• 제목/요약/키워드: Helium Mass Spectrometer

검색결과 11건 처리시간 0.025초

Evaluation Method on Destruction and Removal Efficiency of Perfluorocompounds from Semiconductor and Display Manufacturing

  • Lee, Jee-Yon;Lee, Jin-Bok;Moon, Dong-Min;Souk, Jun-Hyung;Lee, Seung-Yeon;Kim, Jin-Seog
    • Bulletin of the Korean Chemical Society
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    • 제28권8호
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    • pp.1383-1388
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    • 2007
  • Recently, the semiconductor and display industries have tried to reduce the emissions of perfluorocompounds (PFCs) from the globally environmental regulation. Total amount of PFC emission can be calculated from the flow rate and the partial pressures of PFCs. For the precise measurement of PFC emission amount, the mass flow controlled helium gas was continuously injected into the equipment of which scrubber efficiency is being measured. The partial pressures of PFCs and helium were accurately measured using a mass spectrometer in each sample extracted from inlet and outlet of the scrubber system. The flow rates are calculated from the partial pressures of helium and also, PFC destruction and removal efficiency (DRE) of the scrubber is calculated from the partial pressure of PFC and the flow rate. Under this method, the relative expanded uncertainties of the flow rate and the partial pressures of PFCs are ± 2% (k = 2) in case the concentrations of NF3 and SF6 are as low as 100 μmol/mol.

질량분석기형 누출검출기를 이용한 헬륨투과형 표준 누출 비교 교정 장치 개발 (Development of Comparative Calibration System for Helium Leak Standard by Using Mass Spectrometer Type Leak Detector)

  • 홍승수;임인태;김진태;신용현
    • 비파괴검사학회지
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    • 제28권2호
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    • pp.151-156
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    • 2008
  • 반도체나 디스플레이 제조 등 진공공정의 리크검출에는 질량분석기형(mass spectrometer type) 헬륨 리크검출기(leak detector)가 사용되고 있다. 이 기기를 이용해서 안정된 측정값을 얻기 위해서는 장치 내부에 내장된 투과형(permeation type) 표준리크(standard leak)를 이용해서 자주 spectrometer를 교정해야 한다. 본 연구에서 질량분석기형 리크검출기의 비교교정 장치의 개발과 교정방법에 대한 연구결과를 언급하였다. 따라서 이 기술을 이용하면 질량분석기형 리크검출기를 구비하고 있는 현장에서도 표준리크의 비교교정이 가능하게 된다.

Time Resolced Molecular Beam Characteristic in a Pulsed Supersonic Jet

  • 강위경;김은정;최창주;정광우;정경훈
    • Bulletin of the Korean Chemical Society
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    • 제16권3호
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    • pp.238-243
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    • 1995
  • A pulsed molecular beam source having short pulse duration (typically 70 ${\mu}s)$ and narrow velocity distribution (${\Delta}$v/v=8% for helium) has been costructed utilizing a commercial fuel injector. Beam characteristics of helium and ammonia seeded in helium expansions are accomplished by the use of an electron impact time-or-flight mass spectrometer. The comparisons between experimental data and theoretical calculations show that the proper beam speed is important to predict the evolution of stream temperature and valve shutter function. The decreasing tendency of pulse duration with increasing cluster size leads to the conclusion that the cluster beam property is described as a function of cluster mass and disinct cluster temperature.

잔류기체 분석기 교정장치 개발 (Development of a Residual Gas Analyzer Calibration System)

  • 홍승수;임인태;김진태
    • 한국진공학회지
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    • 제16권2호
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    • pp.91-98
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    • 2007
  • 한국표준과학연구원 진공기술센터에서 잔류기체분석기 교정장치를 개발하였으며, 이 장치를 이용하여 서로 다른 구조를 가진 두개의 사중극 질량분석기 (quadrupole mass spectrometer)의 질소, 아르곤, 헬륨에 대한 기체감도를 측정하였다. 그 결과 기체감도는 QMS 구조와 상관없이 기체의 질량이 클수록 높게 나타났고 압력에 따라서도 다른 특성을 보였으므로 정확한 사용을 위해서는 기체감도를 꼭 보정해야 함을 알 수 있었다.

Design Considerations of Cryogenic Cooling System for High Field Magnets

  • Choi, Yeon-Suk;Kim, Dong-Lak;Lee, Byoung-Seob;Yang, Hyung-Suk;Yoo Jong-Shin;Painter Thomas A.;Miller John R.
    • 한국초전도ㆍ저온공학회논문지
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    • 제8권4호
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    • pp.30-33
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    • 2006
  • Several crucial issues are discussed in the design of cryogenic cooling system for high field magnets. This study is mainly motivated by our ongoing program to develop a 21 T Fourier Transform Ion Cyclotron Resonance Mass Spectrometer (FT-ICR MS). The magnets of this system will be built horizontally to accomplish the requirement of user friendliness and reliability, and the replenishment of cryogen will not be necessary by a closed-loop cooling concept. The initial cool-down and safety are basically considered in this paper. The effects of the helium II volume and the gap distance of the weight load relief valve (or safety valve) on the cool-down time and temperature rising during an off-normal state are discussed. The total amount of cryogenic cooling loads and the required helium flow rate during cool-down are also estimated by a relevant heat transfer analysis. The temperatures of cryogen-free radiation shield are finally determined from the refrigeration power of a cryocooler and the total cryogenic loads.

Experimental Study on the Interference of Water Vapor on the Chemical Ionization of OH by Sulfur Hexafluoride Ion

  • Park, Jong-Ho
    • Mass Spectrometry Letters
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    • 제5권4호
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    • pp.120-123
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    • 2014
  • The interference of water vapor on the chemical ionization (CI) of hydroxyl radicals (OH) by sulfur hexafluoride ion ($SF_6{^-}$) was investigated using a flow tube system coupled to a high-pressure CI mass spectrometer. Water vapor, which is required to study heterogeneous reactions of OH under real tropospheric conditions, transforms the reagent ion $SF_6{^-}$ into $SF_4O^-$ and $F^-(HF)_n$, resulting in a substantial loss in CI sensitivity. Therefore, under humid conditions, peaks corresponding to OH are drastically diminished, while those corresponding to OH-water complex ions ($[OH(H_2O)_n]^-$) are enhanced. $[OH(H_2O)_3]^-$ was observed as the major OH species. The obsercation of $[OH(H_2O)_n]^-$ by isolating humid conditions to the CI region and preliminary ab initio calculations suggested that $[OH(H_2O)_n]^-$ ions were produced from reactions between OH ions ($OH^-$) and water molecules. An additional helium buffer flow introduced into the CI region reduced loss of the reagent ion and resulted in a partial recovery of OH peak intensities under humid conditions.

A design study of a 4.7 T 85 mm low temperature superconductor magnet for a nuclear magnetic resonance spectrometer

  • Bae, Ryunjun;Lee, Jung Tae;Park, Jeonghwan;Choi, Kibum;Hahn, Seungyong
    • 한국초전도ㆍ저온공학회논문지
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    • 제24권3호
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    • pp.24-29
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    • 2022
  • One of the recent proposals with nuclear magnetic resonance (NMR) is a multi-bore NMR which consists of array of magnets which could present possibilities to quickly cope with pandemic virus by multiple inspection of virus samples. Low temperature superconductor (LTS) can be a candidate for mass production of the magnet due to its low price in fabrication as well as operation by applying the helium zero boil-off technology. However, training feature of LTS magnet still hinders the low cost operation due to multiple boil-offs during premature quenches. Thus in this paper, LTS magnet with low mechanical stress is designed targeting the "training-free" LTS magnet for mass production of magnet array for multi-bore NMR. A thorough process of an LTS magnet design is conducted, including the analyses as the followings: electromagnetics, mechanical stress, cryogenics, stability, and protection. The magnet specification was set to 4.7 T in a winding bore of 85 mm, corresponding to the MR frequency of 200 MHz. The stress level is tolerable with respect to the wire yield strength and epoxy crack where mechanical disturbance is less than the minimum quench energy.

Validation of a New Design of Tellurium Dioxide-Irradiated Target

  • Fllaoui, Aziz;Ghamad, Younes;Zoubir, Brahim;Ayaz, Zinel Abidine;Morabiti, Aissam El;Amayoud, Hafid;Chakir, El Mahjoub
    • Nuclear Engineering and Technology
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    • 제48권5호
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    • pp.1273-1279
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    • 2016
  • Production of iodine-131 by neutron activation of tellurium in tellurium dioxide ($TeO_2$) material requires a target that meets the safety requirements. In a radiopharmaceutical production unit, a new lid for a can was designed, which permits tight sealing of the target by using tungsten inert gaswelding. The leakage rate of all prepared targets was assessed using a helium mass spectrometer. The accepted leakage rate is ${\leq}10^{-4}mbr.L/s$, according to the approved safety report related to iodine-131 production in the TRIGA Mark II research reactor (TRIGA: Training, Research, Isotopes, General Atomics). To confirm the resistance of the new design to the irradiation conditions in the TRIGA Mark II research reactor's central thimble, a study of heat effect on the sealed targets for 7 hours in an oven was conducted and the leakage rates were evaluated. The results show that the tightness of the targets is ensured up to $600^{\circ}C$ with the appearance of deformations on lids beyond $450^{\circ}C$. The study of heat transfer through the target was conducted by adopting a one-dimensional approximation, under consideration of the three transfer modes-convection, conduction, and radiation. The quantities of heat generated by gamma and neutron heating were calculated by a validated computational model for the neutronic simulation of the TRIGA Mark II research reactor using the Monte Carlo N-Particle transport code. Using the heat transfer equations according to the three modes of heat transfer, the thermal study of I-131 production by irradiation of the target in the central thimble showed that the temperatures of materials do not exceed the corresponding melting points. To validate this new design, several targets have been irradiated in the central thimble according to a preplanned irradiation program, going from4 hours of irradiation at a power level of 0.5MWup to 35 hours (7 h/d for 5 days a week) at 1.5MW. The results showthat the irradiated targets are tight because no iodine-131 was released in the atmosphere of the reactor building and in the reactor cooling water of the primary circuit.

Hydrogen-Atom and Charge Transfer Reactions within Acetylene/Methanol and Ethylene/Methanol Heteroclusters

  • 신동남;최창주;정경훈;정광우
    • Bulletin of the Korean Chemical Society
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    • 제17권10호
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    • pp.939-943
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    • 1996
  • Reactions that proceed within mixed acetylene-methanol and ethylene-methanol cluster ions were studied using an electron-impact time-of-flight mass spectrometer. When acetylene and methanol seeded in helium are expanded and ionized by electron impact, the ion abundance ratio, [CH3OH+]/[CH2OH+] shows a propensity to increase as the acetylene/methanol mixing ratio increases, indicating that the initially ionized acetylene ion transfers its charge to adjacent methanol molecules within the clusters. Investigations on the relative cluster ion intensity distributions of [CH3OH2+]/[CH3OH+] and [(CH3OH)2H+]/[CH3OH·CH2OH+] under various experimental conditions suggest that hydrogen-atom abstraction reaction of acetylene molecule with CH3OH ion is responsible for the effective formation of CH2OH ion. In ethylene/methanol clusters, the intensity ratio of [CH3OH2]/[CH3OH] increases linearly as the relative concentration of methanol decreases. The prominent ion intensities of (CH3OH)mH over (CH3OH)m-1CH2OH ions (m=1, 2, and 3) at all mixing ratios are also interpreted as a consequence of hydrogen atom transfer reaction between C2H4 and CH3OH to produce the protonated methanol cluster ions.

Microstructure evolution and effect on deuterium retention in oxide dispersion strengthened tungsten during He+ irradiation

  • Ding, Xiao-Yu;Xu, Qiu;Zhu, Xiao-yong;Luo, Lai-Ma;Huang, Jian-Jun;Yu, Bin;Gao, Xiang;Li, Jian-Gang;Wu, Yu-Cheng
    • Nuclear Engineering and Technology
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    • 제52권12호
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    • pp.2860-2866
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    • 2020
  • Oxide dispersion-strengthened materials W-1wt%Pr2O3 and W-1wt%La2O3 were synthesized by wet chemical method and spark plasma sintering. The field emission scanning electron microscopy (FE-SEM) analysis, XRD and Vickers microhardness measurements were conducted to characterize the samples. The irradiations were carried out with a 5 keV helium ion beam to fluences up to 5.0 × 1021 ions/m2 under 600 ℃ using the low-energy ion irradiation system. Transmission electron microscopy (TEM) study was performed to investigate the microstructural evolution in W-1wt%Pr2O3 and W-1wt%La2O3. At 1.0 × 1020 He+/m2, the average loops size of the W-1wt%Pr2O3 was 4.3 nm, much lower than W-1wt% La2O3 of 8.5 nm. However, helium bubbles were not observed throughout in both doped W materials. The effects of pre-irradiation with 1.0 × 1021 He+/m2 on trapping of injected deuterium in doped W was studied by thermal desorption spectrometry (TDS) technique using quadrupole mass spectrometer. Compared with the samples without He+ pre-irradiation, deuterium (D) retention of doped W materials increased after He+ irradiation, whose retention was unsaturated at the damage level of 1.0 × 1022D2+/m2. The present results implied that irradiation effect of He+ ions must be taken into account to evaluate the deuterium retention in fusion material applications.