• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.30 no.9 s.252
• /
• pp.1094-1101
• /
• 2006

Recently, a ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator and ultra-precision linear encoder, is designed and developed. The system transfer function of the ultra-precision stage system was derived from the step responses of the system using system identification tool. A $H_{\infty}$ controller was designed using loop shaping method to have robustness for the system uncertainty and external disturbances. For the designed controller, simulations were performed and it was applied to the ultra-precision stage system. From the experimental results it was found that this stage could be controlled with less than 5nm resolution irrespective of hysteresis and creep.

• Proceedings of the KIEE Conference
• /
• 2003.11c
• /
• pp.629-632
• /
• 2003

Piezo actuators are mainly used in precision position control system because of their high position resolution. Although there have been many approaches in open loop control of this, those method turn out to be not effective in precision control due to hysteresis and creep. To overcome the problems, closed loop PI control method is used in commercial products. However, it is very difficult to obtain fast response with conventional PI control although piezo actuator has fast response. In this paper, we propose a fuzzy PI control method with the proposed fuzzy PI controller, we obtains faster settling response over the conventional PI controller. We verify the effectiveness of the proposed method with experimental results.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.8 no.4
• /
• pp.87-96
• /
• 2004

As a special concrete, which is a mixture of soil, cement and water, has strength like regular concrete for pavement, soil cement has been used in various field such as pavement and soft soil improvement. The objective of this study was to investigate the characteristic of unconfined compressive strength and time dependent behavior of soil cement that is made from decomposed granite soil or coluvial and inorganic solidification liquid. The results showed that the unconfined compressive strength appears to increase as the amount of cement and curing time increase In addition, the strength seems to decrease with increase of the potion of fine particles(No 200 sieve). The result of XRD indicated that there is Vermiculite, the product of reaction, in the soil cement. The dynamic properties of material, such as shear complex compliance, shear complex modulus, and phase angle could be calculated from the hysteresis loop obtained from the Haversine Creep Tests. Finally, creep behavior was able to be predicted from these dynamic properties.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.24 no.8 s.179
• /
• pp.1991-1999
• /
• 2000

This research has been performed to reveal the hysteresis phenomena of the hunting motion in a railway passenger car having a bolster. Since linear analysis can not explain them, bifurcation analysis is used to predict its outbreak velocities in this paper. However bifurcation analysis is attended with huge computing time, thus this research proposes more effective numerical algorithm to reduce it than previous researches. Stability of periodic solution is obtained by adapting of Floquet theory while stability of equilibrium solutions is obtained by eigen-value analysis. As a result, linear and nonlinear critical speed are acquired. Full scale roller rig test is carried out for the validation of the numerical result. Finally, it is certified that there are many similarities between numerical and test results.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.9 no.2
• /
• pp.50-60
• /
• 1989

The control of resistance of foil strain gauge is accomplished by means of etching technique. Thus, there is an irregularity in metal foil. In order to solve this problem, ion sputter machining method has been used to make strain gauge in this study and the characteristics of this strain gauge are investigated. As the result of this study, it was possible to make a flexible strain gauge which can be used to measure the stress. The strain gauge made by authors shows superior characteristics in creep, O point variance, hysteresis and nonlinearity by surrounding temperature.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.15 no.3
• /
• pp.111-119
• /
• 2006

The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 nm resolution irrespective of hysteresis and creep by the controller.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.18 no.2
• /
• pp.228-233
• /
• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

• Journal of the Korean Society for Precision Engineering
• /
• v.13 no.8
• /
• pp.31-39
• /
• 1996

In this paper, the error and its sources in manufacturing of bourdon tube pressure gage was studied, and the method to reduce such errors was discussed. In more detail, the effects of parallelism of rollers, spring back, uniformity of radius curvature and the ratio of circumferential speeds of rollers were invesrti- gated. As a reselt, we could find out that the aprallelism of roller affected to the displacement error at the free end of gage and that the amount of spring back was closely related with the ratio of circumferential speeds of rollers. The uniformity of curvature radius was determined by the distance between bending rollers and it was comparatively uniform in the range above 30 .deg. C from the both sides of tube. Also, the ratio of circumfer-ential speeds of rollers was finded out as a very important factor giving severe influence on the creep or the hysteresis of bourdon tube.

• Journal of the Korean Society for Precision Engineering
• /
• v.10 no.2
• /
• pp.86-94
• /
• 1993

In heavy industries forces which are exceeding the range of available force standard machines have to be measured. Force measuring system using build-up procedure can be applied to measure large forces efficiently. In this study strain gage type force sensors are designed and fabricated, and the build-up force measuring system with 4.5 MN capacity using the developed force sensors is 0.03% or less over the range of 600 kN .approx. 1.5 MN and the force measuring system is less than 0.06% or less over the range of 500 kN .approx. 4.5 MN.

• JSTS:Journal of Semiconductor Technology and Science
• /
• v.2 no.4
• /
• pp.246-252
• /
• 2002

Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, a piezoresistor is used to sense atomic force acting on tip, while in second cantilever, a piezoresistor is integrated to calibrate hysteresis and creep phenomena of the PZT cantilever. The fabricated PZT cantilevers provide high tip displacement of $0.55\mu\textrm{m}/V$ and high resonant frequency of 73 KHz. A new cantilever structure has been designed to prevent electrical coupling between sensor and PZT actuator and the proposed cantilever shows 5 times lower coupling voltage than that of the previous cantilever. The fabricated PZT cantilever shows a crisp scanned image at 1mm/sec, while the conventional piezo-tube scanner shows blurred image even at $180\mu\textrm{m}/sec$. The non-linear properties of the PZT actuator are also well calibrated using the piezoresistive sensor for calibration.