• 제목/요약/키워드: High-k dielectrics

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고분해능 전자현미경법을 이용한 (Bi, La)4Ti3O12 박막의 결정학적 특성 평가 (Crystallographic Characterization of the (Bi, La)4Ti3O12 Film by High-Resolution Electron Microscopy)

  • 이덕원;양준모;박태수;김남경;염승진;박주철;이순영;박성욱
    • 한국재료학회지
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    • 제13권7호
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    • pp.478-483
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    • 2003
  • The crystallographic characteristics of the $(Bi, La)_4$$Ti_3$$O_{12}$ thin film, which is considered as an applicable dielectrics in the ferroelectric RAM device due to a low crystallization temperature and a good fatigue property, were investigated at the atomic scale by high resolution transmission electron microscopy and the high resolution Z-contrast technique. The analysis showed that a (00c) preferred orientation and a crystallization of the film were enhanced with the diffraction intensity increase of the (006) and (008) plane as the annealing temperature increased. It indicated a change of the atomic arrangement in the (00c) plane. Stacking faults on the (00c) plane were also observed. Through the comparison of the high-resolution Z-contrast image and the $Bi_4$$Ti_3$$O_{12}$ atomic model, it was evaluated that the intensity of the Bi atom was different according to the atomic plane, and it was attributed to a substitution of La atom for Bi at the specific atom position.

Suppression of Dielectric Loss at High Temperature in (Bi1/2Na1/2)TiO3 Ceramic by Controlling A-site Cation Deficiency and Heat Treatment

  • Lee, Ju-Hyeon;Lee, Geon-Ju;Pham, Thuy-Linh;Lee, Jong-Sook;Jo, Wook
    • 센서학회지
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    • 제29권1호
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    • pp.7-13
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    • 2020
  • Dielectric capacitors are integral components in electronic devices that protect the electric circuit by providing modulated steady voltage. Explosive growth of the electric automobile market has resulted in an increasing demand for dielectric capacitors that can operate at temperatures as high as 400 ℃. To surpass the operation temperature limit of currently available commercial capacitors that operate in temperatures up to 125 ℃, Bi1/2Na1/2TiO3 (BNT), which has a large temperature-insensitive dielectric response with a maximum dielectric permittivity temperature of 300 ℃, was selected. By introducing an intentional A-site cation deficiency and post-heat treatment, we successfully manage to control the dielectric properties of BNT to use it for high-temperature applications. The key feature of this new BNT is remarkable reduction in dielectric loss (0.36 to 0.018) at high temperature (300 ℃). Structural, dielectric, and electrical properties of this newly developed BNT were systematically investigated to understand the underlying mechanism.

Characteristics of MINOS Structure using $TiO_2$ as Blocking Layer for Nonvolatile Memory applicable to OLED

  • Lee, Kwang-Soo;Jung, Sung-Wook;Kim, Kyung-Hae;Jang, Kyung-Soo;Hwang, Sung-Hyun;Lee, Jeoung-In;Park, Hyung-Jun;Kim, Jae-Hong;Son, Hyuk-Joo;Yi, Jun-Sin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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    • pp.1284-1287
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    • 2007
  • Titanium dioxide ($TiO_2$) is promising candidate for fabricating blocking layer of gate dielectrics in non-volatile memory (NVM). In this work, we investigated $TiO_2$ as high dielectric constant material instead of silicon dioxide ($SiO_2$), which is generally used as blocking layer for NVM.

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Soft Lithography of Graphene Sheets Via Surface Energy Modification

  • Kim, Hansun;Jung, Min Wook;Myung, Sung;Jung, Daesung;Lee, Sun Sook;Kong, Ki-Jeong;Lim, Jongsun;Lee, Jong-Heun;Park, Chong Yun;An, Ki-Seok
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.144.2-144.2
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    • 2013
  • With the synthesis of graphene sheets as large-scale and high quality, it is essentially important to develop suitable graphene patterning process for future industrial applications. Especially, transfer or patterning method of CVD-grown graphene has been studied. We report simple soft lithographic process to develop easily applicable patterning method of large-scale graphene sheets by using chemically functionalized polymer stamp. Also important applications, the prototype capacitors with graphene electrode and commercial polymer dielectrics for the electrostatic-type touch panel are fabricated using the developed soft lithographic patterning and transfer process.

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펨토초 레이어 기반 유리 내부가공 특성 (Characteristic of the femtosecond laser machining in glass)

  • 유병헌;김영미;조성학;장원석;김재구;황경현;이동주
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.239-240
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    • 2006
  • For longer than picosecond pulses, bulk damage inside defect-free dielectrics involves the heating and multiplication of spurious electrons by the incident laser beam and transfer of this energy to the lattice. The situation is quite different for femtosecond pulses which are shorter than the time scale for electron energy transfer to the lattice. Damage caused by these pulses is produced with smaller statistical uncertainty and is controllable on a microscopic scale. These properties can be exploited to produce laser devices such as arrays of damage dots for all optical memories with high data storage density or arrays of parallel grooves to form transmission gratings. In this work, we observed characteristic of the femtosecond laser machining in BK7 and fused silica.

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송전용 자기재 현수애자의 고강도 특성 연구 (A Study on the High Strength of porcelain insulators for transmission line)

  • 조한구;한세원;박기호;최연규;이동일;최인혁;김태영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 춘계학술대회 논문집 유기절연재료 방전 플라즈마연구회
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    • pp.85-88
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    • 2003
  • In this study, porcelain insulator samples which have a different alumina composition were manufactured in order to test electrical and mechanical properties and make an analysis of the propagation phenomena of micro cracks on porcelain body. From XRD quantitative analysis the crystalline phases were different with alumina composition, sample C and D which have about 17wt% Corundum phase without the Cristobalite phase shows better electrical and mechanical properties than sample A and 8 which have the Cristobalite phase. In dielectrics test on porcelain samples with below 17wt% alumina composition, it was found that the amount of glass phase$(SiO_2)$have an main effect to decrease the dielectric loss$(tan{\delta})$, and the dielectric breakdown voltage of aluminous porcelain insulators was largely affected by its relative density. As a micro cracks analysis, HRS were measured, then the intensity of HRS increased with the amount of alumina composition. On the other hand, the propagation behaviors of cracks was fairly influenced by the distribution of pores.

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The Effect of Uni-nanoadditive Manufactured Using RF Plasma Processing on Core-shell Structure in MLCC

  • Song, Soon-Mo;Kim, Hyo-Sub;Park, Kum-Jin;Sohn, Sung-Bum;Kim, Young-Tae;Hur, Kang-Heon
    • 한국세라믹학회지
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    • 제46권2호
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    • pp.131-136
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    • 2009
  • Radio frequency (RF) plasma treatment is studied for the size reduction and the spheroidization of coarse particles to change them into nano-sized powders of spherical shape in MLCC fields. The uni-nanoadditives manufactured by RF plasma processing for high dispersion have been investigated for the effect on core-shell structure in dielectrics of MLCC. Microstructures have been characterized using scanning electron microscope (SEM), transmission electron microscope (TEM) and Electron Probe Micro Analyzer (EPMA). We compared the distribution of core-shell grains between specimens manufactured using uni-nanoadditive and using mixed additive. In addition, the uniformity of rare earth elements in the core-shell structured grains was analyzed. It was shown, from TEM observations, that the sintered specimen manufactured using uni-nanoadditives had more dense small grains with well-developed core-shell structure than the specimen using mixed additives, which had a homogeneous microstructure without abnormal grain growth and shows broad temperature coefficient of capacitance (TCC) curves in all temperature ranges because of well dispersed additives.

Advances in Zinc Oxide-Based Devices for Active Matrix Displays

  • Mann, Mark;Li, Flora;Kiani, Ahmed;Paul, Debjani;Flewitt, Andrew;Milne, William;Dutson, James;Wakeham, Steve J.;Thwaites, Mike
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.389-392
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    • 2009
  • Metal oxides have been proposed as an alternative channel material to hydrogenated amorphous silicon in thin film transistors (TFTs) because their higher mobility and stability make them suitable for transistor active layers. Thin films of indium zinc oxide (IZO) were deposited using a High Target Utilization Sputtering (HiTUS) system on various dielectrics, some of which were also deposited with the HiTUS. Investigations into bottom-gated IZO TFTs have found mobilities of 8 $cm^2V\;^1s^{-1}$ and switching ratios of $10^6$. There is a variation in the threshold voltage dependent on both oxygen concentration, and dielectric choice. Silica, alumina and silicon nitride produced stable TFTs, whilst hafnia was found to break down as a result of the IZO.

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Electrical Properties of Ferroelectric Polymer on Inorganic Dielectric Layer for FRAM

  • Han, Hui-Seong;Kim, Kwi-Jung;Jeon, Ho-Seung;Park, Byung-Eun
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.258-258
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    • 2008
  • Among several available high-k dielectrics the lanthanum zirconium oxide ($LaZrO_x$) system is very attractive as a buffer insulating layer. Because both lanthanum and zirconium atoms, the constituents of the $LaZrO_x$ thin film, have been considered to be thermally stable in contact with Si. The $LaZrO_x$ films were deposited by a sol-gel method. After the deposition, The $LaZrO_x$ films were crystallized at $750^{\circ}C$ for 30 minutes in $O_2$ ambient. PVDF-TrFE films were deposited on these $LaZrO_x$/Si structures using a sol-gel technique. The sol-gel solution was spin-coated on $LaZrO_x$/Si structures at 500 rpm for 5 sec and 2500 rpm for 15 sec. The deposited layer was dried at $165^{\circ}C$ for 30 min in air on a hot-plate. Then, we deposited Au electrode on PVDF-TrFE films using thermal evaporation.

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고온초전도 박막이 설치된 유전체부하 공진기의 주파수 조절 가능한 High-Q 공진기 제작 및 대면적 고온초전도 박막의 특성평가에의 응용 (Application of Dielectric-loaded Cavity Resonators with HTS Endplates for Tunable High-Q Resonators and Characterization Tools for Large HTS Films)

  • 권형준;박종운;강훈;허정;이상영
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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    • pp.75-82
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    • 1999
  • TE$_{01\;{\delta}}$ mode Cavity Resonators with a low loss dielectric rod and YBa$_2Cu_3O_{7-{\delta}}$ (YBCO) endplates were prepared and their microwave properties were studied at temperatures above 30 K. Both sapphire and rutile were used as the dielectrics. The TE$_{01\;{\delta}}$ mode Q$_0$ of the resonator, designed to work as a tunable resonator with variations in the gap distance (s) between the dielectric rod and the top YBCO, was more than 1000000 at s = 0 mm and at 30 K and .the resonant frequency of 19.56GHz when a sapphire rod was used for the dielectric. The TE$_2Cu_3O_{7-{\delta}}$ mode resonant frequency (f$_0$) appeared to decrease as the temperature is raised. Meanwhile, the temperature dependence of the TE$_2Cu_3O_{7-{\delta}}$ mode f$_0$ of the rutile-loaded resonator appeared different with f$_0$ increasing according to the temperature and Q$_0$ more than 300000 at 30 K and f$_0$ = 8.56 CHz. Comparisons were made between the microwave properties of the sapphire-loaded and the rutile-loaded resonators. Also, applications of the TE$_2Cu_3O_{7-{\delta}}$ mode cavity resonator for a tunable resonator with a very high Q$_0$ as · well as a characterization tool for surface resistance measurements of HTS films are described.

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