• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1233-1235
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• 1994

In this work, polyimide thin films fabricated by the electrophoretic deposition are investigated as a humidity sensing material. Capacitance and impedance are measured with increasing relative humidity to find the nature of the film. From the results, the polyimide humidity sensor is not classified impedance change type but capacitance change type and appear more sensitive in the region of higher humidity than that of lower humidity.

• Transactions on Electrical and Electronic Materials
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• 제14권4호
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• pp.182-186
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• 2013

We studied the possibility that an air capacitor can be used as a humidity sensor by measuring capacitance change. In order to investigate the possibility, the change of capacitance of an air capacitor due to moisture in air was first considered theoretically, and was then experimentally verified. The capacitance was measured by an LCR impedance meter with a 100-kHz and 1-V ac. The results revealed that the changes in the experimentally measured capacitances were greater than those in the theoretically calculated values. Based on this fact, we knew that an air capacitor could be used as part of a humidity sensing device. We expect the humidity sensor with an air capacitor has characteristics of fast response time, high reliability, and high durability compared with other conventional methods.

• 센서학회지
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• 제1권2호
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• pp.125-130
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• 1992

습도감지물질로서 PMMA박막을 사용하여 저항형 습도감지소자를 제조하고 그 특성을 조사하였다. PMMA에 DVB를 첨가하여 가교결합을 일으키고 여기에 PVA를 섞어 제조된 습도센서는 상대습도의 증가에 따라 저항의 변화를 나타내었으며, 흡착에 비해 탈착 시 약 3% 미만의 히스테리시스 특성을 나타내었다. 또한 제조된 소자는 좋은 장기안정도를 보였으며, 응답시간은 흡착시에는 약 7분, 탈착시에는 약 5분이었다.

• E2M - 전기 전자와 첨단 소재
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• 제9권6호
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• pp.605-615
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• 1996

In this paper, the effect of alkaline oxide addition such as Li$_{2}$O and Na$_{2}$O on the microstructure and humidity sensitivity of V$_{2}$O$_{5}$(2 mol%)-doped TiO$_{2}$(98 mol%) was investigated as a function of amount (0, 1, 2, 5, 10 mol%) of Li$_{2}$O and Na$_{2}$O additives. The pores in the alkaline free sample were distributed mostly in the range between 0.16 and 1.0.mu.m in diameter and its porosity was 23.29%. Li$_{2}$O caused grain overgrowth and reduced the porosity with a narrow distribution of the pore size, leading to poor humidity sensitivity. Na$_{2}$O helped to enlarge the distribution of the pore size through the formation of small soluble phases. The pore sizes of the sample containing Na$_{2}$O 2mol% were distributed mostly in the range between 1.0 and 2.5.mu.m in diameter and its porosity and intrusion volume of mercury were 31.13 % and 0.1155 mL/g respectively, which consequently improved the humidity sensing characteristics such as the sensitivity and temperature-stability. Especially, the addition of 2mol% of Na$_{2}$O improved the humidity-sensing characteristics such as sensitivity and linearity in the whole range between 30 and 90 %RH (Percentage Relative Humidity)y)

• 마이크로전자및패키징학회지
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• 제11권1호
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• pp.49-57
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• 2004

습도센서의 감습막으로 응용하기 위하여 폴리이온넨계 전해질 잉크를 제조하였다. 감습필름 은 금전극이 인쇄된 알루미나 기판 위에 잉크젯 인쇄 기법을 사용하여 도포 하였다. 또한 methyl methacrylate, acrylic acid, 2-hydroxyethyl methacrylate 그리고 [(2-methacryloyloxy)ethyl)ethyl]trimethylammonium chloride의 공중합체를 합성하였으며, 이것은 침적코팅에 의한 감습막 제조에 사용하였다. 상대습도에 따른 전기적 특성을 측정하였으며 침적코팅에 의한 습도센서와 비교하였다. 습도센서는 상대습도가 증가함에 따라서 저항의 감소함을 보여주었으며 그들의 저항특성은 시료간에 가깝게 일치함을 보여주었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.814-817
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• 2003

As additive Pt of a little to $SnO_2$ that gas sensing property is superior oxide-semiconductor material to fabricate gas sensor that operation is possible at room temperature and fabricated ceramic gas sensing devices. And, the change amount and sintering temperature of addition material investigated gas sensitivity by change of operation temperature, humidity relativity, Long-term stability and hysteresis. And achieved SEM and XRD analysis for characteristics searching examination of devices.

• 센서학회지
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• 제16권2호
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• pp.97-103
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• 2007

Crystallized carbon nitride film that has many stable physical and/or chemical properties has been expected potentially by a new electrical material. However, one of the most significant problems degrading the quality of carbon nitride films is an existence of N-H and C-H bonds from the deposition environment. The possibility of these reactions with hydroxyl group in carbon nitride films, caused by a hydrogen attack, was suggested and proved in our previous reports that this undesired effect could be applied for fabricating micro-humidity sensors. In this study, MIS capacitor and MIM capacitor with $5{\mu}m{\times}5{\mu}m$ meshes were fabricated. As an insulator, carbon nitride film was deposited on a $Si_{3}N_{4}/SiO_{2}/Si$ substrate using reactive magnetron sputtering system, and its dielectric constant, C-V characteristics and humidity sensing properties were investigated. The fabricated humidity sensors showed a linearity in the humidity range of 0 %RH to 80 %RH. These results reveal that MIS and MIM $CN_{X}$ capacitive humidity sensors can be used for Si based micro-humidity sensors.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1992년도 춘계학술대회 논문집
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• pp.144-146
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• 1992

Surface acoustic wave(SAW) oscillator offers many attractive features for application to vapor sensors. The perturbation of SAW velocity by the hexafluoropropence plasma polymer thin film has been studied for relative humidity sensing. adsorption of moisture produces rapid aid changes in the properties of the film, resulting in a change in the velocity of surface acoustic waves and, hence, in the frequency of one SAW oscillator. The device used in our experiments have 55 MHZ SAW oscillator fabricated on a LiNbO substrate.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1994년도 춘계학술대회 논문집
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• pp.67-70
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• 1994

On this study, we fabricated humudity sensor with polyimide thin film from the nonaqueous emulsion by the electrophoretic deposition as a function of film thickness. then evaluated performance of the sensor with increasing relative humidity if constant temperature constant humidity chamber, which is electronically controlled. we designed upper electrode of the sensor to brush type to make moisture particles permeate into the polymer bulk. sensing properties of the sensor on % RH shows proportion on the low %RH. Fer the 30V-30S- 200$^{\circ}C$ sample, percentage changing of capacitance on from 30 %RH to 90 %RH is 45.8 %, and increasing rate per 1 % RH of capacitance is 11.25 pF

• 센서학회지
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• 제8권1호
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• pp.32-37
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• 1999

본 연구에서는 다공질 실리콘층을 감습재료로 사용한 메사 구조를 갖는 정전용량형 습도센서를 제작하고 그 특성을 평가하였다. 센서의 구조적 특징은 기존의 웨이퍼 상하에 전극을 배치한 구조와 달리, 두 전극의 위치를 시료의 상부에 두도록 함으로서 집적화를 용이하게 할 뿐만 아니라, 하부 기판과 다른 접합영역으로부터 발생하는 정전용량의 영향을 차단하여 출력신호의 신뢰성을 개선하였다. 이를 위해 산화 다공질 실리콘의 형성과 빠른 에칭특성을 이용하여 메사 구조를 만들고, 다공질 실리콘층의 선택적 형성과 감광막을 마스크막으로 이용하여 다공질 실리콘층을 국부적으로 형성하였다. 그리고 완성된 시료에 대해 상온에서 55 - 90% 이상의 상대 습도 범위에서 감습특성을 측정하였다. 그 결과, 습도가 증가했을 때 측정된 정전용량은 전체적으로 단조 증가하였으며, 120 Hz의 저주파수에서 측정했을 때 정전용량이 300%이상 증가하는 높은 변화를 보였다