• 제목/요약/키워드: High Resistivity

검색결과 1,273건 처리시간 0.025초

스퍼터링법에 의한 Cu막 형성 기술 (Fabrication of Copper Films by RF Magnetron Sputtering)

  • 김현식;송재성;정순종;오영우
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1996년도 하계학술대회 논문집 C
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    • pp.1648-1650
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    • 1996
  • In present paper, Cu films $4{\mu}m$, thick were fabricated by dual deposition methods using RF magnetron sputtering on Si wafer. The dependence of the electrical resistivity, adherence, and reflection in Cu films [$Cu_{4-x}$(low resistivity) / $Cu_x$(high adherence) / Si- wafer] on the x thickness have been investigated. Cu films of $4{\mu}m$ thickness formed with dual deposition methods had the low electrical resistivity of about $2.6{\mu}{\Omega}{\cdot}cm$ and high adherence of about 700g/cm. In conclusion, it is possible for these films to be used for micro-devices.

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154KV 변전소의 접지저항 저감대책 검토사례 (A Case of Reducing Grounding Resistance of 154KV Substation)

  • 기현찬;최종기;정길조;온대현
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.2064-2067
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    • 2000
  • In our country, most region is composed of mountains and people have recently been displeased with the construction of the substations in their vicinity so the substations newly built are mainly constructed with GIS system in the small area that has high soil resistivity near mountain. Therefore, nowadays the design of substation grounding system has been difficult, and the additional considerations are needed. UC substation was also difficult to design the grounding system because of so small substation area and high soil resistivity. This paper shows the examples of reducing the grounding system resistance reasonably by using several ways. Designing the ground grid electrode in the access road, deep electric earth probe, changing the substation soil with the law level resistivity soil. This report deals with the computer simulation of the grounding system resistance about the ways illustrated above.

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스핀 스프레이법으로 PC 기판에 제작한 산화아연 박막의 특성 (Property of Spin-sprayed ZnO Film on PC Substrate)

  • 홍정수;;;박용서;김경환
    • 반도체디스플레이기술학회지
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    • 제17권3호
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    • pp.27-30
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    • 2018
  • In this study, ZnO film was deposited on polycarbonate substrate by spin-spray method at low substrate temperature of $85^{\circ}C$. Surface morphology of ZnO films was changed by adding citrate from rod to dense structure. As-deposited ZnO film indicated high transmittance above 80%. In case of the resistivity, as-deposited ZnO film had high resistivity due to the existence of organic substance in the film. However, organic substance was removed and resistivity was decreased to $3.9{\times}10^{-2}{\Omega}{\cdot}cm$, after UV irradiation.

콘크리트내 염소이온량이 전기저항에 미치는 영향 (Influence of Chloride Content of on Electrical Resistivity in Concrete)

  • 윤인석;남진원
    • 한국구조물진단유지관리공학회 논문집
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    • 제18권6호
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    • pp.90-96
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    • 2014
  • 콘크리트의 전기저항은 철근부식 개시 이전인 잠복기와 철근부식되는 진전기 두과정과 유관된다. 염소이온에 노출된 콘크리트 구조물의 전기저항은 초기 부식율의 위험도를 표현할 수 있는데, 낮은 전기저항은 빠른 염소이온 침투와 높은 부식속도를 의미하기 때문이다. 콘크리트의 전기저항은 인가된 전압과 전류간의 비율인 전기저항으로 표현된다. 이전의 연구에 의하면 콘크리트의 전기저항은 콘크리트내 수분량, 미세구조 및 탄산화 등에 크게 의존하였다. 습윤량과 전기저항의 관계를 다룬 연구가 적지만 존재하는 반면, 염소이온이 전기저항에 미치는 연구를 행한 연구는 매우 드물다. 본 연구의 목적은 염소이온이 콘크리트의 전기저항에 미치는 영향을 고찰하는 것이다. 실험결과에 의하면 염소이온량은 전기저항을 떨어뜨리는 것으로 나타났으며 이는 선형의 관계가 성립되었다. 초기 양생 50일 이전까지 전기저항의 감소추세는 뚜렷하였으며, 이후로는 염소이온량과 상관없이 일정하였다. 결과적으로 본 연구는 염소이온량을 함유한 콘크리트의 전기저항을 표현하는데 결정적인 방법을 제안하였다.

매트릭스 강도, 섬유 형식 및 보강량에 강섬유 보강 시멘트 복합재료의 인발시 전기저항에 미치는 영향 (Effects of Matrix Strength, Fiber Type, and Fiber Content on the Electrical Resistivity of Steel-Fiber-Reinforced Cement Composites During Fiber Pullout)

  • ;김동주
    • 대한토목학회논문집
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    • 제39권6호
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    • pp.675-689
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    • 2019
  • 자가응력 및 자가손상 감지능력을 모두 가지는 스마트 콘크리트의 개발은 아직까지 손상 감지 능력에 대한 원인 규명이 명확하지 않아 어려운 현실이다. 따라서, 본 연구에서는 매트릭스 강도, 섬유 형식 및 보강량이 강섬유 보강 시멘트 복합재료의 인발시 전기저항에 미치는 영향을 평가하였다. 실험으로부터 섬유와 매트릭스 사이 계면에서의 탈착으로 전기저항률이 감소한다는 사실을 알 수 있었다. 섬유와 매트릭스 사이 계면 부착강도가 높을수록 더 큰 전기저항률의 감소를 유발하였다. 따라서, 고강도 매트릭스, 황동 도금된 강섬유 그리고 변형된 강섬유를 사용시 높은 계면부착강도를 유발하고 그 결과 더 큰 전기저항률 감소를 유발하였다.

Electrical Properties and Microstructures in Ti Films Deposited by TFT dc Sputtering

  • Han, Chang-Suk;Jeon, Seung-Jin
    • 한국재료학회지
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    • 제26권4호
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    • pp.207-211
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    • 2016
  • Ti films were deposited on glass substrates under various preparation conditions in a chamber of two-facing-target type dc sputtering; after deposition, the electric resistivity values were measured using a conventional four-probe method. Crystallographic orientations and microstructures, including the texture and columnar structure, were also investigated for the Ti films. The morphological features, including the columnar structures and surface roughness, are well explained on the basis of Thornton's zone model. The electric resistivity and the thermal coefficient of the resistivity vary with the sputtering gas pressure. The minimum value of resistivity was around 0.4 Pa for both the $0.5{\mu}m$ and $3.0{\mu}m$ thick films; the apparent tendencies are almost the same for the two films, with a small difference in resistivity because of the different film thicknesses. The films deposited at high gas pressures show higher resistivities. The maximum of TCR is also around 0.4 Pa, which is the same as that obtained from the relationship between the resistivity and the gas pressure. The lattice spacing also decreases with increasing sputtering gas pressure for both the $0.5{\mu}m$ and $3.0{\mu}m$ thick films. Because they are strongly related to the sputtering gas pressures for Ti films that have a crystallographic anisotropy that is different from cubic symmetry, these changes are well explained on the basis of the film microstructures. It is shown that resistivity measurement can serve as a promising monitor for microstructures in sputtered Ti films.

필댐 안정성 평가를 위한 물리탐사와 SPT 자료의 분석 (Analysis of Geophysical and Geotechnical SPT Data for the Safety Evaluation of Fill Dam)

  • 오석훈;선창국
    • 지구물리
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    • 제7권3호
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    • pp.171-183
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    • 2004
  • 중심코아형 필댐(Fill Dam)의 침투수에 대한 안정성 평가에 널리 적용되고 있는 전기비저항 탐사 해석의 이해를 증진하기 위해 시추과정에서 얻어진 표준관입시험 결과를 비저항 분포자료와 비교 분석하였다 그 결과 일반적으로 비저항 값이 낮은 곳에서 표준관입시험의 값도 낮은 경향을 보이고 있었으나 비저항이 높은 곳에서는 값의 분포가 동일한 경향성을 보이지 않거나 오히려 낮게 나타나는 구역도 관찰되었다 또한 일부 구역에서 비저항이 낮은 경우 에 값이 높게 나타나는 경우도 있었는데 이는 전기비저항 조사의 특성상 직하부의 효과뿐만 아니라 사면부의 효과가 포함되어 나타난 것으로 보인다 따라서 비저항이 단순히 낮다고 해서 코아부의 지수 능력에 문제가 있다고 판단하기는 매우 어려우며 오히려 비저항이 높은 지점에서 파이핑에 의한 과도 침투수를 유발할 수 있는 가능성을 확인하였다 이와 같은 비저항 분포 해석의 불확실성을 감소시키기 위해서는 동반 탐사를 통해서 이상대역을 확인하는 과정이 필요하며 장기간의 모니터링과 수위 변화에 따른 지속적인 조사가 필요하다 또한 비저항 콘(resistivity cone)과 같은 장비를 이용하여 현장 조건을 유지한 상태에서의 하부 비저항 구조를 이해할 필요가 있다.

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STIFFNESS AND POROSITY EVALUATION USING FIELD VELOCITY RESISTIVITY PROBE

  • Lee, Jong-Sub;Yoon, Hyung-Koo;Choi, Yong-Kyu
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2010년도 추계 학술발표회 3차
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    • pp.24-30
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    • 2010
  • The void ratio and elastic moduli are design parameters used in geotechnical engineering to understand soil behavior. Elastic and electromagnetic waves have been used to evaluate the various soil characteristics due to high resolution. The objective of this study is to evaluate the void ratio and elastic moduli based on elastic wave velocities and electrical resistivity. The Field Velocity Resistivity Probe (FVRP) is developed to obtain the elastic and electromagnetic wave profiles of soil during penetration. The Piezoelectric Disk Elements (PDE) and Bender Elements (BE) are used as transducers for measuring the elastic wave velocities such as compressional and shear wave velocities. The Electrical Resistivity Probe (ERP) is also installed for capturing the electrical resistivity profile. The application test is carried out on the southern coast of the Korean peninsula. The field tests are performed at a depth of 6~20 m, at 10 cm intervals for measuring elastic wave velocities and at 0.5cm intervals for measuring electrical resistivity. The elastic moduli such as constraint and shear moduli are calculated by using measured elastic wave velocities. The void ratios are also evaluated based on the elastic wave velocities and the electrical resistivity. Furthermore, the converted void ratios by using FVRP are compared with the volumetric void ratio obtained by a standard consolidation test. The comparison shows that the void ratios based on the FVPR match the volume based void ratio well. This study suggests that the FVRP may be a useful device to effectively determine the elastic moduli and void ratio in the field.

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$RuO_2$계 후막저항체의 미세구조와 전기적성질 (Microstructure and Electrical Properties of $RuO_2$ System Thick Film Resistors)

  • 구본급;김호기
    • 한국세라믹학회지
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    • 제27권3호
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    • pp.337-344
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    • 1990
  • As a function of sintering temperature and time, the electrical properties of ruthenium based thick film resistors were investigated with microstructure. The variatio of resistivity and TCR(temperature coefficient of resistance)trends of sintered speciman at various sintering temperature were different low resistivity paste(Du Pont 1721) from high one(Du Pont 1741). These phenomena are deeply relative to microstructure of sintered film. With increasing the sintering temperature for 1721 system, the electrical sheet resistivity decreased, but again gradually increased above 80$0^{\circ}C$. And TCR trends in 1721 system are all positive. On the other hand the electrical sheet resistivity of 1741 resistor system decreased with sintering temperature. And TCR trends variable according to sintering temperature. TCR of speciman sintered at $700^{\circ}C$ was negative value, and TCR of 80$0^{\circ}C$ sintered speciman coexisted negative and positive value. But in case of speciman sintered at 90$0^{\circ}C$, TCR was positive value. As results of this fact, it was well known that the charge carrier contributied to electrical conduction in 1741 resistor system varied with sintering temperature.

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대지저항률에 따른 접지임피던스의 주파수 의존성 (Frequency Dependent Grounding Impedance As a Function of Soil Resistivity)

  • 배성배;최종혁;박건훈;이복희
    • 한국조명전기설비학회:학술대회논문집
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    • 한국조명전기설비학회 2008년도 춘계학술대회 논문집
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    • pp.57-60
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    • 2008
  • A design criterion of grounding systems is commonly based on low frequency resistance in Korea. When lightning surges which have high frequency components are injected into the grounding system, the grounding impedance is greatly different from the static grounding resistance. This paper presents the grounding adimittance and phase on the frequency range from 100 [Hz] to 15 [MHz] using water tank simulating the grounding system in different water resistivities. As a result, capacitive effect is dominant over the frequency of 100 [kHz] at the water resistivity of 1,000 [$\Omega$ m]. On the other hand, the inductive characteristics appear at the low water resistivity. Consequently, dependence of grounding impedances on the frequency of injected current is strongly related to resistivity.

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