Effect of Moisture in a Vacuum Chamber on the Deposition of c-BN Thin Film using an Unbalanced Magnetron Sputtering Method
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Lee, Eun-Sook
(Electronic Materials Center, Korea Institute of Science and Technology)
Park, Jong-Keuk (Electronic Materials Center, Korea Institute of Science and Technology) Lee, Wook-Seong (Electronic Materials Center, Korea Institute of Science and Technology) Seong, Tae-Yeon (Department of Materials Science & Engineering, Korea University) Baik, Young-Joon (Electronic Materials Center, Korea Institute of Science and Technology) |
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