• Title/Summary/Keyword: High vacuum pressure

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Micro-gap DBD Plasma and Its Applications

  • Zhang, Zhitao;Liu, Cheng;Bai, Mindi;Yang, Bo;Mao, Chengqi
    • Journal of the Speleological Society of Korea
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    • no.76
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    • pp.37-42
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    • 2006
  • The Dielectric Barrier Discharge (DBD) is a nonequilibrium gas discharge that is generated in the space between two electrodes, which are separated by an insulating dielectric layer. The dielectric layer can be put on either of the two electrodes or be inserted in the space between two electrodes. If an AC or pulse high voltage is applied to the electrodes that is operated at applied frequency from 50Hz to several MHz and applied voltages from a few to a few tens of kilovolts rms, the breakdown can occur in working gas, resulting in large numbers of micro-discharges across the gap, the gas discharge is the so called DBD. Compared with most other means for nonequilibrium discharges, the main advantage of the DBD is that active species for chemical reaction can be produced at low temperature and atmospheric pressure without the vacuum set up, it also presents many unique physical and chemical process including light, heat, sound and electricity. This has led to a number of important applications such as ozone synthesizing, UV lamp house, CO2 lasers, et al. In recent years, due to its potential applications in plasma chemistry, semiconductor etching, pollution control, nanometer material and large area flat plasma display panels, DBD has received intensive attention from many researchers and is becoming a hot topic in the field of non-thermal plasma.

Sintering and Mechanical Properties of Chromium Boride-chromium Carbide Composites

  • Matsushita, Jun-Ichi;Shimao, Kenji;Machida, Yoshiyuki;Takao, Takumi;Iizumi, Kiyokata;Sawada, Yutaka;Shim, Kwang-Bo
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.1104-1105
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    • 2006
  • Several boride sintered bodies such as $TiB_2$, $ZrB_2$, and $SiB_6$ were previously reported. In the present study, the sinterability and physical properties of chromium boride $(CrB_2)$ containing chromium carbide $(Cr_3C_2)$ sintered bodies were investigated in order to determine its new advanced material. The samples were sintered at desired temperature for 1 hour in vacuum under a pressure by hot pressing. The relative density of sintered bodies was measured by Archimedes' method. The relative densities of $CrB_2$ addition of 0, 5, 10, 15 and 20 mass% $Cr_3C_2$ composites were 92 to 95%. The Vickers hardness of the $CrB_2$ with 10 and 15 mass% $Cr_3C_2$ composites were about 14 and 15 GPa at room temperature, respectively. The Vickers hardness at high temperature of the $CrB_2$ addition of 10 mass% $Cr_3C_2$ composite decreased with increasing measurement temperature. The Vickers hardness at 1273 K of the sample was 6 GPa. The Vickers hardness of $CrB_2$ addition of $Cr_3C_2$ composites was higher than monolithic $CrB_2$ sintered body. The powder X-ray diffraction analysis detected CrB and $B_4C$ phases in $CrB_2$ containing $Cr_3C_2$ composites.

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Hydrophobic and Mechanical Characteristics of Hydrogenated Amorphous Carbon Films Synthesized by Linear Ar/CH4 Microwave Plasma

  • Han, Moon-Ki;Kim, Taehwan;Cha, Ju-Hong;Kim, Dong-Hyun;Lee, Hae June;Lee, Ho-Jun
    • Applied Science and Convergence Technology
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    • v.26 no.2
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    • pp.34-41
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    • 2017
  • A 2.45 GHz microwave plasma with linear antenna has been prepared for hydrophobic and wear-resistible surface coating of carbon steel. Wear-resistible properties are required for the surface protection of cutting tools and achieved by depositing a hydrogenated amorphous carbon film on steel surface through linear microwave plasma source that has $TE_{10}-TEM$ waveguide. Compared to the existing RF plasma source driven by 13.56 MHz, linear microwave plasma source can easily generate high density plasma and provide faster deposition rate and wider process windows. In this study, $Ar/CH_4$ gas mixtures are used for hydrogenated amorphous carbon film deposition. When microwave power of 1000 W is applied, 40 cm long uniform $Ar/CH_4$ plasma could be obtained in gas pressure of 200~400 mTorr. The Vickers hardness measurement of hydrogenated amorphous carbon film on steel surface was evaluated. It was found the optimized deposition condition at $Ar:CH_4=25:25$ sccm, 300 mTorr with microwave power of 1000W and RF bias power of 100W. By deposition of hydrogenated amorphous carbon film, contact angle on steel surfaces increases from $43.9^{\circ}$ to $93.2^{\circ}$.

Effect of Moisture in a Vacuum Chamber on the Deposition of c-BN Thin Film using an Unbalanced Magnetron Sputtering Method (비대칭 마그네트론 스퍼터링 방법에 의한 질화붕소막의 증착시 반응실내의 초기 수분이 입방정질화붕소 박막의 형성에 미치는 영향)

  • Lee, Eun-Sook;Park, Jong-Keuk;Lee, Wook-Seong;Seong, Tae-Yeon;Baik, Young-Joon
    • Journal of the Korean Ceramic Society
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    • v.49 no.6
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    • pp.620-624
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    • 2012
  • The role of moisture remaining inside the deposition chamber during the formation of the cubic boron nitride (c-BN) phase in BN film was investigated. BN films were deposited by an unbalanced magnetron sputtering (UBM) method. Single-crystal (001) Si wafers were used as substrates. A hexagonal boron nitride (h-BN) target was used as a sputter target which was connected to a 13.56 MHz radiofrequency electric power source at 400 W. The substrate was biased at -60 V using a 200 kHz high-frequency power supply. The deposition pressure was 0.27 Pa with a flow of Ar 18 sccm - $N_2$ 2 sccm mixed gas. The inside of the deposition chamber was maintained at a moisture level of 65% during the initial stage. The effects of the evacuation time, duration time of heating the substrate holder at $250^{\circ}C$ as well as the plasma treatment on the inside chamber wall on the formation of c-BN were studied. The effects of heating as well as the plasma treatment very effectively eliminated the moisture adsorbed on the chamber wall. A pre-deposition condition for the stable and repeatable deposition of c-BN is suggested.

Oil Carrier, Development of on Optimized Anti-Splash Device Model for COT Vent Pipe (유조선, COT Vent Pipe용 Anti-Splash Device 최적 모델 개발)

  • Na, Ok-kyun;Jeon, Young-Soo;Park, Sin-kil;Kim, Jong-Ho
    • Special Issue of the Society of Naval Architects of Korea
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    • 2015.09a
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    • pp.50-55
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    • 2015
  • Application of newly conceptualized Anti-Splash Devices designed for COT vent pipes were studied on a P/V valve located on the upper deck of an oil carrier vessel. Anti-Splash devices are used in the shipbuilding industry in order to avoid oil overflow and spray accidents caused by excess pressure and vacuum condition in the cargo oil tanks. These conditions are caused by the transverse and longitudinal sloshing forces that arise from ship motion during sea voyages. The main issue with existing Anti-Splash device model is flux at the outlet of the Anti-Splash Device, and so, new conceptual models for the Anti-Splash device were developed and compared to existing Anti-Splash device model using CFD analysis. Transient analysis was used to capture the flow and velocity of each model and a comparative analysis was performed between old and new-concept models. This data was used to determine the optimal design parameters in order to develop an optimized Anti-Splash Device. A Factory acceptance test was performed on the new-concept models in order to verify the performance and efficiency against their design requirements and other criterion. The final step performed was to apply the optimized Anti-Splash Device models for COT vent pipes to an actual vessel and verify performance through a seawater cargo operation during a sea voyage as per the ship owner's request. The patent for the aforementioned device was obtained by the Korean Intellectual property Office dated Dec. 18th,2014.

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Effects of Growth Ambient, Process Pressure, and Heat Treatments on the Properties of RF Magnetron Sputtered GaMgZnO UV-Range Transparent Conductive Films

  • Patil, Vijay;Lee, Chesin;Lee, Byung-Teak
    • Korean Journal of Materials Research
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    • v.31 no.6
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    • pp.320-324
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    • 2021
  • Effects of growth variables and post-growth annealing on the optical, structural and electrical properties of magnetron-sputtered Ga0.04Mg0.10Zn0.86O films are characterized in detail. It is observed that films grown from pure oxygen plasma showed high resistivity, ~102 Ω·cm, whereas films grown in Ar plasma showed much lower resistivity, 2.0 × 10-2 ~ 1.0 × 10-1 Ω·cm. Post-growth annealing significantly improved the electrical resistivity, to 4.3 ~ 9.0 × 10-3 Ω·cm for the vacuum annealed samples and to 1.3 ~ 3.0 × 10-3 Ω·cm for the films annealed in Zn vapor. It is proposed that these phenomena may be attributed to the improved crystalline quality and to changes in the defect chemistry. It is suggested that growth within oxygen environments leads to suppression of oxygen vacancy (Vo) donors and formation of Zn vacancy (VZn) acceptors, resulting in highly resistive films. After annealing treatment, the activation of Ga donors is enhanced, Vo donors are annihilated, and crystalline quality is improved, increasing the electron mobility and the concentration. After annealing in Zn vapor, Zn interstitial donors are introduced, further increasing the electron concentration.

Modeling and numerical simulation of electrostrictive materials and structures

  • Pechstein, Astrid;Krommer, Michael;Humer, Alexander
    • Smart Structures and Systems
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    • v.30 no.3
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    • pp.221-237
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    • 2022
  • This paper is concerned with nonlinear modeling and efficient numerical simulation of electrostrictive materials and structures. Two types of such materials are considered: relaxor ferroelectric ceramics and electrostrictive polymers. For ceramics, a geometrically linear formulation is developed, whereas polymers are studied in a geometrically nonlinear regime. In the paper, we focus on constitutive modeling first. For the reversible constitutive response under consideration, we introduce the augmented Helmholtz free energy, which is composed of a purely elastic part, a dielectric part and an augmentation term. For the elastic part, we involve an additive decomposition of the strain tensor into an elastic strain and an electrostrictive eigenstrain, which depends on the polarization of the material. In the geometrically nonlinear case, a corresponding multiplicative decomposition of the deformation gradient tensor replaces the additive strain decomposition used in the geometrically linear formulation. For the dielectric part, we first introduce the internal energy, to which a Legendre transformation is applied to compute the free energy. The augmentation term accounts for the contribution from vacuum to the energy. In our formulation, the augmented free energy depends not only on the strain and the electric field, but also on the polarization and an internal polarization; the latter two are internal variables. With the constitutive framework established, a Finite Element implementation is briefly discussed. We use high-order elements for the discretization of the independent variables, which include also the internal variables and, in case the material is assumed incompressible, the hydrostatic pressure, which is introduced as a Lagrange multiplier. The elements are implemented in the open source code Netgen/NGSolve. Finally, example problems are solved for both, relaxor ferroelectric ceramics and electrostrictive polymers. We focus on thin plate-type structures to show the efficiency of the numerical scheme and its applicability to thin electrostrictive structures.

Computational Fluid Dynamics for Enhanced Uniformity of Mist-CVD Ga2O3 Thin Film (Ga2O3초음파분무화학기상증착 공정에서 유동해석을 이용한 균일도 향상 연구)

  • Ha, Joohwan;Lee, Hakji;Park, Sodam;Shin, Seokyoon;Byun, Changwoo
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.4
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    • pp.81-85
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    • 2022
  • Mist-CVD is known to have advantages of low cost and high productivity method since the precursor solution is misting with an ultrasonic generator and reacted on the substrate under vacuum-free conditions of atmospheric pressure. However, since the deposition distribution is not uniform, various efforts have been made to derive optimal conditions by changing the angle of the substrate and the position of the outlet to improve the result of the preceding study. Therefore, in this study, a deposition distribution uniformity model was derived through the shape and position of the substrate support and the conditions of inlet flow rate using the particle tracking method of computational fluid dynamics (CFD). The results of analysis were compared with the previous studies through experiment. It was confirmed that the rate of deposition area was improved from 38.7% to 100%, and the rate of deposition uniformity was 79.07% which was higher than the predicted result of simulation. Particle tracking method can reduce trial and error in experiments and can be considered as a reliable prediction method.

High Permeability, High Selectivity Carbon-Silica Membranes for Gas Separation (기체분리용 고투과선택성 탄소-실리카막)

  • 이영무;박호범
    • Membrane Journal
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    • v.12 no.2
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    • pp.107-119
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    • 2002
  • Carbon-silica ($C-SiO_2$) membranes can be easily prepared by the pyrolysis of two-phase copolymers containing an aromatic imide block and a siloxane block and remarkably high permselectivities of $He/N_2, O_2/N_2,$ and $CO_2/N_2$. The pyrolysis of the imide-siloxane block copolymers was carried out at different final temperatures, $600^{\circ}C, 800^{\circ}C,$ and $1000^{\circ}C$ under an inert atmosphere, and is the first reported case of the precursors being used for the preparation of carbon membrane. The polymeric precursors were synthesized in a wide range of siloxane content and different final morphology, and the pyrolozed membranes were tested with a high vacuum time-lag method at $25^{\circ}C$ and 76cmHg of feed pressure. In experiments with He, $CO_2, O_2 \;and \;N_2$, the membranes were found to have good $O_2/N_2$ selectivity up to 32.2 and $O_2$ permeability on the order of $10-8/cm^2(STP)cm/cm^2seccmHg.$.

Development of Induction Brazing System for Sealing Instrumentation Feedthrough Part of Nuclear Fuel Test Rig (핵연료조사리그 계장선 통과부위의 밀봉을 위한 유도 브레이징 시스템 개발)

  • Hong, Jintae;Kim, Ka-Hye;Heo, Sung-Ho;Ahn, Sung-Ho;Joung, Chang-Young;Son, Kwang-Jae;Jung, Yang-Il
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.12
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    • pp.1573-1579
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    • 2013
  • To test the performance of nuclear fuels, coolant needs to be circulated through the test rig installed in the test loop. Because the pressure and temperature of the coolant is 15.5 MPa and $300^{\circ}C$ respectively, coolant sealing is one of the most important processes in fabricating a nuclear fuel test rig. In particular, 15 instrumentation cables installed in a test rig pass through the pressure boundary, and brazing is generally applied as a sealing method. In this study, an induction brazing system has been developed using a high frequency induction heater including a vacuum chamber. For application in the nuclear field, BNi2 should be used as a paste, and optimal process variables for Ni brazing have been found by several case studies. The performance and soundness of the brazed components has been verified by a tensile test, cross section test, and sealing performance test.