• 한국광학회지
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• 제20권1호
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• pp.23-28
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• 2009

본 논문에서는 대면적 리소그래피를 위하여 홀로그램 영상을 연결하여 기록 물질에 저장하고 이를 마스크로 이용하는 노광 방법을 제안하고 구현하였으며, 홀로그램 영상을 재생하는 과정에서 발생되는 영상 연결 부분에서의 간섭 무늬를 제거하였다. 연결하고자 하는 영상은 DMD(digital micro-mirror device)로 표시하였으며, DMD 영상은 축소 광학계를 통하여 기록 물질에 저장되었다. 기록 물질은 전동 스테이지로 이동되도록 하여, DMD로 표시되는 영상이 기록 물질에 연속적으로 저장되도록 하였다. 이러한 방법으로 저장되는 연결된 영상은 재생광에 의하여 노광에 사용되는데, 재생광의 간섭성에 의하여 연결부분에 간섭무늬가 발생된다. 간섭무늬는 노이즈로 작용하는데, 다중 노광에 의한 홀로그램 영상의 기록과 재생을 이용하여 이를 제거하였다. 본 논문에서는 DMD와 전동 스테이지를 이용하여 영상을 연결하여 기록하고, 다중 노광에 의한 영상 기록 방법을 이용하여, 간섭 무늬가 제거된 연결된 영상을 구현하고 이를 리소그래피에 적용하였다.

• 한국광학회지
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• 제20권6호
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• pp.334-338
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• 2009

최근 디스플레이 기기의 수요가 증대되면서 대면적 노광에 대한 요구가 증대되고 있는데, 내부전반사(total internal reflection: TIR)홀로그래픽 리소그라피는 대면적 노광을 위한 효과적인 방법으로 연구가 진행되고 있다. TIR 홀로그래피에서는 일반적으로 레이저를 이용하여 영상을 기록하고 재생한다. 그러나 자외선 램프와 같은 비가간섭광을 이용하여 재생한다면, 가간섭성에 의해 나타나는 영상잡음을 줄일 수 있고, 대면적 노광에도 보다 용이할 것이다. TIR 홀로그램의 재생을 위하여 자외선 램프를 이용할 때, 램프의 유한한 선폭과 확산각이 재생 영상에 미치는 영향을 분석하고, 재생패턴에 나타나는 선폭 확대 결과를 실험을 통하여 검증하였다. ${\mu}m$ 규모의 선폭을 갖는 대면적 패턴을 TIR 홀로그램으로부터 얻기 위한 재생 광원으로, 가간섭성 광원인 레이저 대신 저잡음성과 경제성을 갖춘 일반적인 자외선 램프의 사용이 가능할 것으로 기대된다.

• 한국전기전자재료학회논문지
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• 제21권6호
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• pp.580-583
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• 2008

In this paper, we investigated the properties of chalcogenide glass thin films formed by photo-inducing for use in 1-dimensional photonic crystals. We used Ag-doped amorphous As-Ge-Se-S thin films which belongs in the chalcogenide materials having sensitive photoluminescence properties. The purpose of this experiment is to form the holographic lattice for 1-dimensional photonic crystals. The way in which photo-induce into the amorphous chalcogenide thin films is holographic lithography method. We confirmed the formation of diffraction lattice by sensing the existence of diffraction beam and measured the diffraction efficiency. The results suggest that there is an application possibility with photonic crystals.

• 한국전기전자재료학회논문지
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• 제29권6호
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• pp.327-331
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• 2016

Resistive random access memory (ReRAM) of metallic conduction channel mechanism is based on the electrochemical control of metal in solid electrolyte thin film. Amorphous chalcogenide materials have the solid electrolyte characteristic and optical reactivity at the same time. The optical reactivity has been used to improve the memory switching characteristics of the amorphous $As_2Se_3$-based ReRAM. This study focuses on the formation of holographic lattices patterns in the amorphous $As_2Se_3$ thin film for straight conductive channel. The optical parameters of amorphous $As_2Se_3$ thin film which is a refractive index and extinction coefficient was taken by n&k thin film analyzer. He-Cd laser (wavelength: 325 nm) was selected based on these basic optical parameters. The straighten conduction channel was formed by holographic lithography method using He-Cd laser.$ Ag^+$ ions that photo-diffused periodically by holographic lithography method will be the role of straight channel patterns. The fabricated ReRAM operated more less voltage and indicated better reliability.

• 한국광학회지
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• 제18권5호
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• pp.303-308
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• 2007

디지털 홀로그래피 현미경을 이용하여 반도체 공정에 사용되는 위상차 포토마스크의 결함을 측정하였다. 이러한 위상차 포토마스크는 위상차를 이용하여 반도체 문양을 만들기 때문에 일반 현미경으로는 패턴을 알 수 없을 뿐 아니라 위상마스크의 결함은 더욱더 찾기 어렵다. 디지털 홀로그래피 현미경을 이용하면 한 장의 홀로그램을 이용하여 위상차 포토마스크의 3차원 구조와 결함을 동시에 측정할 수 있다.

• 한국근적외분광분석학회:학술대회논문집
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• 한국근적외분광분석학회 2001년도 NIR-2001
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• pp.1210-1210
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• 2001

On farm analysis of protein, moisture and oil in cereals and oil seeds is quickly being adopted by Australian farmers. The benefits of being able to measure protein and oil in grains and oil seeds are several : $\square$ Optimize crop payments $\square$ Monitor effects of fertilization $\square$ Blend on farm to meet market requirements $\square$ Off farm marketing - sell crop with load by load analysis However farmers are not NIR spectroscopists and the process of calibrating instruments has to the duty of the supplier. With the potential number of On Farm analyser being in the thousands, then the task of calibrating each instrument would be impossible, let alone the problems encountered with updating calibrations from season to season. As such, NIR technology Australia has developed a mechanism for \ulcorner\ulcorner\ulcorner their range of Cropscan 2000G NIR analysers so that a single calibration can be transferred from the master instrument to every slave instrument. Whole grain analysis has been developed over the last 10 years using Near Infrared Transmission through a sample of grain with a pathlength varying from 5-30mm. A continuous spectrum from 800-1100nm is the optimal wavelength coverage fro these applications and a grating based spectrophotometer has proven to provide the best means of producing this spectrum. The most important aspect of standardizing NIB instruments is to duplicate the spectral information. The task is to align spectrum from the slave instruments to the master instrument in terms of wavelength positioning and then to adjust the spectral response at each wavelength in order that the slave instruments mimic the master instrument. The Cropscan 2000G and 2000B Whole Grain Analyser use flat field spectrographs to produce a spectrum from 720-1100nm and a silicon photodiode array detector to collect the spectrum at approximately 10nm intervals. The concave holographic gratings used in the flat field spectrographs are produced by a process of photo lithography. As such each grating is an exact replica of the original. To align wavelengths in these instruments, NIR wheat sample scanned on the master and the slave instruments provides three check points in the spectrum to make a more exact alignment. Once the wavelengths are matched then many samples of wheat, approximately 10, exhibiting absorbances from 2 to 4.5 Abu, are scanned on the master and then on each slave. Using a simple linear regression technique, a slope and bias adjustment is made for each pixel of the detector. This process corrects the spectral response at each wavelength so that the slave instruments produce the same spectra as the master instrument. It is important to use as broad a range of absorbances in the samples so that a good slope and bias estimate can be calculated. These Slope and Bias (S'||'&'||'B) factors are then downloaded into the slave instruments. Calibrations developed on the master instrument can then be downloaded onto the slave instruments and perform similarly to the master instrument. The data shown in this paper illustrates the process of calculating these S'||'&'||'B factors and the transfer of calibrations for wheat, barley and sorghum between several instruments.