• 한국진공학회지
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• 제8권3B호
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• pp.257-261
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• 1999

The claw pump, one of oil-less dry pumps developed to solve problems found in vacuum systems pumped by oil-sealed rotary pumps, has been widely used separately or as a part of compound structure with a roots pump. The claw pump has some merits such as a high pumping speed, a high compression ratio, and relatively little heat generation. The high compression ratio of the claw pump is compression ratio, and relatively little heat generation. The high compression ratio of the claw pump is based on efficient sweeping action of the special type rotor and an intrinsic self-valving mechanism. The contour of the rotor with claw-type blade is designed basically to make two rotors revolve smoothly without touching with each other, and related dimensions are determined by required pumping speed, compression ratio, power demand and diameter of the rotor axis. In this paper the procedure of designing the rotor of the claw pump is described and factors influencing the pump performance are analyzed.

• 한국진공학회지
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• 제19권4호
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• pp.265-274
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• 2010

반도체소자 및 디스플레이 제조공정의 핵심 환경인 진공을 형성 유지하기 위한 건식진공펌프는 높은 성능과 신뢰성을 필요로 한다. 건식진공펌프의 개발을 위해서는 다양한 고려와 세밀한 기술적 검토가 필요하다. 본고에서는 반도체 및 디스플레이 제조 공정용 건식진공펌프 개발 과정을 단계별로 소개하고 향후 기술발전 방향에 대해 소개하고자 한다.

• 한국전기전자재료학회논문지
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• 제24권6호
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• pp.449-457
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• 2011

Effect of pump combinations on the vacuum characteristics of vacuum system was simulated for optimum design of system. In this investigation, the feasibility of modelling mechanism for VacSimMulti simulator was proposed. Simulation results of various pumping combinations showed the possibilities and reliabilities of simulation for the performance of vacuum system in specific semiconductor processing. Simulation of roughing pump presented the expected pumping behaviors based on commercial specifications of employed pumps. Application of booster pump exhibited the high pumping efficiency for middle vacuum range. Combinations of optimum backing pump for diffusion and turbo vacuum system were obtained. And, the predictable characteristics of process application of both simulated systems were also acquired.

• 반도체디스플레이기술학회지
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• 제1권1호
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• pp.41-45
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• 2002

In modem manufacturing, new applations and technologies demand smaller, and functional devices to replace large systems. As miniaturization becomes a necessity, many companies are interested in small pumps for use in creating ultra-high vacuum, but past efforts to develop such systems have failed due to problems with vibration, stress, heat and power consumption. This paper shows analysis-based design techniques for high vacuum turbomolecular pump by finite element analysis.

• 진공이야기
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• 제2권4호
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• pp.39-46
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• 2015

After stepping into a new field of vacuum 30 years ago, our company has grown up steadily as a specialized vacuum industry, and now we can provide vacuum devices covering most of the pressure range. We are planning to put out high level dry pump like a multistage Roots pump on the market in the near future. Procedures of technology development for designing, fabricating, and testing the multistage Roots pump of 600 L/min class will be briefly reported. Core items of the technical development on the multistage Roots pump are as follows; elaborated profile design of 3-lobe rotors using an involute curve, optimization of rotor dimensions, especially for clearances and rotor width, considering the pumping speed, compression ratio and heat load, and establishment of a standardized test system. At present, the multistage Roots pump is about to come into commercialization.

• 한국철도학회논문집
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• 제13권5호
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• pp.516-520
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• 2010

튜브 구조물의 압력을 대기압 이하로 유지하는데에 사용될 진공 펌프의 용량을 설정하기 위한 파라메타 연구를 수행하였다. 최근 철도 기술 연구자들은 초고속 수송 시스템의 하나인 튜브 열차 시스템에 관심을 가지게 되었다. 초고속을 달성하기 위하여 튜브 내부를 저압으로 유지할 필요가 있는데, 저압에서는 공기 저항이 극단적으로 줄어들기 때문이다. 진공 펌프 시스템은 튜브 내부를 저압으로 만들고, 누설을 보충하는 역할을 한다. 일련의 연구결과, 다양한 파라메타에 대한 진공 펌프의 용량을 구하였다. 이 결과들은 공기 저항 저감 효과를 분석하는데에 적용될 것이다.

• Transactions on Electrical and Electronic Materials
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• 제14권6호
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• pp.334-338
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• 2013

In this study, the outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for these vacuum systems were suggested based on the simulation results. The baking-out effects of the modeled systems and materials on the performance of the vacuum system were also analyzed. The simulation predicted that the overall outgassing effect was more significant in the turbomolecular pump system than in the diffusion pump system and that the utilization of a booster pump has a greater effect on the evacuation time than on the ultimate pressure.

• International journal of advanced smart convergence
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• 제11권4호
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• pp.88-95
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• 2022

Vacuum simulation is associated with the prediction and calculation of how materials, pumps and systems will perform using mathematical equations. In this investigation, three different high vacuum systems were simulated and estimated with each vacuum characteristics by VacTran simulator. In each of modelled vacuum systems, selection of gas loads into vessel, combination of rough and high vacuum pumps and dimension of conductance elements were proposed as system variables. In pump station model, the pumping speed to pressures by the combination of root pump was analyzed under the variations of vessel volume. In this study, the effects of outgassing dependent on vessel materials was also simulated and aluminum vessel was estimated to optimum materials. It was obtained from the modelling with diffusion pump that the diameter, length of 50×250[mm]roughing line was characterized as optimum variables to reach the ultimate pressure of 10E-7[torr]. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacTran simulator. Feasibility of VacTran as vacuum simulator was verified and applications of VacTran in high tech process expected to be increased.

• International journal of advanced smart convergence
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• 제7권4호
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• pp.84-91
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• 2018

In this paper, we simulated three different HV systems and analyzed of each vacuum characteristics by VacCAD modelling. In each of modelled vacuum systems, selection of chamber materials, combination of rough pump with high vacuum pump and conductance of roughing line (diameter and length) were proposed as system variables. In the modelling of chamber materials, the pumping times to ultimate pressures of different chamber materials (stainless steel, aluminum) were compared by the variations of chamber volume. In this model, the effects of outgassing dependent on the chamber materials was also simulated and aluminum was estimated to optimum chamber materials. It was also obtained that modelling of vane and roots pump with diffusion pump and diameter, length of $50{\times}250$ [mm]roughing line were characterized as optimum variables to reach the ultimate pressure of 10E-7 [mbar] most effectively. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacCAD simulations. Feasibility of VacCAD as vacuum simulator was verified and applications of VacCAD expected to be increased to fields in vacuum needed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.934-937
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• 2005

It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, proper chamber with high vacuum condition is necessarily required more than anything else to modify scanning electron microscope. In this study, special chamber unit using rotary pump and diffusion pump to obtain high vacuum degree was designed and manufactured and various evaluation tests fur recognize the vacuum characteristic were accomplished.