• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.10
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• pp.838-843
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• 2002

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectric layers, which can be applied to the integrated circuits for deep sub-micron technology. The reverse moat etch process has been used for the shallow trench isolation(STI)-chemical mechanical polishing(CMP) process with conventional low selectivity slurries. Thus, the process became more complex, and the defects were seriously increased. In this paper, we studied the direct STI-CMP process without reverse moat etch step using high selectivity slurry(HSS). As our experimental results show, it was possible to achieve a global planarization without the complicated reverse moat process, the STI-CMP process could be dramatically simplified, and the defect level was reduced. Therefore the throughput, yield, and stability in the ULSI semiconductor device fabrication could be greatly improved.

• Applied Chemistry for Engineering
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• v.29 no.3
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• pp.325-329
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• 2018

In this study, polyphenols were extracted from Angelica, which are known to have a high antioxidant content and the extraction process was optimized using the response surface methodology. The extraction yield and the total polyphenols were set as response values for the methodology. Quantitative factors in the extraction process were the extraction time, volume ratio of alcohol/ultrapure water, and extraction temperature. When considering both the main and interaction effects, the greatest influence factor on the extraction yield and total polyphenols was the extraction time. The optimum extraction time and temperature and alcohol/ultrapure water volume ratio for angelica were 2.8 h, $56.6^{\circ}C$ and 64.0 vol% respectively. The extraction yield and total polyphenols when using the conditions were calculated to be 24.6% and 8.76 mg GAE/g. respectively. Determination coefficients of regression equations for the extraction yield and total polyphenols were 81.4 and 75.4%, respectively. Also the overall satisfaction level was found to be 0.80 and the significance was confirmed within 5%.

• Microbiology and Biotechnology Letters
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• v.22 no.1
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• pp.106-113
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• 1994

A novel method for production of concentrated purity maltose using swollen extruded corn starch was investigated. Degree of gelatinization of extruded starch suitable for maltose formation was found to be around 70%. The optimal amiunt of enzyme was 400 unit fungal $\alpha $-amylase per g of starch, and the reaction time was 12 hours. At extruded starch concentration of 300 g/l(w/v), maltose concentration and content were reached up to 220 g/l(w/v) and 77%(w/w), respectively. The maltose forming reaction was also successfully proceeded at high starch concentration of 700 g/l(w/v), however, the conversion yield and content were decreased. By the addition of extruded starch by fed-batch wise, the maltose concentration, purity, and conversion yield could be improved up to 465 g/l(w/v), 70%(w/w), and 0.63, respectively. The investigated maltose production process seems to have many potential advantages over the conventional process utilizing liquefied starch, and the feasibility for industrial application needs to be evaluated.

• Microbiology and Biotechnology Letters
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• v.18 no.3
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• pp.280-285
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• 1990

Biotransformation of progesterone to 11 $\alpha$ -hydroxyprogesterone by growing cells of Rhizopus nigricans was investigated. As the concentration of progesterone increased, the specific growth rate of R. nigricans decreased linearly, and consequently the conversion yield lowered. The hyphae of the microorganism were observed to become thicker, shorter, and more densely branched at high concentrations of progesterone. In order to improve the process productivity, biotransformation was conducted with continuous addition of progesterone. When the substrate was added continuously at a rate of 0.86 g/hr for 30 hrs, overall conversion yield reached upto 56% while a single addition of the same amount of progesterone yielded about 40% eonversion. When additional feeding of glucose was carried out upon its depletion, an improved br'oconversion yield upto 68% was obtained.

• Transactions of Materials Processing
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• v.25 no.3
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• pp.189-194
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• 2016

In the current study, spring-back of DP980 steel sheet was numerically evaluated for U-bending using a yield function with a hardening model. For spring-back prediction, two types of yield functions - Hill'48 and Yld2000-2d - were considered. Additionally, isotropic hardening and the Yoshida-Uemori model were used to investigate the spring-back behavior. The parameters for each model were obtained from uniaxial tension, uniaxial tension-compression, uniaxial tension-unloading and hydraulic bulging tests. The numerical simulations were performed using the commercial software, PAM-STAMP 2G. The results were compared with experimental data from a U-bending process.

• Journal of Welding and Joining
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• v.26 no.3
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• pp.61-66
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• 2008

As ships become to be larger than ever, the thicker plate and the higher tensile steel plate are used in naval shipyard. Though special chemical composition is needed for high-tensile steels, recent high-tensile steels are made by the TMCP(Thermo-Mechanical control process) skill. The increase of yield stress and tensile stress of TMCP steels is induced from bainite phase which is transformed from austenite, but that increased yield stress can be vanished by another additional thermal cycle like welding and heating. As thermal deformations are deeply related by yield stress of material, the study for prediction of plate deformation by heating should reflect principle of TMCP steels. This study developed an algorithm which can calculate inherent strain. In this algorithm, not only the mechanical principles of thermal deformations, but also the predicting of the portion of initial bainite is considered when calculating inherent strain. The simulations of plate deformation by these values showed good agreements with experimental results of normalizing steels and TMCP steels in welding and heating. Finally we made an inherent strain database of steels used in Class rule.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.3
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• pp.175-184
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• 2001

In this study, the improved throughput and stability in device fabrication could be obtained by applying CMP process to STi structue in 0.18 um semiconductor device. To employ the CMP process in STI structure, the Reverse Moat Process used to be added after STI Fill, as a result, the process became more complex and the defect were seriously increased than they had been,. Removal rate of each thin film in STI CMP was not uniform, so, the device must have been affected. That is, in case of excessive CMP, the damage on the active area was occurred, and in the case of insufficient CMP nitride remaining was happened on that area. Both of them deteriorated device characteristics. As a solution to these problems, the development of slurry having high removal rate and high oxide to nitride selectivity has been studied. The process using this slurry afford low defect levels, improved yield, and a simplified process flow. In this study, we evaluated the 'High Selectivity Slurry' to do a global planarization without reverse moat step, and also we evaluated EPD(Eend Point Detection) system with which 'in-situ end point detection' is possible.

• Nuclear Engineering and Technology
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• v.51 no.1
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• pp.214-220
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• 2019

Thermochemical cycles have been predominantly used for energy transformation from heat to stored chemical free energy in the form of hydrogen. The thermochemical cycle based on uranium (UTC), proposed by Oak Ridge National Laboratory, has been considered as a better alternative compared to other thermochemical cycles mainly due to its safety and high efficiency. UTC process includes three steps, in which only the first step is unique. Hydrogen production apparatus with hectogram reactants was designed in this study. The results showed that high yield hydrogen was obtained, which was determined by drainage method. The results also indicated that the chemical conversion rate of hydrogen production was in direct proportion to the mass of $Na_2CO_3$, while the solid product was $Na_2UO_4$, instead of $Na_2U_2O_7$. Nevertheless the thermochemical cycle used for hydrogen generation can be closed, and chemical compounds used in these processes can also be recycled. So the cycle with $Na_2UO_4$ as its first reaction product has an advantage over the proposed UTC process, attributed to the fast reaction rate and high hydrogen yield in the first reaction step.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.42 no.5
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• pp.1-14
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• 2010

Bio-ethanol is a promising alternative energy source for reducing both consumption of crude oil and environmental pollution from renewable resources like lignocellulosic biomass such as wood, forest residuals, agricultural leftovers and urban wastes. Based on current technologies, the cost of ethanol production from lignocellulosic materials is relatively high, and the main challenges are the low yield and high cost of the hydrolysis process. Development of more efficient pretreatment technology (physical, chemical, physico-chemical, and biological pretreatment), integration of several microbiological conversions into fewer reactors, and increasing ethanol production capacity may decrease specific investment for ethanol producing plants. The purpose of pretreatment of lignocellulosic material is to improve the accessible surface area of cellulose for hydrolytic enzymes and enhance the conversion of cellulose to glucose and finally high yield ethanol production which is economic and environmental friendly.

• Asian-Australasian Journal of Animal Sciences
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• v.18 no.3
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• pp.433-438
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• 2005

This investigation was undertaken in order to elicit the relationship between the extent of ultrafiltration processing of whey and its effect on composition and yield of resultant whey protein concentrate (WPC). Cheddar cheese whey was fractionated through ultrafiltration to an extent of 70, 80, 90, 95, 97.5% and 97.5% volume reduction followed by I stage and II stage diafiltration. After each level of ultrafiltration, the composition of WPC was monitored. Similarly, the initial whey was adjusted to 3.0, 6.2 and 7.0 pH levels and ultrafiltration was carried out to elicit the effect of pH of ultrafiltration on the composition. Further, initial whey was adjusted to different levels of whey protein content ranging from 0.5 to 1.0 per cent and subjected to ultrafiltration to different levels. The various range of retentate obtained were further condensed and spray dried in order to assess the yield of WPC per unit volume of whey used and the quantity of whey required to produce unit weight of product. With the progress of ultrafiltration, there was a progressive increase in protein content and decrease in lactose and ash content. The regression study led to good relationships with $R^2$ values of more than 0.95 between the extents of permeate removed and the resultant changes in composition of each of the constituents. Whey processed at pH 3.0 had significantly a very low ash content and high protein content as compared to processing at 6.2 and 7.0. The yield of WPC per unit volume of whey varied significantly with the initial protein content. Higher initial protein content led to higher yield of all ranges of WPC and the quantity of whey required per unit weight of spray dried WPC significantly reduced. Regression equations establishing the relationship between initial protein content of whey and the yield of various types of WPC have been derived with very high $R^2$ values of 0.99. This study revealed that, the yield and composition of whey can be monitored strictly by controlling the processing parameters and WPC can be produced depending on the food formulation requirement.