• 한국진공학회지
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• 제4권2호
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• pp.172-176
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• 1995

$YBa_2Cu_3O_{7-y}$ thin films have been prepared on MgO(100)substrates placed on-axis to the target by dc magnetron sputtering in a variety of oxygen/argon gas pressures with different substrate-target distances. We found that films with the c-axis perpendicular to the substrate deposited in an optimally high gas pressure with on-axis substrate-target configuration do. Increasing the substrate-target distance was found to be effetive in reducing the resputtering effect and enhancing superconductivity of films, but not so much $\alpha$-and c-axis growth of YMCO films on MgO substrates. Dependences of the Tc, the rationj of resistances at 300K and 100K, and the X-ray diffraction pattern on the gas pressure and the substrate target distance are described.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.324-325
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• 2008

In this Study, We fabricated a plasma discharge cluster with external electrodes which can be applied to flexible backlight in a polymer substrate and investigated the discharge characteristics. The Sealing process was progressed in vacuum chamber, which enable to fabricate plasma discharge cluster. The results of discharge characteristics show that the static memory margin of plasma discharge cluster was increased, as Ne/Xe(5%) gas pressure was increased. also, When gas pressure was 100torr at 600um of electrode gap, we have obtained high luminance of a plasma discharge cluster.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.255.2-255.2
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• 2014

Electrode erosion is indispensable for atmospheric plasma systems, as well as for switching devices, due to the high heat flux transferred from arc plasmas to contacts, but experimental and theoretical works have not identified the characteristic phenomena because of the complex physical processes. Our investigation is concerned with argon free-burning arcs with anode erosion at atmospheric pressure by computational fluid dynamics (CFD) analysis. We are also interested in the energy flux and temperature transferring to the anode with a simplified unified model of arcs and their electrodes. In order to determine two thermodynamic quantities such as temperature and pressure and flow characteristics we have modified Navier-Stokes equations to take into account radiation transport, electrical power input and the electromagnetic driving forces with the relevant Maxwell equations. From the simplified self-consistent solution the energy flux to the anode can be derived.

• 한국세라믹학회지
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• 제50권6호
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• pp.396-401
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• 2013

The size of various alumina ceramics used in the semiconductor and display industries must be increased to increase the size of wafers and panels. In this research, large alumina ceramics were fabricated by pressure-vacuum hybrid slip casting (PVHSC) employing a commercial powder, followed by sintering in a furnace. In the framework of the PVHSC method, the consolidation occurs not only by compression of the slip in the casting room but also by suction of the dispersion medium from the casting room. When sintered at $1650^{\circ}C$ for 4 h, the fabricated large-size alumina ($1,550{\times}300{\times}30mm^3$) exhibited a dense microstructure corresponding to more than 99.2% of the theoretical density and a high purity of 99.79%. The flexural and compressive strengths of the alumina plate were greater than 340 MPa and 2,600 MPa, respectively.

• 한국진공학회지
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• 제8권3A호
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• pp.249-255
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• 1999

Deposition characteristics of Cu thin films using Ar carrier gas and $H_2$ processing gas at various working pressures and substrate temperatures were investigated. Also, effects of $H_2$ pretreatment using plasma at $200^{\circ}C$ of substrate temperature and 0.6 Torr of chamber pressure were stdied. Cu thin films were deposited on TiN/Si substrate at working pressure of 0.5~1.5 Torr, substrate temperatures of 140~$240^{\circ}C$ with (hface)Cu(tmvs). Substrates were pretreated by $H_2$ plasma, and Cu films deposited in situ using twofold shower head. The purity, electrical resistivity, thickness, surface morphology, optical properties of the deposited Cu films were measured b the AES, four point probe, stylus profiler, SEM,. and the uv-visible spectrophotometer. This study suggests that $H_2$ plasma is an effective method for enhancing deposition rate and for producing high quality copper thin films.

• 한국진공학회지
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• 제4권S1호
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• pp.108-112
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• 1995

Copper and aluminum selective deposition using (hfac)Cu(VTMS) and DMEAA precursors were performed in a warm-wall low pressure chemical vapour deposition reactor. The films of Cu and AI deposited on Corning 7059 glass and quartz with pattern of Cr seed metal. Selective deposition can be achieved at a pressure range of from 10-1 to 10 torr and substrate temperature range of 150-25$0^{\circ}C$. Selective deposition of Cu and AI by CVD is one of candidate for gate material formation fo larger area and high resolution plat panel displays.

• Journal of Advanced Marine Engineering and Technology
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• 제35권2호
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• pp.232-237
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• 2011

최근 초저온 밸브 관련 산업의 급속한 발전과 함께 초저온 밸브에 대한 지속적인 연구가 이루어지고 있고 특히, 기계, 조선, 반도체 및 디스플레이 산업, 항공 우주산업분야의 비약적인 발전과 사용자의 요구 등으로 인하여 초저온용 밸브의 고성능화가 되고 있는 추세이나, 진공 단열에 관한 초저온 응용 장비들에 대한 기술개발 및 연구는 미흡한 실정이다. 본 연구에서는 초저온용 진공자켓밸브의 스템 외부에 자켓 배관을 설치 한 후 낮은 압력을 유지함으로써 외부로부터 자켓 내부로의 유입 열전달량을 감소시키는 것에 주안점을 두었고, 효과적인 전열 제어를 위하여 외부로부터 자켓 내부로의 유입 열전달량을 감소시킬수 있는 자켓 내부의 압력과 자켓부의 두께 변화에 관한 열전달 특성을 3차원 수치해석적인 방법으로 연구하여 고찰하였다.

• 한국재료학회지
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• 제24권2호
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• pp.98-104
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• 2014

Vacuum kinetic spray(VKS) is a relatively advanced process for fabricating thin/thick and dense ceramic coatings via submicron-sized particle impact at room temperature. However, unfortunately, the particle velocity, which is an important value for investigating the deposition mechanism, has not been clarified yet. Thus, in this research, VKS average particle velocities were derived by numerical analysis method(CFD: computational fluid dynamics) connected with an experimental approach(SCM: slit cell method). When the process gas or powder particles are accelerated by a compressive force generated by gas pressure in kinetic spraying, a tensile force generated by the vacuum in the VKS system accelerates the process gas. As a result, the gas is able to reach supersonic speed even though only 0.6MPa gas pressure is used in VKS. In addition, small size powders can be accelerated up to supersonic velocity by means of the drag-force of the low pressure process gas flow. Furthermore, in this process, the increase of gas flow makes the drag-force stronger and gas distribution more homogenized in the pipe, by which the total particle average velocity becomes higher and the difference between max. and min. particle velocity decreases. Consequently, the control of particle size and gas flow rate are important factors in making the velocity of particles high enough for successful deposition in the VKS system.

• 한국수소및신에너지학회논문집
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• 제32권3호
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• pp.163-171
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• 2021

Securing energy sources is a key element essential to economic and industrial development in modern society, and research on renewable energy and hydrogen energy is now actively carried out. This research was conducted through experiments and analytical methods on the hydrogen filling process in the hydrogen storage tank of the hydrogen charging station. When low-temperature, high-pressure hydrogen was injected into a high-pressure tanks where hydrogen is charged, the theoretical method was used to analyze the changes in temperature and pressure inside the high-pressure tanks, the amount of hydrogen charge, and the charging time. The analysis was conducted in the initial vacuum state, called the First Cycle, and when the residual pressure was present inside the tanks, called the Second Cycle. As a result of the analysis, the highest temperature inside the tanks in the First Cycle of the high-pressure tank increased to 442.11 K, the temperature measured through the experiment was 441.77 K, the Second Cycle increased to 397.12 K, and the temperature measured through the experiment was 398 K. The results obtained through experimentation and analysis differ within ±1%. The results of this study will be useful for future hydrogen energy research and hydrogen charging station.

• 한국산학기술학회논문지
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• 제14권9호
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• pp.4178-4184
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• 2013

최근 나노임프린트 리소그래피 공정이 마이크로/나노 스케일의 소자 개발에 있어서 경제적으로 대량 생산할 수 있는 기술로 주목 받고 있다. 최근 나노임프린트 기술은 공정의 고속화 및 대면적화를 통한 대량생산 기술로의 전환을 목표로 하고 있다. 자외선경화 방식의 나노임프린트의 경우 상온 및 저압의 장점과 함께 비진공 환경에서 공정이 가능하다면 진공챔버 및 고압 스테이지 등과 같은 고가의 장비가 필요 없게 됨으로써 설비비용을 낮추고 공정시간을 단축하는데 큰 기여를 할 수 있다. 그러나 비진공 환경에서는 기포결함이 종종 발생하게 된다. 본 연구에서는 비진공 환경에서의 자외선경화 방식의 나노임프린트 공정 중 레지스트의 액적도포 방법에 따른 기포형성을 연구하였다. 액적의 양과 액적의 수를 달리하여 도포한 레지스트에 대하여 충전 후 기포결함 발생을 분석하였다.