• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.335-335
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• 2011

Instability of a thin film attached to a compliant substrate often leads to emergence of exquisite wrinkle patterns with length scales that depend on the system geometry and applied stresses. However, the patterns that are created using the current techniques in polymer surface engineering, generally have low aspect ratio of undulation amplitude to wavelength, thus, limiting their application. Here, we present a novel and effective method that enables us to create wrinkles with a desired wavelength and high aspect ratio of amplitude over wavelength as large as to 2.5:1. First, we create buckle patterns with high aspect ratio of amplitude to wavelength by deposition of an amorphous carbon film on a surface of a soft polymer poly(dimethylsiloxane) (PDMS). Amorphous carbon films are used as a protective layer in structural systems and biomedical components, due to their low friction coefficient, strong wear resistance against, and high elastic modulus and hardness. The deposited carbon layer is generally under high residual compressive stresses (~1 GPa), making it susceptible to buckle delamination on a hard substrate (e.g. silicon or glass) and to wrinkle on a flexible or soft substrate. Then, we employ glancing angle deposition (GLAD) for deposition of a high aspect ratio patterns with amorphous carbon coating on a PDMS surface. Using this method, pattern amplitudes of several nm to submicron size can be achieved by varying the carbon deposition time, allowing us to harness patterned polymers substrates for variety of application. Specifically, we demonstrate a potential application of the high aspect wrinkles for changing the surface structures with low surface energy materials of amorphous carbon coatings, increasing the water wettability.

• 한국산업융합학회 논문집
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• 제25권6_1호
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• pp.941-952
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• 2022

In this study, additive manufacturing technology was applied to restore a planner miller that was unusable due to aging. The drive spur gear of the planner miller was inoperable due to many defects in the teeth. The shape of the defective gear teeth was restored by deposition of the defective teeth using the DED method. However, as the location of the deposition head and the location of the set origin became farther, the deposition shape was different from the modeling shape. Nonetheless, since the modeling of the deposition part was designed to be larger than the tooth shape of the original gear, it was possible to completely restore all gear teeth through post-processing. The arrangement interval of the flow lines of the deposition part was narrower than that of the substrate. The hardness of the substrate was 172 HV, and that of the deposition part was 345 HV, which was twice as high as that of the substrate.

• Nuclear Engineering and Technology
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• 제53권7호
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• pp.2277-2288
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• 2021

To regulate the safety protocols in nuclear facilities, radioactive aerosols have been extensively researched to understand their health impacts. However, most measured particle-size distributions remain at low resolutions, with the particle sizes ranging from nanometer to micrometer. This study combines the high-resolution detection of 500 size classes, ranging from 6 nm to 10 ㎛, for aerodynamic diameter distributions, with a regional lung deposition calculation. We applied the new approach to characterize particle-size distributions of aerosols generated during the plasma arc cutting of simulated non-radioactive steel alloy wastes. The high-resolution measured data were used to calculate the deposition ratios of the aerosols in different lung regions. The deposition ratios in the alveolar sacs contained the dominant particle sizes ranging from 0.01 to 0.1 ㎛. We determined the distribution of various metals using different vapor pressures of the alloying components and analyzed the uncertainties of lung deposition calculations using the low-resolution aerodynamic diameter data simultaneously. In high-resolution data, the changes in aerosols that can penetrate the blood system were better captured, correcting their potential risks by a maximum of 42%. The combined calculations can aid the enhancement of high-resolution measuring equipment to effectively manage radiation safety in nuclear facilities.

• 한국재료학회지
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• 제23권12호
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• pp.702-707
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• 2013

High-quality ${\beta}$-silicon carbide (SiC) coatings are expected to prevent the oxidation degradation of carbon fibers in carbon fiber/silicon carbide (C/SiC) composites at high temperature. Uniform and dense ${\beta}$-SiC coatings were deposited on carbon fibers by low-pressure chemical vapor deposition (LP-CVD) using silane ($SiH_4$) and acetylene ($C_2H_2$) as source gases which were carried by hydrogen gas. SiC coating layers with nanometer scale microstructures were obtained by optimization of the processing parameters considering deposition mechanisms. The thickness and morphology of ${\beta}$-SiC coatings can be controlled by adjustment of the amount of source gas flow, the mean velocity of the gas flow, and deposition time. XRD and FE-SEM analyses showed that dense and crack-free ${\beta}$-SiC coating layers are crystallized in ${\beta}$-SiC structure with a thickness of around 2 micrometers depending on the processing parameters. The fine and dense microstructures with micrometer level thickness of the SiC coating layers are anticipated to effectively protect carbon fibers against the oxidation at high-temperatures.

• Transactions on Electrical and Electronic Materials
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• 제12권4호
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• pp.156-159
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• 2011

SiNx:H films have been widely used for anti-reflection coatings and passivation for crystalline silicon solar cells. In this study, SiNx:H films were deposited using high frequency (13.56 MHz) direct plasma enhanced chemical vapor deposition, and the optical and passivation properties were investigated. The radio frequency power, the spacing between the showerhead and wafer, the $NH_3/SiH_4$ ratio, the total gas flow, and the $N_2$ gas flow were changed over certain ranges for the film deposition. The thickness uniformity, the refractive index, and the minority carrier lifetime were then measured in order to study the properties of the film. The optimal deposition conditions for application to crystalline Si solar cells are determined from the results of this study.

• 한국수자원학회논문집
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• 제56권7호
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• pp.451-460
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• 2023

본 연구에서는 박리위험도와 퇴적위험도로 분류하여 적수와 탁수발생 위험도를 분석하였다. 먼저, 적수 및 탁수를 발생시키는 위험 인자들을 도출 하였고 계절별 수도사용량을 고려하여 수리해석을 진행하였다. 적용 지역은 청주시로 13개 동에 걸쳐서 위험도 분석을 진행하였고 퇴적위험도가 높은 지역과 박리위험도가 높은 지역을 선정할 수 있었다. 박리와 퇴적위험도가 모두 높다는 것은 수질문제를 일으킬 가능성이 매우 높은 지역으로 판단할 수 있다. 퇴적위험도와 박리위험도가 가장 높은 지역은 내덕1동과 율량동 구시가지로 경과년수는 30년 이상으로 청주시에서 가장 오래된 지역 이다. 퇴직위험도와 박리위험도 분석을 통해 상수관망의 유지관리 기능을 강화하여 시민들에게 안전한 물 공급을 통해 수돗물에 대한 신뢰도를 높일 수 있을 것이다.

• Journal of Korean Society for Atmospheric Environment
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• 제18권E1호
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• pp.1-12
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• 2002

One technique for determining dry acid deposition fluxes involves measurement of time - averaged ambient concentrations of dry acid deposition species using filter packs (FP) coupled with estimates of mean deposition velocities for the exposure period. A critical problem associated with filter pack data comparisons between various field sampling networks is the use of diverse sampling flow rates and duration protocols. Field experiments were conducted to evaluate the effects of varying sampling flow rates, from 1.5 to 10 standard liters per minute, on total nitrate and sulfate measurements of specific dry acid deposition species . Collocated FP samplers were used to determine sampling and analysis data reproducibility and representativeness . Ambient air samples were simultaneously collected using groups of filter packs operated at various flow rates over identical 7 day periods. The species measured were sulfur dioxide, particulate sulfate , nitric acid and particulate nitrate. Statistical results (ANOVA; alpha level 5%) showed that neither the low nor high sampling flow rates caused a significant difference in the measurements of total sulfate and adjusted total nitrate (ATN) . However, it was concluded that for high flow rate sampling measurements, total nitrate (TN) could be affected during extended sampling durations because of potential nitric acid overloading and breakthrough. Although the previous workers (Costello, 1990; Quillian, 1990) used much higher sampling flow rates (~ 17 sLpm) than employed here, it was assumed that for a high loading (> 50$\mu\textrm{g}$ HNO$_3$) of nitric acid on the Nylon filters, a significant fraction (~10%) of nitric acid could pass through the Nylon filters and be collected on the carbonate impregnated filters. It was concluded that even at the highest sampling flow rate employed (10 sLpm) at the Cary Forest site, nitric acid breakthrough was less than 10% of the total HNO$_3$ collected. However, for a heavily polluted urban airshed or with longer sampling times , higher filter loadings could result in substantial nitric acid breakthrough and HNO$_3$concentrations would be underestimated.

• E2M - 전기 전자와 첨단 소재
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• 제8권3호
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• pp.285-290
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• 1995

High quality $Y_{1}$Ba$_{2}$Cu$_{3}$$O_{7-x}$ thin films have been fabricated by pulsed Nd:YAG laser deposition using an unusual 'off-axis' target-substrate geometry. Various properties of superconducting $Y_{1}$Ba$_{2}$Cu$_{3}$$O_{7-x}$ thin films have been studied systematically as a function of oxygen pressure during the deposition, in both 'on-axis' and the unusual 'off-axis' target substrate geometries. In the 'off-axis' geometry, one can completely eliminate the so-called 'laser droplets' from the film surface and thus obtain smooth high quality films. It is found that films with optimum structural and electrical properties are obtained at a lower oxygen pressure range during the 'off-axis' deposition when compared with that required in the 'on-axis' deposition geometry.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권12호
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• pp.565-569
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• 2006

Plasma enhanced chemical vapor deposition(PECVD) is a well established technique for the deposition of hydrogenated film of silicon nitride (SiNx:H), which is commonly used as an antireflection coating as well as passivating layer in crystalline silicon solar cell. PECVD-SiNx:H films were investigated by varying the deposition and annealing conditions to optimize for the application in silicon solar cells. By varying the gas ratio (ammonia to silane), the silicon nitride films of refractive indices 1.85 - 2.45 were obtained. The film deposited at $450^{\circ}C$ showed the best carrier lifetime through the film deposition rate was not encouraging. The film deposited with the gas ratio of 0.57 showed the best carrier lifetime after annealing at a temperature of $800^{\circ}C$. The single crystalline silicon solar cells fabricated in conventional industrial production line applying the optimized film deposition and annealing conditions on large area substrate of size $125mm{\times}125mm$ (pseudo square) was found to have the conversion efficiencies as high as 17.05 %. Low cost and high efficiency silicon solar cells fabrication sequence has also been explained in this paper.

• 한국전기전자재료학회논문지
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• 제36권1호
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• pp.49-55
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• 2023

The deposition of indium zinc oxide (IZO) thin films was carried out on substrate at room temperature by RF magnetron sputtering. The effects of substrate temperature, RF power and deposition pressure were investigated with respect to physical and optical properties of films such as deposition rate, electrical properties, structure, and transmittance. As the RF power increases, the resistivity gradually decreases, and the transmittance slightly decreases. For the variation of deposition pressure, the resistivity greatly increases, and the transmittance is decreased with increasing deposition pressure. As a result, it was demonstrated that an IZO film with the resistivity of 3.89 × 10^-4 Ω∙cm, the hole mobility of 51.28 cm²/Vs, and the light transmittance of 86.89% in the visible spectrum at room temperature can be prepared without post-deposition annealing.