• 한국전기전자재료학회논문지
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• 제17권7호
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• pp.793-796
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• 2004

In order to improve c-axis crystalline orientation and high perpendicular coercivity of deposited ${Co}_77{Cr}_20{Ta}_3$perpendicualr recording layer, Two step method was investigated using a Facing Targets Sputtering System(FTS). The ${\Delta\theta}_50$ of ${Co}_77{Cr}_20{Ta}_3$recording layer deposited on seedlayer prepared at Room Temperature was as low as $5^\circ$, while that of the recording layer without seedlayer was about 11$^{\circ}$. The Two-Step method using ${Co}_77{Cr}_20{Ta}_3$seedlayer prepared at Room Temperature was shown to be very effective in controling the c-axis orientation of ${Co}_77{Cr}_20{Ta}_3$ recording layer with thin thickness.

• 대한산업공학회지
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• 제21권1호
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• pp.67-84
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• 1995

Five-axis NC machining is advanced machining technology by which highly geometrically complicated parts can be machined accurately with high machinability. In this paper, we investigate the problems of determining the machinability and part setup orientation for a given surface models. We first develop kinematic model of the five-axis machines based on the axis configuration, then develop algorithms for determining the feasibility of machining by one setup(machinability) and the part orientation for the C,A and A,B type configuration. The machinability is determined by computationally efficient procedure for finding the intersection between the feasible area on the sphere and the numerical map called binary spherical map(BSM), and the part setup is chosen such that the rotational range is minimized among the feasible configurations. The developed algorithms are tested by numerical simulations, convincing they can be readily implemented on the CAD/CAM system as an automated process planner giving the efficient machine type and setup for NC machining.

• 한국전기전자재료학회논문지
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• 제17권9호
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• pp.979-982
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• 2004

The ZnO thin films were prepared by the FTS (facing target sputtering) system, which enables to provide high density plasma and a high deposition rate at a low working gas pressure. We introduced the AZO thin film in order to improve the crystallographic properties of ZnO thin film because of the AZO(ZnO:Al) thin film has an equal crystal structure to the ZnO thin film. ZnO/AZO thin films were deposited at a different oxygen gas flow ratio, R.T. 2mTorr working pressure and a 0.8A sputtering current. The film thickness and c-axis preferred orientation of ZnO/AZO/glass thin films were measured by ${\alpha}$-step and an x-ray diffraction (XRD) instrument. In the results, we could prepare the ZnO thin film with c-axis preferred orientation of about 6$^{\circ}$ on substrate temperature R.T. at O$_2$ gas flo rate 0.5.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2002년도 금형가공 심포지엄
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• pp.53-60
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• 2002

Recently, the development of aerospace and automobile industries brought new technological challenges, related to the growing complexity of products and new geometry models. High speed machining using 5-Axis milling machine is widely used for 3D sculptured surface parts. 5-axis milling of turbine blade generates the vibration, deflection and twisting caused from thin and cantilever shape. So, the surface roughness and the waviness of workpiece are not good. In this paper, The effects of cutter orientation and lead/tilt angle in 5-Axis high speed ball end-milling of turbine blade were investigated to improve the geometric accuracy and surface integrity. The experiments were performed at lead/tilt angle $15^{\circ}$ of workpiece with four cutter directions such as horizontal outward, horizontal inward, vertical outward, and vertical inward. Workpiece deflection, surface roughness and machined surface were measured with various cutter orientations such as cutting direction, and lead/tilt angle. The results show that when 5-axis machining of turbine blade, the best cutting strategy is horizontal inward direction with tilt angle. The results show that when 5-axis machining of turbine blade, the best cutting strategy is horizontal inward direction with tilt angle.

• 한국콘텐츠학회:학술대회논문집
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• 한국콘텐츠학회 2009년도 춘계 종합학술대회 논문집
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• pp.807-809
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• 2009

압전성을 갖는 산화아연 박막을 스퍼터링을 이용하여 실리콘 기판위에 증착하였고 여러 증착 공정변수들이 물성에 미치는 영향과 박막의 구조적 특성 및 전파경계조건을 고찰하였다. 특히, 평탄한 표면을 갖는 압전 박막을 제조하여 전파 특성에 우수한 증착조건을 제시하고 탄성표면파의 전파및 경계조건을 분석한다. 박막의 구조적 특성 분석을 위하여 여러가지 증착조건 중 아르곤과 산소의 가스비율 과 기판온도가 박막의 제조에 미치는 특성을 분석하였다. 스퍼터링 가스인 산소양이 50%이상으로 증가할수록 박막의 표면 거칠기가 나빠지는 특성을 보였다. 비저항과 표면형상은 유입되는 산소에 큰 영향을 받는다는 것을 알 수 있었다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 1999년도 추계학술발표회 초록집
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• pp.83-83
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• 1999

• 한국초전도ㆍ저온공학회논문지
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• 제15권2호
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• pp.9-11
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• 2013

We have investigated the effect of thickness of the MgB2 film on the grain growth direction as well as on their superconducting properties. $MgB_2$ films of various thicknesses were fabricated on c-cut $Al_2O_3$ substrates at a temperature of $540^{\circ}C$ by using hybrid physical-chemical vapor deposition (HPCVD) technique. The superconducting transition temperature ($T_c$) was found to increase with increase in the thickness of the $MgB_2$ film. X-ray diffraction analysis revealed that the orientation of grains changed from c-axis to a-axis upon increasing the thickness of the $MgB_2$ film from 0.6 to 2.0 ${\mu}m$. $MgB_2$ grains of various orientations were observed in the microstructures of the films examined by scanning electron microscopy. It is observed that at high magnetic fields the 2.0-${\mu}m$-thick film exhibit considerably larger critical current density ($J_c$) as compared to 0.6-${\mu}m$-thick film. The results are discussed in terms of an intrinsic-pinning in $MgB_2$ similarly as intrinsic-pinning occurring in high-Tc cuprate superconductors with layered structure.

• 멤브레인
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• 제28권5호
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• pp.340-350
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• 2018

본 연구에서는 바늘형 종결정 코팅 양을 조절함으로써 결정학적으로 b-축 그리고 c-축으로 배향된 모데나이트(MOR) 제올라이트 분리막을 제조하고 결정학적 배향이 투과증발 에탄올 탈수 거동에 미치는 영향을 고찰하였다. c-축으로 배향된 종결정의 코팅 양이 증가할수록 b-축에서 c-축으로 배향된 분리막이 얻어졌고 이는 진화론적 성장으로 설명되었다. b-축 방향으로 배향된 분리막의 경우 1000 이상의 높은 선택도와 $0.2kg/m^2h$의 총 투과도를 나타내었으며 c-축 배향된 분리막 보다 우수한 분리성능을 나타내었다. 이는 물의 운동역학적 직경이 b-축 방향으로 단일 존재하는 8R 기공채널의 직경에 비하여 작기 때문에 물의 이동이 방해되지 않는 반면 에탄올은 상대적으로 방해받기 때문으로 설명되었다. 따라서 본 연구로부터 바늘형 종결정 코팅 양을 조절함으로써 모데나이트 분리층의 결정학적 배향을 조절할 수 있었고, b-축으로 배향된 모데나이트 분리막이 보다 우수한 투과증발 에탄올 탈수 거동을 보임을 확인할 수 있었다.

• 한국표면공학회지
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• 제24권2호
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• pp.96-102
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• 1991

Co-Ni-P alloys were electrodeposited from NH4Cl-sulfate-hypophosphite baths under various plating conditions. Their effective anisotropic magnetic field which is one of the important properties for magnetic recording materials were investigated as the function of alloy compositions and c-axis orientation. The preferred orientation and the contents of Ni and P depend on the pH of solutions and also on the current density. It was found that the alloy films deposited from the solutions of pH4 at high current density had c-axis orientation parallel to the growth direction and the effective anisotropic fields sufficient for perpendicular magnetic recording application.

• 반도체디스플레이기술학회지
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• 제5권1호
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• pp.13-16
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• 2006

AIN thin films were prepared on amorphous glass and $SiO_2(1{\mu}m)/Si(100)$ substrate by the facing targets sputtering (FTS) apparatus, which can provide high density plasma, a high deposition rate at a low working gas pressure. The AIN thin films were deposited at a different nitrogen gas flow rate ($1.0{\sim}0.3$) and other sputtering parameters were fixed such as sputtering power of 200w, working pressures of 1mTorr and AIN thin film thickness of 800 nm, respectively. The thickness and crystallographic characteristics of AIN thin films as a function of $N_2$ gas flow rate $[N_2/(N_2+Ar)]$ were measured by $\alpha$-step and an X-ray diffraction (XRD) instrument. And the c-axis preferred orientations were evaluated by rocking curve. In the results, we could prepared the AIN thin film with c-axis preferred orientation of about $5^{\circ}$ on substrate temperature R.T. at nitrogen gas flow rate 0.7.