부터 50° 까지 변형)을 이용하였다. 그 결과, 제안방법의 매칭과 절대표정 정확도가 가장 우수하였다. ICP의 경우, 변형 DEM의 회전각이 증가함에 따라 절대표정 오차가 증가한 반면 제안방법은 대체적으로 그 오차가 증가하지 않고 일정한 결과를 보였다. 실험결과를 토대로 변형 DEM이 기준 DEM에 비해 30° 까지 회전되었을 때는 제안방법이 적용 가능할 것으로 판단한다. 또한 이 방법은 무인항공기로부터 접근 불가능 지역의 기 확보 DEM에 의한 외부표정요소 결정 또는 3차원 표면변화를 파악할 때 활용 가능할 것이다.

• 대한환경공학회지
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• 제28권10호
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• pp.1038-1045
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• 2006

본 연구는 INAA와 ICP-MS의 두 가지 분석방법을 NIST SRM 2783과 실제의 대기입자 시료에 동시에 적용하고 그 결과를 비교하고자 하였다. NIST SRM 2783을 INAA와 ICP-MS로 분석하여 비교한 결과, INAA의 분석결과가 ICP-MS보다 정확하고 정밀한 것으로 나타났다. 또한, 공단지역에서 채취한 PM10 시료를 대상으로 역시 두 방법으로 분석하여 비교한 결과, 농도비의 평균이 Ba, Cu, K, Mg, Na, Sb는 $0.9{\sim}1.1$, Al, Co, Fe, Mn는 $0.8{\sim}1.2$, Se, Ti, Zn는 1.3 이상으로 나타났다. PM10 시료의 분석 대상 원소가 매우 넓은 농도범위를 보임에도 불구하고 회귀분석 및 paired t-test와 Wilcoxon signed-rank test 결과, 13종의 미량원소 중 Al, Ba, Co, Cu, Fe, K, Mn, Na, Sb는 두 방법 간의 분석결과가 잘 일치하는 것으로 나타났다.

• 한국환경보건학회지
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• 제47권1호
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• pp.64-77
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• 2021

Objective: Biological monitoring of trace elements in human blood samples has become an important indicator of the health environment. The purpose of this study was to detect and evaluate multiple metal items in blood samples based on ICP-MS, to perform comparative evaluation with the existing analysis method, and to develop and verify a new method. Methods: 100 μL of whole blood from 80 healthy subjects was used to analyze ten metals (Sb, tAs, Cd, Pb, Mn, Hg, Mo, Ni, Se, Tl) using ICP-MS. Verification of the analysis method included calculation of linearity, accuracy, precision and detection limits. In addition, a comparative test with the conventional graphite furnace atomic absorption spectroscopy (GF-AAS) method was performed. In the case of Pb, Cd, and Hg in whole blood, cross-analysis between Pb, Cd, and Hg analysis methods was performed to confirm the difference between the existing method and the new method (ICP-MS). Results: The coefficient of determination (R2) was 0.999 or higher in seven items and 0.995 or higher in three items. The Pb result showed that Pearson's correlation coefficient was very high at 0.983, and the intraclass correlation coefficient was 0.966. The Cd result showed that Pearson's correlation coefficient was 0.917 between the existing method and the new analysis concentration value. Its intraclass correlation coefficient was 0.960, and there was no significant difference between the two groups. Hg had a low correlation at 0.687, and the intraclass correlation coefficient was 0.761, which was lower than that of Pb and Cd. The intra-day and inter-day accuracy of Pd and Cd were satisfactory, but Hg did not meet the criteria for both accuracy and precision when compared with the conventional analysis method. Conclusion: This study can be meaningful in that it proposes a more efficient and feasible analysis method by verifying a blood heavy metal concentration experiment using multiple simultaneous analyses. All samples were processed and analyzed using the new ICP-MS. It was confirmed that the agreement between the two methods was very high, with the agreement between the current and new methods being 0.769 to 0.998. This study proposes an efficient simultaneous methodology capable of analyzing multiple elements with small samples. In the future, studies of various applications and the reliability of ICP-MS analysis methods are required, and research on the verification of accurate, precise, and continuous analysis methods is required.

• Korean Chemical Engineering Research
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• 제43권1호
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• pp.71-75
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• 2005

초거대 자기 저항 물질인 $La_{0.5}Ca_{0.5}MnO_3$의 분말과 pellet을 졸-겔 법으로 제조하였다. 열처리 온도를 변화시켜 얻은 시료에 대해 FT-IR과 CP/MAS $^{13}C$ solid state NMR spectroscopy 그리고 XRD 등을 이용해 구조변화를 관찰하였다. 양이온 조성 비율을 알아보기 위해 ICP-AES를 이용하였으며, 입자크기와 균일도를 FE-SEM/EDS로, 미세구조와 격자 패턴은 TEM으로 관찰하였다. VSM을 이용하여 자기적 특성을 살펴보았으며 큐리온도($T_c$)는 236 K에서 측정되었다.

• Asian Pacific Journal of Cancer Prevention
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• 제17권10호
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• pp.4761-4767
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• 2016

Objective: The use of Shamma (smokeless tobacco) by certain groups is giving rise to health problems, including cancer, in parts of Saudi Arabia. Our objective was to determine metals levels in Shamma using inductively coupled plasma mass spectrometry (ICP-MS). Methods: Thirty-three samples of Shamma (smokeless tobacco) were collected, comprising four types: brown Shamma (n = 14.0), red Shamma (n = 9.0), white Shamma (n = 4.0), and yellow Shamma (n = 6.0). All samples were collected randomly from Shamma users in the city of Najran. Levels of 11 elements (Al, As, Cd, Co, Cr, Cu, Li, Mn, Ni, Pb, and Zn) were determined by ICP-MS. Results: A mixed standard (20 ppb) of all elements was used for quality control, and average recoveries ranged from 74.7% to 112.2%. The highest average concentrations were found in the following order: Al ($598.8-812.2{\mu}g/g$), Mn ($51.0-80.6{\mu}g/g$), and Ni ($23.2-53.3{\mu}g/g$) in all four Shamma types. The lowest concentrations were for As ($0.7-1.0{\mu}g/g$) and Cd ($0.0-0.06{\mu}g/g$). Conclusions: The colour of each Shamma type reflects additives mixed into the tobacco. Cr and Cu were showed significant differences (P < 0.05) among Shamma types. Moreover, Pb levels are higher in red and yellow Shamma, which could be due to use (PbCrO4) as yellow colouring agent and lead tetroxide, Pb3O4 as a red colouring agent. The findings from this study can be used to raise public awareness about the safety and health effects of Shamma, which is clearly a source of oral exposure to metals.