• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.153-154
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• 2006

Development of sorting machine for photo diode and its control system is addressed. The sorting machine for optical communication device requires high positional precision because the alignment is one of the most important point in the sorting process. This sorting method describes how to detect the target chip's angle and position from the wafer. The machine vision system is used for the feedback control. This sorting machine is implemented by motion controller, machine vision and various solenoid valve and is interfaced with RS-232c, GPIB and PCI communication. This system gets the position accuracy within $1{\mu}m$ with our experiments.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.495-495
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• 2000

The Stewart platform manipulator is a closed-kinematis chain robot manipulator that is capable of providing high st겨ctural rigidity and positional accuracy. However, this is a complex structure, so controllability of the system is not so good. In this paper, it introduces a new robust motion control algorithm using partial state feedback for a class of nonlinear systems in the presence of modelling uncertainties and external disturbances. The major contribution of this work introduces the development and design of robust observer for the slate and the perturbation w.hich is integrated into a variable structure controller(VSC) structure. The combination of controller/observer gives rise to the robust routine called sliding mode control with sliding perturbation observer(SMCSPO). The optimal gains of SMCSPO are easily obtained by genetic algorithm. Simulation and experiment are presented in order to apply to the stewart platform manipulator. There results show highly' accuracy and performance.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.1983-1989
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• 2005

Industrial robots are powerful, extremely accurate multi-jointed systems, but they are heavy and highly rigid because of their mechanical structure and motorization. Therefore, sharing the robot working space with its environment is problematic. A novel pneumatic artificial muscle actuator (PAM actuator) has been regarded during the recent decades as an interesting alternative to hydraulic and electric actuators. Its main advantages are high strength and high power/weight ratio, low cost, compactness, ease of maintenance, cleanliness, readily available and cheap power source, inherent safety and mobility assistance to humans performing tasks. The PAM is undoubtedly the most promising artificial muscle for the actuation of new types of industrial robots such as Rubber Actuator and PAM manipulators. However, some limitations still exist, such as the air compressibility and the lack of damping ability of the actuator bring the dynamic delay of the pressure response and cause the oscillatory motion. In addition, the nonlinearities in the PAM manipulator still limit the controllability. Therefore, it is not easy to realize motion with high accuracy and high speed and with respect to various external inertia loads in order to realize a human-friendly therapy robot To overcome these problems a novel controller, which harmonizes a phase plane switching control method with conventional PID controller and the adaptabilities of neural network, is newly proposed. In order to realize satisfactory control performance a variable damper - Magneto-Rheological Brake (MRB) is equipped to the joint of the manipulator. Superb mixture of conventional PID controller and a phase plane switching control using neural network brings us a novel controller. This proposed controller is appropriate for a kind of plants with nonlinearity uncertainties and disturbances. The experiments were carried out in practical PAM manipulator and the effectiveness of the proposed control algorithm was demonstrated through experiments, which had proved that the stability of the manipulator can be improved greatly in a high gain control by using MRB with phase plane switching control using neural network and without regard for the changes of external inertia loads.

• Journal of Mechanical Science and Technology
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• 제18권4호
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• pp.630-639
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• 2004

The Stewart platform manipulator is a closed-kinematics chain robot manipulator that is capable of providing high structural rigidity and positional accuracy. However, this is a complex and nonlinear system, so the control performance of the system is not so good. In this paper, a new robust motion control algorithm is proposed. The algorithm uses partial state feedback for a class of nonlinear systems with modeling uncertainties and external disturbances. The major contribution is the design of a robust observer for the state and the perturbation of the Stewart platform, which is combined with a variable structure controller (VSC). The combination of controller and observer provides the robust routine called sliding mode control with sliding perturbation observe. (SMCSPO). The optimal gains of SMCSPO, which is determined by nominal eigenvalues, are easily obtained by genetic algorithm. The proposed fitness function that evaluates the gain optimization is to put sliding function. The control performance of the proposed algorithm is evaluated by the simulation and experiment to apply to the Stewart platform. The results showed high accuracy and good performance.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.37.3-37
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• 2001

The quality of a precision product, in genera, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the workpiece in the process. Recently the positioning accuracy level employed for some of precision product has reached the level of submicron and long range of motion is required. For example, for 1GDRM lithography, 20nm accuracy and 300nm stroke needs. This paper refers to the lithography stage especially fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM(Linear DC Noter) is used and for fine or VCM is used ...

• 한국정밀공학회지
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• 제19권12호
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• 대한기계학회논문집A
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• 제28권1호
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• pp.40-47
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• 2004

This paper proposes a three-axis coupling controller designed to improve the contouring accuracy in machining of 3D nonlinear contours. The proposed coupling controller is based on an innovative 3D contour error model and a PID control law. The novel contour error model provides almost exact calculation of contour errors in real-time for arbitrary contours and can be integrated with any type of existing interpolator. In the proposed method, three axes of motion are coordinated by the proposed coupling controller along with a proportional controller for each axis. The proposed contour error model and coupling controller are evaluated through computer simulations. The simulation results show that the proposed 3-axis coupling controller with the new contour error model substantially can improve the contouring accuracy by order of magnitude compared with the existing uncoupled controllers in high-speed machining of nonlinear contours.

• 한국태양에너지학회:학술대회논문집
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• 한국태양에너지학회 2009년도 춘계학술발표대회 논문집
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• pp.31-36
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• 2009

There have been many solar tracking systems developed for the high accuracy in solar tracking. One of the key components of any motion control system is software. LabVIEW offers an ideal combination of flexibility, ease-of-use and well-integration with other I/O pieces for developing solar tracking system. Real-time solar positions which vary with GPS's data are used simultaneously to control the solar tracker by a chain of operating modes between the open and closed loops. This paper introduces a step by step procedure for the fabrication and performance assessment of a precision solar tracking system. The system developed in this study consists of motion controllers, motor drives, step-motors, feedback devices and application. CRD sensors are applied for the solar tracking system which play a primary role in poor conditions for tracking due to a gear backlash and a strong wind. Mini-dish was used as a concentrator for collecting sun light. The solar position data, in terms of azimuth and elevation, sunrise and sunset times was compared with those of KASI(Korea Astronomy & Space Science Institute). The results presented in this paper demonstrate the accuracy of the present system in solar tracking and utilization.

• 한국정밀공학회지
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• 제15권10호
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• pp.73-80
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• 1998

Recently, we have developed a linear brushless DC motor(LBLDCM) with high speed and precise position control performance to apply it to the semiconductor assembly and inspection machinery. It is composed of double side alignment by two armature-stator pairs and each pair is consist of a moving armature with 8 poles by 3 phase coils and a stator with rare earth permanent magnet (Nd-Fe-B) arrays. Through the thrust force analysis on a simplified and whole model of the suggested LBLDCM by an Electromagnetic FEM solver, skew angle of magnet arrays to reduce the thrust force ripple and the winding conditions of the armature is designed. From experimental results, the user's requirements was satisfied and we confirmed distinctly that the repeatable accuracy less than a micron of the linear motion can be obtained at high speed by the developed LBLDCM. This is owing to directly drive the work without the gear train.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.794-797
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• 2001

The basic design of today s rolling linear guides with rails is outlined in a French patent from 1932, it was not until the early 1970s that linear guides were commercialized. Progress with the numerical control of machine tools led to higher speed and accuracy of machines that exposed limitations of conventional sliding guides in terms of durability and response capability. As a result, rolling guides, having better high-speed performance and greater compatibility with electronics, began to be used widely. This paper examined theoretically and experimentally the influence of rail bolt tightening on the motion accuracy of linear guides. The rail of a linear guide is tightened and fixed to the base component by bolts. Naturally, the rail is an elastic body and the compression force generated by tightening the volts causes its deflection. Compromising motion accuracy, the rail deforms wavily in a longitudinal direction corresponding to the bolt pitch. The relation between rail position and deflection(sinking) amount caused by bolt tightening was analyzed through FEM analysis in this paper.