• 제목/요약/키워드: High Resistivity

검색결과 1,274건 처리시간 0.027초

손실층 Sub-mount를 갖는 CPW MMIC용 실리콘 MEMS 패키지 (Si-MEMS package Having a Lossy Sub-mount for CPW MMICs)

  • 송요탁;이해영
    • 한국전자파학회논문지
    • /
    • 제15권3호
    • /
    • pp.271-277
    • /
    • 2004
  • 초고주파 및 밀리미터파 통신 시스템의 집적회로 및 실장 기술로서 CPW기반의 전송선로를 갖는 MMIC 개발이 크게 증가하고 있으나, 실장시 패키지에서 발생되는 기생공진 현상으로 인해 그 성능이 크게 저하될 수 있다. 이런 기생 공진 현상을 억제시키기 위하여 도핑된 lossy 실리콘 웨이퍼를 칩 캐리어로 사용하고, HRS wafer를 사용하여 표면 및 벌크 MEMS 공정이 가능한 실리콘 MEMS 패키지가 해석적으로 제안되었다. 제안된 구조를 제작하여 세 가지의 칩 캐리어(conductor-back metal, 15 Ω$.$cm lossy Si, 15 ㏀$.$cm HRS)위에서 측정하여 실리콘 MEMS 패키지의 특성을 확인하였다. 제안된 실리콘 MEMS 패키지는 15 Ω$.$cm lossy 실리콘 칩 캐리어를 사용하여, 기생 공진 현상을 효과적으로 억제시킬 수 있었다. 전체 패키지에서 중앙의 GaAs CPW 패턴을 de-embedding하여 순수한 CPW MMIC 용의 실리콘 MEMS 패키지는 40 ㎓에서 삽입 손실은 - 2.0 ㏈이며, 전력 손실은 - 7.5 ㏈의 결과를 얻었다.

전도성(電導性) $SiC-ZrB_2$ 복합체(複合體)의 특성(特性) (Properties of Electro-Conductive $SiC-ZrB_2$ Composites)

  • 신용덕;박용갑
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1996년도 하계학술대회 논문집 C
    • /
    • pp.1512-1515
    • /
    • 1996
  • Dense $SiC-ZrB_2$ electro-conductive ceramic composites were obtained by hot pressing for high temperature structural application. The influences of the $ZrB_2$ additions an the mechanical and electrical properties of $SiC-ZrB_2$ composites were investigated. Samples were prepared by adding 15, 30, 45 vol.% $ZrB_2$ particles as a second phase to a SiC matrix. Sintering of monolithic SiC and $SiC-ZrB_2$ composites were achieved by hot pressing under a $10^{-4}$ torr vacuum atmosphere from 1000 to $2000^{\circ}C$ with a pressure of 30 MPa and held for 60 minutes at $2000^{\circ}C$. SiC and $SiC-ZrB_2$ samples obtained by hot pressing were fully dense with the relative densities over 99%. Flexural strength and fracture toughness of the samples were improved with the $ZrB_2$ contents. In the case of SiC sample containing 30vol.% $ZrB_2$, the flexural strength and fracture toughness showed 45% and 60% increase, respectively compared to those of monolithic SiC sample. The electrical resistivities of $SiC-ZrB_2$ composites were measured utilizing the four-point probe method and they decreased significantly with Increasing $ZrB_2$ contents. The resistivity of SiC-30vol.% $ZrB_2$ showed $6.50{\times}10^{-4}{\Omega}{\cdot}cm$.

  • PDF

교류가 유도되는 매설배관에서의 교류 부식속도 측정에 관한 연구 (Corrosion Rate of Buried Pipeline by Induced Alternating Current)

  • 송홍석;김영근;이성민;고영태;박용수
    • 한국가스학회지
    • /
    • 제5권3호
    • /
    • pp.63-72
    • /
    • 2001
  • 천연가스 공급용 고압 지하 매설배관에 교류가 유도될 때 쿠폰과 전기저항형 박막센서를 이용하여 교류에 의한 부식속도를 평가하고 주요한 인자를 규명하고자 하였다. 전국에 걸쳐 조사된 교류전압 측정결과를 바탕으로 쿠폰과 전기저항형 박막센서를 설치하고, 주요인자를 고찰하기 위하여 다양한 인자들 (교류전압, 교류전류, 토양 비저항, 주파수, 방식전위)을 정기적으로 기록하였다. 황산동 전극기준 -850mV의 방식전위를 충분히 만족하는 상황에서도 교류에 의한 부식이 진행하였으며, 교류에 의한 부식속도는 교류전압과는 관계없이 교류전류밀도와 주파수에 의존하는 것으로 나타났다. 교류에 의한 부식속도는 유효교류전류밀도에 따라 직선적으로 증가하였으며, 쿠폰에 의한 평가결과 직선의 기울기는 0.619, 전기저항형 센서에 의한 직선의 기울기는 0.885로 나타났다.

  • PDF

The Investigation on Thermal Aging Characteristics of Oil-Paper Insulation in Bushing

  • Liao, Rui-jin;Hu, En-de;Yang, Li-jun;Xu, Zuo-ming
    • Journal of Electrical Engineering and Technology
    • /
    • 제10권3호
    • /
    • pp.1114-1123
    • /
    • 2015
  • Bushing is the key link to connect outer and inner insulating systems and also the essential electric accessory in electric power system, especially in the high voltage engineering (AC 1000kV, DC 800kV). This paper presented the experimental research of thermal aging characteristic of oil-paper insulation used in bushing. A thermally accelerated aging experiment at 90℃ was performed. The bushing models containing five layers of paper were sealed into the aging vessels and further aged for 250 days. Then several important parameters associated with the aging were observed and evaluated. The results showed that the degree of polymerization (DP) of papers gradually decreased. The DP values of outermost layer and middle layer fit well into the second-order kinematic model and first-order kinematic model, respectively. Less deterioration speed of the inter-layer paper than outer layer was confirmed by the variation of DP. Hydrolysis was considered as the main cause to this phenomenon. In addition, the logarithm of the furfural concentrations in insulation oil was found to have good linear relationship with DP of papers. Interestingly, when the aging time is about 250 days and DP is 419, the aging process reaches an inflection point at which the DP approaches the leveling off degree of polymerization (LODP) value. Both tanδ and acid number of oils increased, while surface and volume resistivity of papers decreased. The obtained results demonstrated that thermal aging and moisture absorbed in papers brought great influence to the degradation of insulating paper, leading to rapid decrease of DP and increase of the tanδ. Thus, the bushing should be avoided from damp and real-time monitoring to the variation of tanδ and DP values of paper is an effective way to evaluate the insulation status of bushing.

용융 (60 몰% $AlCl_3$-40 몰% NaCl) 염 속에서의 알루미늄전극의 반응속도론적 연구 (A Kinetic Study of the Aluminum Electrode in Molten 60 Mole Percent $AlCl_3$-40 Mole Percent NaCl at 453${\circ}K$)

  • G. F. Uhlig;T. N. Andersen;S. Johns;H. Eyring
    • 대한화학회지
    • /
    • 제18권6호
    • /
    • pp.400-407
    • /
    • 1974
  • 60몰%$AlCl_3$-40몰% NaCl의 용융염($453^{\circ}$<\TEX>K)속에든 알루미늄 전극에 대하여 전류-전압 편극곡선을 얻었다. 50mA/$CM^2$보다 큰 전류밀도에서는 옴-저항에 의한 전위차가 양극전위에 상당히 기여하므로 저항이 큰 $AlCl_3$(혹은 $AlCl_3$ 의 농도가 큰 멜트)의 층이 양극표면에 가까이 형성된다고 결론지었다. IR-전위차에 대하여 보정한 후의 Tafel곡선과 Allen-Hickling 곡선으로 부터 겉보기 transfer-coefficient, ${\alpha}_a$=(2.3RT/F)(dlogi/d${\eta}$)=$1.5{\pm}0.25$가 얻어졌다. 약 30mA/$cm^2$보다 큰 음극전류밀도에서는 느린 이온확산과 dendrite 생장 때문에 속도론적 측정이 방해 받았다.

  • PDF

Flexible and Transparent CuO/Cu/CuO Electrodes Grown on Flexible PET Substrate by Continuous Roll-to-roll Sputtering for Touch Screen Panels Cells

  • Kim, Dong-Ju;Kim, Han-Ki
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
    • /
    • pp.217.2-217.2
    • /
    • 2014
  • We prepared a flexible and transparent CuO/Cu/CuO multilayer electrodes on a polyethylene terephthalate (PET) substrate using a specially designed roll-to-roll sputtering system at room temperature for GFF-type touch screen panels (TSPs). By the continuous roll-to-roll sputtering of the CuO and Cu layer, we fabricated a flexible CuO(150nm)/Cu(150nm)/CuO(150nm) multilayer electrodes with a sheet resistance of $0.289{\Omega}/square$, resistivity of $5.991{\times}10^{-23}{\Omega}-cm$, at the optimized condition without breaking the vacuum. To investigate the feasibility of the CuO/Cu/CuO multilayer as a transparent electrode for GFF-type TSPs, we fabricated simple GFF-type TSPs using the diamond patterned CuO/Cu/CuO electrode on PET substrate as function of mesh line width. Using diamond patterned CuO/Cu/CuO electrode of mesh line $5{\mu}m$ with sheet resistance of 38 Ohm/square, optical transmittance of 90% at 550 nm and an average transmittance of 89% at wavelength range from 380 to 780 nm, we successfully demonstrated GFF-type touch panel screens (TPSs). The successful operation of GFF-type TPSs with CuO/Cu/CuO multilayer electrodes indicates that the CuO/Cu/CuO multilayer is a promising transparent electrode for large-area capacitive-type TPSs due to its low sheet resistance and high transparency.

  • PDF

DC 마그네트론 스퍼터링 NiCr 박막의 열처리 조건에 따른 미세구조 및 표면특성 (Micro Structure and Surface Characteristics of NiCr Thin films Prepared by DC Magnetron Sputter according to Annealing Conditions)

  • 권용;김남훈;최동유;이우선;서용진;박진성
    • 한국전기전자재료학회논문지
    • /
    • 제18권6호
    • /
    • pp.554-559
    • /
    • 2005
  • Ni/Cr thin film is very interesting material as thin film resistors, filaments, and humidity sensors because their relatively large resistivity, more resistant to oxidation and a low temperature coefficient of resistance (TCR). These interesting properties of Ni/Cr thin films are dependent upon the preparation conditions including the deposition environment and subsequent annealing treatments. Ni/Cr thin films of 250 nm were deposited by DC magnetron sputtering on $Al_2O_3/Si$ substrate with 2-inch Ni/Cr (80/20) alloy target at room temperature for 45 minutes. Annealing treatments were performed at $400^{\circ}C,\;500^{\circ}C,\;and\;600^{\circ}C$ for 6 hours in air or $H_2$ ambient, respectively. The clear crystal boundaries without crystal growth and the densification were accomplished when the pores were disappeared in air ambient. Most of surface was oxidic including NiO, $Ni_2O_3$ and $Cr_xO_y$(x=1,2, y=2,3) after annealing in air ambient. The crystal growth in $H_2$ ambient was formed and stabilized by combination with each other due to the suppression of oxidized substance on film surface. Most oxidic Ni was restored when the oxidic Cr was present due to its stability in high-temperature $H_2$ ambient.

표면처리된 흑연 보트를 이용한 알루미늄의 증발 특성 (Evaporation Characteristics of Aluminum by Using Surface-treated Graphite Boat)

  • 정재인;양지훈
    • 한국표면공학회지
    • /
    • 제42권1호
    • /
    • pp.1-7
    • /
    • 2009
  • Resistive heating sources are widely used to prepare thin films by vapor deposition because they are cheap, and easy to install and handle in vacuum system. Graphite is one of materials used to make the resistive heating source, but until now only limited applications have been possible as it reacts easily with evaporating materials at high temperature. In this study, evaporation characteristics of aluminum have been investigated by using graphite boat thermally treated with BN powder. The employed graphite boat has been prepared by spray-coating BN power onto the cavity surface of the boat and thermal treatment with aluminum in vacuum at the temperature of more than $1400^{\circ}C$. The voltage-current characteristics as well as resistivity changes of the graphite boat have been investigated during aluminum evaporation according to the applied voltage and time. The evaporation aspect has been picturized during flash evaporation for 40 seconds based on the characterization results. The evaporation rate of the graphite boat has been compared with that of BN boat. The graphite boat showed some different characteristics compared with BN boat, in that the evaporation occurred at the last stage of flash evaporation. The film appearance according to the applied voltage has been compared, and also the reflectance of the resulting film has been investigated according to the film thickness. It has been found that the graphite boat thermally treated with BN powder can be used for aluminum evaporation without problem.

The Corrosion Study of Al Current Collector in Phosphonium Ionic Liquid as Solvent for Lithium Ion Battery

  • Cha, Eun-Hee;Mun, Jun-Young;Cho, E.-Rang;Yim, Tae-Eun;Kim, Young-Gyu;Oh, Seung-M.;Lim, Soo-A;Lim, Jea-Wook
    • 전기화학회지
    • /
    • 제14권3호
    • /
    • pp.152-156
    • /
    • 2011
  • A room temperature ionic liquid (RTIL) based on trihexyl (tetradecyl)phosphonium bis(trifluoromethanesulfonyl) imide ([$(C_6H_{13})_3P(C_{14}H_{29)}$] [TFSI];P66614TFSI) was synthesized and analyzed to determine their characteristics and properties. The bis(trifluoromethanesulfonyl)imide (TFSI) anion is widely studied as an ionic liquid (IL) forming anion which imparts many useful properties, notably electrochemical stability. Especially its electrochemical and physical characteristics for solvent of lithium ion battery were investigated in detail. $P_{66614}$ TFSI exhibits fairly low conductivity (0.89 mS $cm^{-1}$) and higher viscosity (298 K: 277 cP; 343 K: 39 cP) than other ionic liquids, but it exhibits a high thermal stability (over $400^{\circ}C$). Especially corrosion behavior on Al current collector was tested at room temperature and further it was confirmed that thermal resistivity for Al corrosion was highly increased in 1.0M LiTFSI/$P_{66614}$-TFSI electrolyte comparing with other RTILs by linear sweep thermometry.

Bi-2212/Cu-Ni 튜브로 제작한 초전도 한류소자의 단락사고시험 결과 (Fabrication and Fault Test Results of Bi-2212/Cu-Ni Tubes for Superconducting Fault Current Limiting Elements)

  • 오성용;임성우;유승덕;김혜림;현옥배
    • Progress in Superconductivity
    • /
    • 제10권1호
    • /
    • pp.45-49
    • /
    • 2008
  • For the development of superconducting fault current limiters (SFCLs), fault current limiting elements were fabricated out of Bi-2212 bulk tubes and tested. The SFCL elements consisted of tube shaped Bi-2212 bulks and metal shunts for the stabilizers. Firstly, the Bi-2212 bulk tubes were processed based on a design of monofilar coils in order to acquire large resistance and high voltage rating. 300 mm-long Bi-2212 tubes were designed to have the current path of 410 cm in length with 24 turns and 41 mm in diameter. The processed monofilar coil, as designed, had 300 A $I_c$ at 77 K. The fabricated superconducting monofilar coils were affixed to Cu-Ni alloy as that of stabilizers. The Cu-Ni alloys were processed to have the same shape of the superconducting monofilar coils. The Cu-Ni coil had resistivity of 32 ${\mu}{\Omega}$-cm at 77 K and 37 ${\mu}{\Omega}$-cm at 300 K. The metal shunts were attached to the outside of the Bi-2212 monofilar coil by a soldering technique. After the terminals made of copper were attached to both ends of the superconductor-metal shunt composite, the gap between the turns and the surface of the elements was filled with an epoxy and a dense mesh made of FRP in order to enhance the mechanical strength. The completed SFCL elements went through fault tests, and we confirmed that the voltage rating of 143 $V_{rms}$ (E =0.35 $V_{rms}$/cm) could be accomplished.

  • PDF