• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.464-467
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• 2002

$TiO_{2}-Co_{3}O_{4}$ humidity sensors were fabricated by conventional ceramic process and their humid sensing characteristics were investigated. The sample which was added 10wt% $Co_{3}O_{4}$ and heat-treated $1200^{\circ}C$ showed the highest sensitivity to humidity changes and improved a linearity. As $Co_{3}O_{4}$ content was increasing, the sensor consists a uniform pore distribution and grain in the surface. This was analyzed by SEM photographs.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권10호
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• pp.475-480
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• 2006

Vanadium oxide thin films (VOx) have been deposited by RF magnetron sputtering from $V_2O_5$ target under different oxygen partial pressure ratios(0%, 10%) and substrate temperatures$(27^{\circ}C,\;400^{\circ}C)$. Crystallographic structure and morphology of the films are studied by XRD and SEM. Humidity-sensing properties of resistive sensors having interdigitated electrode structure are characterized through electrical conduction measurements. The films deposited at room temperature are amorphous whereas the ones deposited above foot are polycrystalline. The sensors show good response to humidity over 20%RH to 80%RH. Vanadium oxide thin films deposited with $0%O_2$ partial pressure at $400^{\circ}C$ exhibit greater sensitivity to humidity change than others.

• 센서학회지
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• 제14권5호
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• pp.343-349
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• 2005

Carbon nitride films were deposited on various substrates for humidity sensors with meshed electrode by reactive RF magnetron sputtering system. As the ratio of injected nitrogen was decreased, the sensitivity of sensor was increased. When the ratio of injected nitrogen was $50{\sim}70%$, the sample showed the best linearity. The sensor impedance changed from $95.4{\;}k{\Omega}$ to $2.1{\;}k{\Omega}$ in a relative humidity range of 5 % to 95 %. The humidity sensors based on silicon wafer revealed higher lineality and faster response than those of alumina or quartz substrates. The adsorption saturation time of the sample was about 80 sec, and its desorption time was about 90 sec.

• 센서학회지
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• 제5권3호
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• pp.33-40
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• 1996

$(Ba_{0.5}\;Ca_{0.5})TiO_{3}$ 감습소자를 고상반응법으로 제조하고, 그 전기적 특성을 조사하였다. 상대습도에 대한 임피던스 변화가 선형적인 우수한 감도를 나타냈으며, 충 방전 전류 특성으로부터 흡습시 주요 캐리어는 이온성 캐리어임을 나타내며, 고온 및 고습영역으로 갈수록 전기전도도가 증가함을 알 수 있다. 고습영역으로 갈수록 유전율이 증가하며, 활성화에너지는 상대습도가 증가할수록 감소함을 알 수 있다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.448-451
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• 2004

Vanadium oxides have been widely used in a variety of technological applications such electrochromic devices as infrared detectors and are expected as a material suitable for gas sensing applications. Thin films of Vanadium oxide (VOx) have been deposited by r.f magnetron sputtering under different oxygen partial pressure ratios and substrate temperatures. Humidity-sensitive properties of resistive sensors having interdigitated electrode structure are characterized. Our sensors show good response to humidity over 20%RH to 80%RH. Vanadium oxide films deposited with 0% $O_2$ partial pressure at foot exhibit greater sensitivity to humidity change than others.

• 한국환경과학회지
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• 제5권5호
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• pp.657-662
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• 1996

여름과 겨울철에 준건조 유역들 (Lucky Hills and Kendall)로부터 측정되어진 기상학적 그리고 flux data를 이용하여 증발산 산정을 위한 변수들의 민감도를 연구하였다. 상대적 민감도 분석을 이용하여 Pen농an의 잠재증발산 산정에 필요한 네 가지 기상학적 그리고 flux변수(순방사, 풍속, 공기온도 그리고 상대습도)들의 중요도가 검증되어졌다. 두 다른 유역으로부터의 연구 결과에 의하면, 여름철에 Pen-mim의 잠재증발산략의 변화는 공기 온도와 순방사에 의해서 지배되어지고, 겨울철에는 상대습도와 공기온도에 의해서 지배되어지는 것으로 나타났다.

• 센서학회지
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• 제23권1호
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• pp.42-45
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• 2014

Recently, tremendous application utilizing electrospun nanofibers have been actively reported due to its several advantages, such as high surface to volume ratio, simple fabrication and high-throughput manufacturing. In this paper, we developed highly sensitive and consistent nanofiber humidity sensor by electrospinning. The humidity sensor was fabricated by rapid electrospinning (~2 sec) $TiO_2$/PVP/LiCl mixed solution on the micro-interdigitated electrode. In order to evaluate the humidity sensing performances, we measured current response using DC bias voltage under various relative humidity levels. The results show fast response / recovery time and marginal hysteresis as well as long-term stability. In addition, with the aid of micro-interdigitated electrode, we can reduce a total resistance of the sensor and increase the total reaction area of nanofibers across the electrodes resulting in high sensitivity and enhanced current level. Therefore, we expect that the electrospun nanofiber array for humidity sensor can be feasible and promising for diverse humidity sensing application.

• 센서학회지
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• 제21권2호
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• pp.83-89
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• 2012

A simple array of metal-insulator-metal capacitive elements was proposed for a potential application in humidity sensing platforms. We fabricated meso-scale sensors with different sizes(large-size: $2.7{\times}2.7mm^2$ ; mid-size: $1.5{\times}1.5mm^2$ ; small-size: $0.7{\times}0.7mm^2$) and characterized the performance of each design. Polyimide films were utilized as a humidity-sensitive layer. Capacitance changes of the polyimide layer were measured with respect to water absorption. The device showed sensitivity in the full range of relative humidity (RH) with excellent linearity(correlation coefficient > 0.994). This array structure exhibits unique advantages including easy fabrication process, high batch productivity, and high structural compatibility with various substrate materials. It is anticipated that this device structure will be potentially useful in unique applications including mapping spatial humidity variations over a meso-scale area and implementing flexible humidity sensing element arrays.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1561-1563
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• 1998

A capacitive humidity sensor is used as a test device to characterize the performance of iodine doped polyphenylacetylene(PPA) thin films in relative humidity sensing application In comparison with undoped PPA thin films. the iodine doped PPA films showed higher sensitivity(0.19pF/%RH), better linearity(4.2%FS), much lower hysteresis and lower temperature coefficients(0.043 $\sim$ 0.067pF/$^{\circ}C$) over a wide range of relative humidity.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권6호
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• pp.335-340
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• 2000

We report the results of a preliminary investigation on capacitive humidity sensors using iodine-doped polyphenylacetylene(PPA) thin films. PPA was prepared from phenylacetylene(PA), chemically doped with iodine, and characterized by DSC, $^1H$-NMR and FTIR spectra. The iodine-doped PPA sensors showed a sensitivity of 0.20pF/%RH, a linearity of 3.8%FS, a negligible hysteresis, and a low temperature coefficients of $0.043~0.067pF/^{\circ}C$ over a wide range of relative humidity. These results are expected to open up the possibility of iodine-doped PPA thin films as relative humidity sensors.