Micro Structure and Surface Characteristics of NiCr Thin films Prepared by DC Magnetron Sputter according to Annealing Conditions |
Kwon, Yong
(조선대학교 신소재공학과)
Kim, Nam-Hoon (조선대학교 에너지자원신기술연구소) Choi, Dong-You (조선대학교 에너지자원신기술연구소) Lee, Woo-Sun (조선대학교 전기공학과) Seo, Yong-Jin (대불대학교 전기전자공학과) Park, Jin-Seong (조선대학교 신소재공학과) |
1 | A. Banovec and A. Zalar, 'Investigation of sliding contact resistance of Ni-Cr/Au and Ni-Cr/Au- thin resistive films', Thin Solid Films, Vol. 164, p. 129, 1988 |
2 | S. P. Jeng, P. H. Holloway, D. A. Asbury, and G. B. Hoflund, 'Changes induced at Ni/Cr alloy surfaces by annealing and oxygen exposure', Surf. Sci., Vol. 235, No. 2-3, p, 175, 1990 |
3 | W. Brucker and S. Baunack, 'Electrical resistance and mechanical stress in Nicr/Cu/NiCr thin films', J. of Appl, Phys., Vol. 85, No.2, p. 935, 1999 |
4 | R. M. German, 'Sintering Theory and Practice', John Wiley & Sons, Inc., p. 73, 1996 |
5 | 김남훈, 권광호, 김창일, 장의구, '자장 강화 반응성 이온 식각 장비를 이용한 몰리브덴 박막의 식각 특성 연구', 전기전자재료학회논문지, 13권, 1호, p. 6, 2000 |
6 | A. Peled, J. Farhadyan, Y. Zloof, and V. Baranauskas, 'The midrange and high temperature dependence of vacuum deposited NiCr thin film resistors', Vacuum, Vol. 45, No.1, p. 5, 1994 |
7 | E.-M. Lee and S.-G. Yoon, 'The structural and electrical properties of NiCr alloy for the bottom electrode of high dielectric (BST) thin films', Trans. EEM, Vol. 4, No.1, p. 15, 2003 |
8 | S. Hofmann and A. Zalar, 'Correlation between electrical properties and AES concentration-depth profiles of NiCr thin films', Thin Solid Films, Vol. 39, p. 219, 1976 |
9 | C. L. Au, M. A. Jackson, and W. A. Anderson, 'Structural and electrical properties of stable Ni!Cr thin films', J. Electron. Mater., Vol. 16, No.4, p. 301, 1987 |
10 | G. Nocerino and K. E. Singer, 'Resistance stabilization of Ni-Cr films by surface oxide formation', J. Vac. Sci. Technol. B, Vol. 16, No.2, p. 147, 1979 |
11 | G. B. Hoflund and. W. S. Epling, 'Oxidation study of a polucystalline Ni/Cr alloy I: room-temperature exposure to ', Thin Solid Films, Vol. 307, No. 1-2, p. 126, 1997 DOI ScienceOn |
12 | J. Steffen and S. Hofmann, 'Use of factor analysis with O KLL Auger spectra to distinguish chemisorption and oxide formation on Ni', Surf. Sci., Vol. 202, No.3, p. L607, 1988 |
13 | S. P. Jeng, P. H. Holloway, and C. D. Batich, 'Surface passivation of Ni/Cr alloy at room temperature', Surf. Sci., Vol. 227, No.3, p. 278, 1990 |
14 | 권 용, 박용주, 최승평, 정 진, 최광표, 류현욱, 박진성, 'Thermal evaporation법으로 제조한 NiCr 박막의 증착 특성', 한국세라믹학회지, 41권,6호, p. 450, 2004 |
15 | 김병희, '이화학사전', 한국사전연구사, p. 573, 1995 |
16 | W. S. Epling, C. K. Mount, and G. B. Hoflund, 'Study of a polycrystallinc Ni/Cr alloy V. hydrogen-atom exposure', Thin Solid Films, Vol. 304, No. 1-2, p. 273, 1997 DOI ScienceOn |
17 | 윤석범, 'DC 스퍼터링 증착에 의한 Al 전극을 갖는 전계발광소자 제작', 전기전자재료학회논문지 , 13권,5호, p. 376, 2000 |
18 | R. M. German, 'Sintering Theory and Practice', John Wiley & Sons, Inc., p. 198, 1996 |