• 한국진공학회:학술대회논문집
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• 한국진공학회 2004년도 제26회 학술발표회 초록집
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• pp.153-154
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• 2004

• 한국진공학회:학술대회논문집
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• 한국진공학회 2004년도 제26회 학술발표회 초록집
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• pp.169-169
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• 2004

• 한국진공학회:학술대회논문집
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• 한국진공학회 2004년도 제26회 학술발표회 초록집
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• pp.123-123
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• 2004

• 한국진공학회:학술대회논문집
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• 한국진공학회 1992년도 제3회 학술발표회 논문개요집
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• pp.13-13
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• 1992

• 한국진공학회지
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• 제8권4A호
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• pp.461-464
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• 1999

Planar type thin film inductors have a potential for the application of miniaturized DC-DC converters. For those high current applications, the magnetic film with high current capability is required. The current capability of magnetic films is mainly determined from high saturation magnetization (4$\piM_s$) as well as large anisotropy field $(H_k)$. We fabricated a double rectangular spiral thin film inductor which consist of magnetic layer, coil and insulator. Highest inductance values as well as best frequency characteristics can be obtained from 5 MHz and quality factor exhibit about 7.

• 한국진공학회지
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• 제1권1호
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• pp.190-197
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• 1992

In this study we have investigated physical and electrical properties of high temperature oxide (HTO) thin film using dichlorosilane (DCS) gas. This film had low etch rate and excellent step coverage, and its characteristics of Si-O bond were similar to those of thermal oxide. I-V curves also showed similar electrical properties to those of thermally grown oxide (SiO2) while time dependent dielectric breakdown (TDDB) results revealed 1/4 value of thermal oxide. However, defect density was measured to be much lower value than that of thermal oxide.

• 진공이야기
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• 제3권2호
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• pp.4-10
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• 2016

Photovoltaic technology has been intensively developed as one of the most powerful renewable energies, replacing a fossil fuel such as coal and petroleum. Every country in the world has emphasized on development of photovoltaic technology and our government has invested heavily in low cost and high efficiency. Korea institute of industrial technology (KITECH) has lastingly constructed PV R&D infra for development of cost-effective and high efficiency solar cells as well as support of commercialization in PV's small and medium enterprises. In this paper, we introduce the next generation PV R&D and infra in KITECH.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.194-194
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• 2000

There are difficulties on transport modelling on high density plasma discharge, because of severe restrictions on space grid size and time step size. We present a new unconditionally stable algorithm for fluid simulation of high density process plasma. The origin of the restriction is investigated and a new method to solve the problem is suggested, The simulation result is compared with the other methods previously developed.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2001년도 제33회 춘계학술대회 개최
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• pp.327-333
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• 2001

DLC films due to their extreme properties have attracted a lot of attention. In this study, the films were prepared on High Speed Steel (SKH2) by microwave plasma assisted CVD method using CH4. Every friction test under the normal load 2,5N and sliding velocity of 20,25mm/s in high vacuum (5${\times}$10$\^$-5/ Torr). The films were analyzed with Raman spectroscopy. The films failed immediately in vacuum due to high friction. Wear volume of DLC coated disks decreased more than that of non-DLC coated disks. Also, hardness of the films is about 600HV.

• 항공우주기술
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• 제3권1호
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• pp.103-108
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• 2004

우주환경은 고진공 환경과 태양 복사열에 의한 고온 환경 및 극저온이 반복되는 가혹한 환경으로 특징지어 진다. 위성체는 지상에서 발사되어 우주궤도에 진입한 순간부터 가혹한 우주환경에 노출되어 위성체의 주요부품에 기능장애가 발생하여 결국 임무의 실패로 이어지기도 한다. 따라서 위성체는 지상에서 우주환경시험을 거쳐 기능 및 작동상태를 점검해야 한다. 한국항공우주연구원에서는 ∮3.6m×L3m 규모의 열진공챔버라 불리는 우주환경 모사장비를 보유ㆍ운용 중이나, 정지궤도 위성과 같은 대형 위성체의 시험을 위해 2005년 완공을 목표로 ∮8m×L10m급의 대형열진공챔버를 국산화 제작하고 있다. 통상 열진공챔버는 크게 진공계와 열제어계로 구분되어 질 수 있는데, 특히 열제어계에서 극저온 모사장치는 LN2를 쉬라우드 내부에 순환시킴으로서 -196℃의 극저온을 모사하는 시스템을 말한다. 본 논문에서는 국산화 대형열진공챔버의 열제어계에 적용할 극저온 모사장치의 개발 방안에 대하여 연구하였다.