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Si-MEMS package Having a Lossy Sub-mount for CPW MMICs  

송요탁 (아주대학교 전자공학과)
이해영 (아주대학교 전자공학과)
Publication Information
The Journal of Korean Institute of Electromagnetic Engineering and Science / v.15, no.3, 2004 , pp. 271-277 More about this Journal
Abstract
A Si(Silicon) MEMS(Micro Electro Mechanical System) package using a doped lossy Si carrier for CPW(Coplanar Waveguide) MMICs(Microwave and Millimeter-wave Integrated Circuits) is proposed in order to reduce parasitic problems of leakage, coupling and resonance. The proposed chip-carrier scheme is verified by fabricating and measuring a GaAs CPW on the two types of carriers(conductor-back metal, doped lossy Si) in the frequency from 0.5 to 40 ㎓. The proposed MEMS package using the lightly doped lossy(15 Ω$.$cm) Si chip-carrier and the HRS(High Resistivity Silicon, 15 ㏀$.$cm) shows the optimized loss and parasitic problems-free since the doped lossy Si-carrier effectively absorbs and suppresses the resonant leakage. The Si MEMS package for CPW MMICs has an insertion loss of only - 2.0 ㏈ and a power loss of - 7.5 ㏈ at 40 ㎓.
Keywords
Si; MEMS Package; CPW; MMIC; HRS;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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