Characteristics of Amorphous Si Films Fabricated by Mesh-type PECVD and Their Crystallization Behavior Using Excimer Laser (Mesh-type PECVD 방법으로 제조된 비정질 Si박막의 특성 및 레이저 결정화)
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- Journal of the Korean Electrochemical Society
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- v.3 no.1
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- pp.19-24
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- 2000