Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 1999.10a
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- Pages.83-83
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- 1999
C-axis Orientation of ZnAO Thin Films Prepared by High speed and Low temperature Sputtering Method
고속.저온 스퍼터링법으로 제작된 ZnO 박막의 c-축 배양성
Abstract
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