Browse > Article
http://dx.doi.org/10.3807/HKH.2007.18.5.303

Defect Inspection of Phase Shift Photo-Mask with Digital Hologram Microscope  

Cho, Hyung-Jun (Department of Physics, Cheju National University)
Lim, Jin-Woong (Department of Physics, Cheju National University)
Kim, Doo-Cheol (Department of Physics, Cheju National University)
Yu, Young-Hun (Department of Physics, Cheju National University)
Shin, Sang-Hoon (AP & Tec)
Publication Information
Korean Journal of Optics and Photonics / v.18, no.5, 2007 , pp. 303-308 More about this Journal
Abstract
We report here on the application of a digital holographic microscope as a metrology tool for the inspection and the micro-topography reconstruction of different micro-structures of phase shift photo-mask (PSM). The lithography by phase shift photo-mask uses the interference and the pattern of the PSM is not imaged by general optical microscope. The technique allows us to obtain digitally a high-fidelity surface topography description of the phase shift photo-mask with only one hologram image acquisition, allowing us to have relatively simple and compact set-ups able to give quantitative information of PSM.
Keywords
Holography; Digital holography; Phase shift photo-mask;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 T. Yasuzato, S. Ishida, and H. Tanabe, 'Pattern Dependence of Mask Topography Effect in Alternating Phase-Shifting Masks,' SPIE, vol. 3748, pp. 363-370, 1999   DOI
2 G. K. Wernicke, O. Kruschke, N. Demoli, and H. Gruber, ' nvestigation of- micro-opto-electro-mechanical components with a holographic microscopic interferometer,' SPIE, vol. 3396, pp. 238-243, 1998   DOI
3 S. Peng, 'Through-Focus Image Balancing of Alternating Phase Shifting Masks,' SPIE, vol. 3873, pp. 328-336, 1999   DOI
4 W. H. Foo, S. S. Mehta, R. Kumar, A. O. Adeyeye, H. Suda, T. Kubota, Y. Kimura, and H. Kinoshita, 'Swing effects in alternating phase shift mask lithography: Implications of low illumination,' J. Vac. Sci. Technol. B, vol. 24, pp. 2326-2330, 2006   DOI   ScienceOn
5 J. W. Goodman and R. W. Lawrence, ' igital image formation from electronically detected holograms,' Appl. Phys. Lett., vol. 11, pp. 77-79, 1967   DOI
6 M. A. Kronrod, N. S. Merzlyakov, and L. P. Yaroslavski, 'Reconstruction of hologram with a computer,' Sov. Phys. Tech., vol. 17, pp. 434-444, 1972
7 L. Xu, X. Peng, J. Miao, and K. Asundi, 'Studies of digital microscopic with application to microstructure testing,' Appl. Opt., vol. 40, pp. 5046-5051, 2001   DOI
8 H. Cho, D. Kim, Y. Yu, W. Jung, and S. Shin, '디지털 홀로그래피 현미경과 위상 펼침을 이용한 3차원 측 정', 한국광학회지, vol. 17, pp. 329-334, 2006   과학기술학회마을   DOI
9 C. Wagneer, S. Seebacher, W. Osten, and W. Juptner, ' igital recording and numerical reconstruction of lensless Fourier holograms in optical metrology,' Appl. Opt., vol. 38, pp. 4812-4820, 1999   DOI
10 S. Nagashige, K. Hayashi, S. Akima, H. Takahashi, K. Chiba, Y. Yamada, and Y. Matsuzawa, ' etection and Repair of Multiphase defects on Alternating Phase-Shift Masks for DUV Lithography,' SPIE, vol. 3873, pp. 127- 137, 1999   DOI
11 Y. Takaki and H. Ohzu, ' ast numerical reconstruction technique for high resolution hybrid holographic microscopy,' Appl. Opt., vol. 38, pp. 2204-2055, 1999   DOI
12 L. Xu, J. Miao, and A. Asundi, 'Properties of digital holography based on in-line configuration,' Opt. Eng., vol. 39, pp. 3214-3219, 1999   DOI   ScienceOn
13 J. W. Goodman, Introduction to Fourier Optics (Roberts & Company Publishers, USA, 2005) Ch. 9
14 E. Cuche, P. Marquet, and C. Depeursinge, 'Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms,' Appl. Opt., vol. 38, pp. 6994-7001, 1999   DOI
15 L. Liebmann, S. Mansfield, A. Wong, J. Smolinski, S. Peng, K. Kimmel, M. Rudzinski, J. Wiley, and L. Zurbrick, ' igh Resolution Ultraviolet Defect Inspection of DAP Reticles Darkfield Alternate Phase,' SPIE, vol. 3873, pp. 148-161, 1999   DOI
16 U. Schnars, 'Direct phase determination in hologram inter-ferometry with use of digitally recorded holograms,' J. Opt. Soc. Am., vol. A 11, pp. 2011-2015, 1994   DOI   ScienceOn
17 S. Kim, H. Lee, and J. Son, '디지털 홀로그래피에서의 공초점 렌즈계를 이용한 보다 큰 물체의 기록', 한국광학회지, vol. 14, pp. 244-248, 2003   과학기술학회마을