Transactions on Electrical and Electronic Materials

  • 제12권4호
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  • Pages.156-159
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  • 2011
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  • 1229-7607(pISSN)
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  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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A Study on High Frequency-Plasma Enhanced Chemical Vapor Deposition Silicon Nitride Films for Crystalline Silicon Solar Cells

  • Li, Zhen-Hua (Department of Electrical and Electronic Engineering, Korea University of Technology and Education) ;
  • Roh, Si-Cheol (Department of Electrical and Electronic Engineering, Korea University of Technology and Education) ;
  • Ryu, Dong-Yeol (Department of Electrical and Electronic Engineering, Korea University of Technology and Education) ;
  • Choi, Jeong-Ho (Department of Electrical and Electronic Engineering, Korea University of Technology and Education) ;
  • Seo, Hwa-Il (Department of Electrical and Electronic Engineering, Korea University of Technology and Education) ;
  • Kim, Yeong-Cheol (Department of Materials Engineering, Korea University of Technology and Education)
  • 투고 : 2011.03.25
  • 심사 : 2011.06.29
  • 발행 : 2011.08.25
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초록

SiNx:H films have been widely used for anti-reflection coatings and passivation for crystalline silicon solar cells. In this study, SiNx:H films were deposited using high frequency (13.56 MHz) direct plasma enhanced chemical vapor deposition, and the optical and passivation properties were investigated. The radio frequency power, the spacing between the showerhead and wafer, the $NH_3/SiH_4$ ratio, the total gas flow, and the $N_2$ gas flow were changed over certain ranges for the film deposition. The thickness uniformity, the refractive index, and the minority carrier lifetime were then measured in order to study the properties of the film. The optimal deposition conditions for application to crystalline Si solar cells are determined from the results of this study.

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참고문헌

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피인용 문헌

  1. Optimization of Photon and Electron Collection Efficiencies in Silicon Solar Microcells for Use in Concentration-Based Photovoltaic Systems vol.2, pp.11, 2017, https://doi.org/10.1002/admt.201700169