• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집D
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• pp.325-330
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• 2001

One of the principal components of the KSTAR (Korea Superconducting Tokamak Advanced Research) tokamak structure is the vacuum vessel, which acts as the high vacuum boundary for the plasma and also provides the structural support for internal components. Hyundai Heavy Industries Inc. has performed the engineering design of the vacuum vessel. Here the overall configuration of the KSTAR vacuum vessel was briefly described and then the design methodology and the analysis results were presented. The vacuum vessel consists of double walls, several ports, leaf spring style supports. Double walls are separated by reinforcing ribs and filled with baking/shielding water. The overall external dimensions of the main body are 3.39 m high, 1.11 m inner radius, 2.99 m outer radius, and made of SA240-316LN. The vacuum vessel was designed to be capable of achieving the base pressure of $1\times10^{-8}$ Torr, and also to be structurally capable of sustaining the vacuum pressure, the electromagnetic and thermal loads during plasma disruption and bakeout, respectively. The vacuum vessel will be baked out maximum $150^{\circ}C$ by hot pressurized water through the channels formed between double walls and the reinforcing ribs. A 3-D temperature distribution and the resulting thermal loads in the vessel were calculated during bakeout. It was found that the vacuum vessel and its supports were structurally rigid based on the thermal stress analysis. The maximum electromagnetic loads on the vacuum vessel induced by eddy and halo currents resulting from the engineering plasma radial and vertical disruption scenarios have been estimated. The stress analyses have been performed based on these electromagnetic loads and the resulting stresses at he critical locations of the vacuum vessel were within the allowable stresses.

• Journal of Biosystems Engineering
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• 제21권2호
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• pp.123-133
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• 1996

An automatic drum seeder was developed to improve the seeding operation. It consisted of a conveyor to transfer seedling trays, a seed-hopper to supply seeds, a drum to drop seeds on the tray, and an air blower to remove extra seeds. A photo sensor was used to detect the transfer of seedling trays, and its signal was fed into microcomputer which operated a stepping motor driving the drum. The seeds were adhered to the surface of drum by vacuum pressure, and were dropped into tray cells by compressed air. An air connection unit was devised to alternate between vacuum pressure and compressed air. A control program for the system, written in C language, could operate the drum at the given number of revolutions and revolutions per minute. The results showed that the air connection unit could operate well and the seeds were dropped satisfactorily into tray cells. In case of cabbage and perilla seeds, which are regular and spherical shape, the missing rate was low and the single seeding rate was more than 97%. Low missing rate and high multiple seeding rate were observed in lettuce seeds which have narrow ends with tight weight. The missing rate of pepper seed was very high because of heavy weight and irregular shape. To improve the performance of the seeder, adjustment of vacuum pressure based upon shape and weight of the seeds, careful selection of the material of drum, maintenance of consistent air blower pressure, and replacement of stepping motor to DC motor are recommended.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.912-915
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• 2004

A vacuum environment is very important for NGL(Next Generation Lithography) apparatuses such as EUVL(Extreme Ultra Violet Lithography) or EPL(Electron Projection Lithography) and so on. The performance of these systems is dominated by vacuum level of processing and positioning accuracy of a stage. So, ultra-precision stage usable in a high vacuum level is needed for the improved performance of these devices. In contrast to atmospheric condition, a special attention must be paid to guide bearing, actuator and other elements. In this paper, air bearing is adopted because of its very high motional accuracy. So, air bearing is designed to be vacuum compatible using differential exhaust method, which prevents air from entering into vacuum chamber. For this, leakage analysis is performed theoretically and verified from experiment.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.176-177
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• 2016

In the last few decades, attention toward atmospheric pressure plasma (APP) has been greatly increased due to the numerous advantages of those applications, such as non-necessity of high vacuum facility, easy setup and operation, and low temperature operation. The practical applications of APP can be found in a wide spectrum of fields from the functionalization of material surfaces to sterilization of medical devices. In the secondary battery industry, separator film has been typically treated by APP to enhance adhesion strength between adjacent films. In this process, the plasma is required to have high stability and uniformity for better performance of the battery. Dielectric barrier discharge (DBD) was usually adopted to limit overcurrent in the plasma, and we developed the pre-discharge technology to overcome the drawbacks of streamer discharge in the conventional DBD source which makes it possible to produce a super-stable plasma at atmospheric pressure. Simulations for the fluid flow and electric field were parametrically performed to find the optimized design for the linear jet plasma source. The developed plasma source (Plasmapp LJPS-200) exhibits spatial non-uniformity of less than 3%, and the adhesion strength between the separator and electrode films was observed to increase 17% by the plasma treatment.

• 한국진공학회지
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• 제8권4B호
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• pp.497-506
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• 1999

Carbon has been widely used for the material of plasma facing components in fusion experiment devices like a tokamak, because carbon has good thermal and mechanical properties. However carbon gas a relatively high ougassing rate. Therefore the amount and the surface area of the carbon material used in the vessel will determine the background pressure of the vacuum vessel. In this experiment influences of carbon on the vacuum performance was investigated by measuring chamber pressure, ougassing rater and gas spectrum of carbon fiber composite (CFC) samples in various situations, pumping out, chamber baking, carbon heating (250~$500^{\circ}C$), exposure to atmosphere for maintenance of in-vessel components, etc., occurring routinely during tokamak operations.

• 한국진공학회지
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• 제17권4호
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• pp.270-277
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• 2008

진공이란 공간의 기체압력이 대기압보다 낮은 상태, 즉 분자밀도가 약 $2.5{\times}10^{19}$분자/$cm^3$ 보다 적은 상태를 의미하며, 극청정환경 제공, 단열효과, 입자의 장거리 비행가능, 증발과 승화작용, 안정된 플라즈마를 유지, 생화학 반응 억제, 우주환경 제공 등의 특성으로 인해 오늘날 전 산업분야 및 과학기술 분야에 응용이 되고 있다. 우주환경은 이러한 고진공 환경과 태양 복사열에 의한 고온 환경 및 극저온이 반복되는 가혹한 환경으로 특징지어지는데, 위성체는 지상에서 발사되어 우주궤도에 진입한 순간부터는 계속해서 우주환경에 노출된다. 위성체가 이러한 가혹한 우주환경에 노출될 경우 주요부품에 기능장애가 초래되기도 하며 이는 결국 임무의 실패로 이어지기도 한다. 따라서 위성체는 지상에서 우주환경시험을 거쳐 기능 및 작동상태를 점검해야 하며, 이를 위해서는 우주환경을 모사 할 수 있는 우주환경 모사장비가 필요하다. 우주환경모사장비라 함은 우주환경의 주특징인 고진공상태와 극저온 환경을 모사할 수 있는 지상장비를 말하며, 장비의 설계 및 제작에는 기본적으로 진공기술이 응용되게 된다. 본 논문에서는 한국항공우주연구원이 보유하고 있는 인공위성의 개발에 필수 장비인 우주환경모사장치들을 소개하고, 최근 발달된 국내 진공기술로 국산화 제작에 성공한 유효제원 ${\varphi}8m{\times}L10\;m$ 급의 대형열진공챔버를 통하여 우주개발에 응용되는 진공기술을 소개하고자 한다.

• 대한화학회지
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• 제49권6호
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• pp.554-559
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• 2005

• 센서학회지
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• 제29권5호
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• Geomechanics and Engineering
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• 제19권5호
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• pp.447-462
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• 2019

The vacuum preloading method has been used in many countries for ground improvement and land reclamation works. A sand cushion is required as a horizontal drainage channel for conventional vacuum preloading. In terms of the dredged-fill foundation soil, the treatment effect of the conventional vacuum preloading method is poor, particularly in Tianjin, China, where a shortage of sand exists. To solve this problem, straight-line vacuum preloading without sand is widely adopted in engineering practice to improve the foundation soil. Based on the engineering properties of dredged fill in Lingang City, Tianjin, this paper presents field instrumentation in five sections and analyzes the effect of a prefabricated vertical drain (PVD) layout and a vacuum pumping method on the soft soil ground treatment. Through the arrangement of pore water pressure gauges, settlement marks and vane shear tests, the settlement, pore water pressure and subsoil bearing capacity are analyzed to evaluate the effect of the ground treatment. This study demonstrates that straight-line vacuum preloading without sand can be suitable for areas with a high water content. Furthermore, the consolidation settlement and consolidation degree system is developed based on the grey model to predict the consolidation settlement and consolidation degree under vacuum preloading; the validity of the system is also verified.

• Journal of Information Display
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• 제5권4호
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• pp.7-11
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• 2004

Effects of base vacuum level on the electrical and optical characteristics of the plasma display panel (PDP) were investigated. The relationship between efficiency and base vacuum level before filling discharge gas was analyzed. For the base vacuum level of $1{\times}10^{-4}$ torr, firing voltage of a 2-inch diagonal PDP panel was 232 V at the discharge gas pressure of 400 torr and luminous efficiency was 1.5 lm/W at 180V sustaining pulse. On the other hand for $1{\times}10^{-6}$torr, the firing voltage was reduced to 215 V and luminous efficiency was improved considerably to 2.5 lm/W. We successfully demonstrated the smooth operation of tip-less PDP fabricated using vacuum in-line sealing method.