• Journal of Sensor Science and Technology
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• v.13 no.4
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• pp.287-291
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• 2004

A capacitive type humidity sensor has been fabricated using a polyimide film without hydrophobic elements and its characteristics has been evaluated for hermeticity measurement of micro packages. For a highly sensitive humidity sensor, a polyimide film without hydrophobic elements has been synthesized and used instead of using a commercial one in which 7 group elements such as fluorine or chlorine are included. Sensitivity, stability and hysteresis has been performed to characterize the fabricated sensors. The sensitivity defined as normalized percent capacitance change was 0.3751%RH and hysteresis was 0.77% in the range of 10%RH to 90%RH. Maximum deviation from the average capacitance measured for 120 minutes at 50%RH was 0.25%. The proposed humidity sensor can be used for hermeticity measurement of micro packages.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.10
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• pp.782-787
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• 2010

Recently the solution-based thin film technology has often been treated in the field of device fabrication owing to easy process and convenience for the development of various semiconductor devices and sensors. We deposited on glass substrate single-walled carbon nanotubes (SWNTs)/silane hybrid thin films by multiple spray-coating which is one of solution-based processes, and examined their electrical response for humidity. Generally silane binders which are often mixed in carbon nanotube (CNT) solution to adhere CNTs to substrate well form easily each own functionalized group on the surface of CNTs after they are hardened by way of the hydrolysis reaction. In this work, we investigated how silane binders (TEOS (tetraethoxy silane), MTMS (methyltrimethoxysilane) and VTMS (vinyltrimethoxysilane)) in CNT thin films make effect to their electrical response on humidity. As the result, we found that the resistance in the samples using TEOS was changed dramatically while it was almost invariant in the samples using MTMS and VTMS for increasing humidity.

• Fire Science and Engineering
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• v.15 no.3
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• pp.44-48
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• 2001

In this study, we analyzed the $CH_4$and $C_4$$H_{10}$ sensitivity measurement and voltage variation using catalytic type gas sensor characteristics in catalytic combustion type gas detecter sensors. Gas detector shall operate as intended when exposed for 24 hours to air having a relative humidity of 65 percent at a temperature of $20^{\circ}c$ and humidity of 85 percent at a temperature of $40^{\circ}c$. The gas detecter sensors are to be subjected to operation for 210 days in an area that has been determined to be equivalent to a typical residential atmosphere with an air velocity of 50 cm/sec. The source of energy for a gas detector sensors employing a supplementary basic circuit is energized from a seperate source of supply direct applied voltage 2.1V, 2.2V, 2.3V. As a result, it was confirmed that the relative humidity and temperature by regression each analysis, compared to the isobutane characteristic graph and methane characteristic graph by a relative humidity of 65% and 85% at a temperature($20^{\circ}c$, $40^{\circ}c$) show a similar linear pattern on the whore.

• Journal of Sensor Science and Technology
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• v.8 no.3
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• pp.253-258
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• 1999

This paper is written for the purpose of obtaining the information about the weather easily by the development of weather forecast system sensing temperature, humidity, and atmospheric pressure as key information. For this, data is obtained from the Weather Bureau, and analyzed in order to set a standard of weather forecast from the collected data. The pressure sensor and temperature-humidity sensor are fabricated using the piezoresistive effect of semiconductor, which are used to collect data. The weather forecast system is made using microprocessor.

• Particle and aerosol research
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• v.18 no.4
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• pp.109-127
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• 2022

Recently, low-cost particulate matter (PM) sensors have been widely used in monitoring mass concentration. Maintaining the accuracy of the sensors is important and requires rigorous performance evaluation and calibration. In this study, two commercial low-cost PM sensors(LCS), Plantower PMS3003 and Plantower PMS7003, were evaluated in the laboratory and field with a reference-grade PM monitor (GRIMM 11-D). Laboratory evaluation was conducted with single/mixed particles of PSL (Poly Styrene Latex) in an acrylic chamber at 20℃ and relative humidity of 20%. Field evaluation was conducted inside a building of Yonsei University (Shinchon) from February 12 to March 31, 2022. In both evaluations, LCS measured values became different from reference measured values when the relative humidity was high or the outdoor air PM10/PM2.5 ratio was high. Based on the field evaluation, the LCS measured values were corrected through four different regression analysis models. As a result, the multivariate polynomial regression analysis model showed highest matching with the reference PM monitor (PM2.5 >0.9, PM10 >0.85). In this model, the PM10/PM2.5 ratio and relative humidity were chosen as independent variables.

• Journal of Mechanical Science and Technology
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• v.20 no.4
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• pp.505-512
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• 2006

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.

• Journal of Sensor Science and Technology
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• v.6 no.1
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• pp.43-48
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• 1997

$Ca_{10}(PO_{4})_{6}(OH)_{2}$ humidity-sensitive devices were fabricated by a solid reaction method, and their humidity-sensitive characteristics were investigated. The impedance decreases with increasing relative humidity, and the good sensitivity is shown in which impedance changes by about $10^{2}\;{\Omega}$ over the region of $30{\sim}90\;%$. Also, It is shown that the humidity sensitivity is stable in temperature variations and long time exposures to the humidity. The sensitivity of the specimens is not affected by a heat treatment, and the hysteresis in one humidity cycle is negligible.

• Journal of the Korean Ceramic Society
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• v.37 no.6
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• pp.537-544
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• 2000

Thin-film humidity sensor which TiO2, ZrO2, or CeO2 was added to MgCr2O4-based materials, respectively, were fabricated on the alumina substrate by using a resistant-heating evaporator. Thin films were approximately 2${\mu}{\textrm}{m}$ in grain size and shwoed porous microstructures. The resistance of the sensor decreased with increasing the relative humidity and the MgCr2O4-TiO2 sensor had the best humidity-sensing characteristics (linearity in relative humidity versus resistance).

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.2
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• pp.82-86
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• 2000

Humidity sensors using $TiO_2$ thin films were fabricated on the multi-electrode device by Sol-Gel method and their wettability, surface potential decays and humidity sensing characteristics were investigated. Contact angle of thin films was $28^{\cic}\;at\; 400^{\circ}C$ and surface potential decayed rapidly at $400^{\circ}C$. The specimen showed best humidity sensing characteristics at $400^{\circ}C$. From the results, they were confirmed that humidity sensing characteristics of thin films have connection with contact angle and surface potential decays.

• Applied Science and Convergence Technology
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• v.25 no.6
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• pp.124-127
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• 2016

Humidity calibration for a temperature-stable quartz oscillator (TSQO) was investigated to exclude the influences of relative humidity on the TSQO output in order to use the corresponding devices outdoors. The TSQO output is a voltage that is inversely proportional to the electric impedance of the quartz oscillator, which depends on the viscosity and density of the measured gas. The TSQO output was humidity calibrated using its humidity dependence, which was obtained by varying the relative humidity (RH) from 0 to 100 RH% while other conditions were kept constant. The humidity dependencies of the TSQO output were fit by a linear function. Subtracting the change in the TSQO output induced by the change in humidity, calculated with the function from the experimentally measured TSQO output for a range of 0-100RH%, eliminated the influence of humidity on the TSQO output. The humidity calibration succeeded in reducing the fluctuations of the TSQO output from 0.4-3% to 0.1-0.3% of the average values for a range of 0-100RH%, at constant temperatures. The necessary stability of the TSQO output for application in hydrogen sensors was below one-third of the change observed for a hydrogen leakage of 1 vol.% hydrogen concentration, corresponding to 0.33% of the change in each background. Therefore, the results in this study indicate that the present humidity calibration effectively suppresses the influence of humidity, for the TSQO output for use as an outdoor hydrogen sensor.