• 제목/요약/키워드: Heo Jong

검색결과 1,505건 처리시간 0.028초

MIM 커패시터의 Metal 게이트 전극을 위한 TiN 박막의 건식 식각 연구 (Study of dry etch characteristic of TiN thin film for metal gate electrode in MIM capacitor)

  • 박정수;주영희;우종창;허경무;위재형;김창일
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2009년도 추계학술대회 초록집
    • /
    • pp.219-220
    • /
    • 2009
  • 이번 실험에서는 TiN의 건식 식각 특성을 연구하기 위해 $BCl_3/Ar/N_2$ 유도 결합플라즈마를 이용하였다. BCl3와 Ar의 가스 비율이 $BCl_3$ (5 sccm)/Ar (15 sccm)/N (4 sccm) 인 상황에서 RF power와 DC bias, 그리고 process pressure을 식각변수로 설정하였다. TiN의 식각률은 Alpha-step 500으로 측정하였고 표면의 식각 후 화학반응은 XPS로 측정하였다.

  • PDF

연속 판재 적용을 위한 고속 동도금의 공정 조건 (The process condition of High-speed copper plating for application of continuous plate)

  • 박상언;허세진;김종현;강용석;최주원
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2007년도 춘계학술발표회 초록집
    • /
    • pp.167-168
    • /
    • 2007
  • 고속 동도금 공정을 확립하기 위하여 선행실험으로 알카리계 동도금 용액을 이용하여 고속 동도금의 가능성을 실험하였다. 전류밀도와 극간거리, 유속의 조절을 통하여 최대 $17.6{\mu}m/min$. 속도의 도금속도를 확보하였으며, Hv 120 내외의 경도를 확보하였다. 고속 동도금을 실현하기 위해서는 높은 전류밀도를 필요로 하고, 낮은 용액 저항을 위해 극간거리는 짧게 유지하되, 빠른 유속을 필요로 하였다.

  • PDF

전해환원 및 연계공정의 II족 원소 거동

  • 최은영;이정;오승철;박우신;김성욱;홍순석;조영환;박태홍;김종윤;전상채;이주호;허진목
    • 한국방사성폐기물학회:학술대회논문집
    • /
    • 한국방사성폐기물학회 2015년도 추계학술논문요약집
    • /
    • pp.23-24
    • /
    • 2015
  • PDF

디지털 영상을 이용한 절취단면의 토사유출인자 산정 (The Estimation of Soil Erosion Fact of Cutting Slope Using Digital Image)

  • 이종출;양원영;허종호;조용재
    • 한국측량학회:학술대회논문집
    • /
    • 한국측량학회 2006년도 춘계학술발표회 논문집
    • /
    • pp.527-531
    • /
    • 2006
  • Recently, the development project is conducting disaster effect estimation to breed disaster, and cope these disaster beforehand provoking soil erosion and flood. Therefore, it is became important to analysis and reduce of these disaster. In this study, receive value of LS and C factor of soil erosion through the digital image. The method of photogrammetry was employed for the efficient surveying and analysis of cutting slope using Remote Control Helicopter installed with a nonmetric digital camera. As a result, we obtain more objectivity value of soil erosion factor using digital image analysis.

  • PDF

Camera Controller in MSC(Multi-Spectral Camera)

  • Kim, Young-Sun;Yong, Sang-Soon;Kong, Jong-Pil;Heo, Haeng-Pal;Park, Jong-Euk;Youn, Heong-Sik
    • 대한원격탐사학회:학술대회논문집
    • /
    • 대한원격탐사학회 2003년도 Proceedings of ACRS 2003 ISRS
    • /
    • pp.1081-1083
    • /
    • 2003
  • The CC's main objective is to manage and control the various operation of the MSC camera. The CC has capability to control the various camera operation modes such as INIT mode, WAIT mode, STANDBY mode, READY IMAGING, DEFAULT READY IMAGING, IBIT and IMAGING mode as well as to manage the interface of the PMU. This paper also shows not only the design concepts in the both of the hardware and the operational software, but also the implementation results for the various CC functions.

  • PDF

가스수집시간을 이용한 유중수소가스 측정감도 향상 연구 (Sensitivity Enhancement in Measurement of Hydrogen Gas Dissolved in Oil using Gas Collection Time)

  • 허종철;선종호;강동식;정주영;박정후
    • 전기학회논문지
    • /
    • 제58권3호
    • /
    • pp.539-543
    • /
    • 2009
  • This paper describes the sensitivity enhancement in measurement of the hydrogen gas dissolved in oil using gas collection time. On-line gas measurement is a useful for continuous monitoring of power transformer. Recently many studies on hydrogen gas measurement, due to their simplicity and low price, have been done for transformer monitoring. In measurement of the hydrogen gas in oil, the suitable sensitivity and resolution in the desired ranges of the gas concentrations are needed for the reliable monitoring of power transformers. In this study, the sensor output trends were analyzed with the hydrogen gas collection time which means the time to collect the hydrogen gas before reaction of hydrogen gas sensor. It is indicated that the sensor outputs were increased with the increase of hydrogen gas collection times at the same hydrogen gas concentrations.

Electronic System Design of SRI (Super Resolution Imager) for satellite

  • Park Jong-Euk;Kong Jong-Pil;Heo Haeng-Pal;Kim Young Sun;Youn Heong-Sik;Paik Hong Yul
    • 대한원격탐사학회:학술대회논문집
    • /
    • 대한원격탐사학회 2004년도 Proceedings of ISRS 2004
    • /
    • pp.483-485
    • /
    • 2004
  • The SRI (Super Resolution Imager) is the development project for the next generation satellite camera. This camera has more high resolution than the present satellite camera. It's used by very accurate observation and other multi-purposes. In this paper, the SRI electronic system is described in terms of H/W (Configuration and Function operation).

  • PDF

CCD Pixel Correction Table Generation for MSC

  • Kim Young Sun;Kong Jong-Pil;Heo Haeng-Pal;Park Jong-Euk;Paik Hong-Yul
    • 대한원격탐사학회:학술대회논문집
    • /
    • 대한원격탐사학회 2004년도 Proceedings of ISRS 2004
    • /
    • pp.471-474
    • /
    • 2004
  • Not all CCD pixels generate uniform value for the uniform radiance due to the different process of manufacture and each pixel characteristics. And the image data compression is essential in the real time image transmission because of the high line rate and the limited RF bandwidth. This pixel's nonuniformity and the loss compression make CCD pixel correction necessary in on-orbit condition. In the MSC system, the NUC unit, which is a part of MSC PMU, is charge of the correction for CCD each pixel. The correction is performed with the gain and the offset table for the each pixel and the each TDI mode. These correction tables are generated and programmed in the PMU Flash memory through the various image data tests at the ground test. Besides, they can be uploaded from ground station after onorbit calibration. This paper describes the principle of the table generation and the test way of the non-uniformity after NUC

  • PDF

APDE(Antenna Positioning Drive Electronics) Design for MSC (Multi-Spectral Camera)

  • Kong Jong-Pil;Heo Haeng-Pal;Kim YoungSun;Park Jong-Euk;Youn Heong-Sik
    • 대한원격탐사학회:학술대회논문집
    • /
    • 대한원격탐사학회 2004년도 Proceedings of ISRS 2004
    • /
    • pp.440-443
    • /
    • 2004
  • As a main management unit of MSC, PMU controls the MSC payload operation by issuing commands to other subunit and PMU internal modules. One of these main control functions is to drive the APS(Antenna Pointing System) when APS motion is required. For this purpose, SBC(Single Board Computer) for calculating motor commands and APDE for driving APM(Antenna Pointing Mechanism) by PWM signal operate inside PUM. In this paper, details on APDE design shall be described such as electronic board architecture, primary and redundant design concept, Cross-Strap, FPGA contents and latch-up immune concept, etc., which shall show good practices of electronic board design for space program.

  • PDF

SNR Analyses for MSC and Camera Electronics Design for Its Improvement

  • Kim Young Sun;Kong Jong-Pil;Heo Haeng-Pal;Park Jong-Euk;Paik Hong-Yul
    • 대한원격탐사학회:학술대회논문집
    • /
    • 대한원격탐사학회 2004년도 Proceedings of ISRS 2004
    • /
    • pp.444-447
    • /
    • 2004
  • SNR(Signal to Noise Ratio) is one of the most important performance for the electro-optical camera system. This paper shows not only the SNR analyses for the MSC system, which is the payload in the KOMPSAT2 satellite, but also the trials for its improvement in the electronics circuit design. The MSC deals with one panchromatic band and four multi-spectral bands. The SNR analyses are performed based on the MSC design for the each band and assuming that the defined radiance reached directly to the sensor entrance pupil. In the SNR calculation, shot noise, dark current noise, analog electronics noise and ADC quantization noise are considered as noise sources. In these noise sources, especially, the electronics noise depends on the camera electronics design. This paper shows the camera electronics design to increase SNR and its test results as well as the SNR analyses.

  • PDF