• Title/Summary/Keyword: Helium Mass Spectrometer

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Evaluation Method on Destruction and Removal Efficiency of Perfluorocompounds from Semiconductor and Display Manufacturing

  • Lee, Jee-Yon;Lee, Jin-Bok;Moon, Dong-Min;Souk, Jun-Hyung;Lee, Seung-Yeon;Kim, Jin-Seog
    • Bulletin of the Korean Chemical Society
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    • v.28 no.8
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    • pp.1383-1388
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    • 2007
  • Recently, the semiconductor and display industries have tried to reduce the emissions of perfluorocompounds (PFCs) from the globally environmental regulation. Total amount of PFC emission can be calculated from the flow rate and the partial pressures of PFCs. For the precise measurement of PFC emission amount, the mass flow controlled helium gas was continuously injected into the equipment of which scrubber efficiency is being measured. The partial pressures of PFCs and helium were accurately measured using a mass spectrometer in each sample extracted from inlet and outlet of the scrubber system. The flow rates are calculated from the partial pressures of helium and also, PFC destruction and removal efficiency (DRE) of the scrubber is calculated from the partial pressure of PFC and the flow rate. Under this method, the relative expanded uncertainties of the flow rate and the partial pressures of PFCs are ± 2% (k = 2) in case the concentrations of NF3 and SF6 are as low as 100 μmol/mol.

Development of Comparative Calibration System for Helium Leak Standard by Using Mass Spectrometer Type Leak Detector (질량분석기형 누출검출기를 이용한 헬륨투과형 표준 누출 비교 교정 장치 개발)

  • Hong, Seung-Soo;Lim, In-Tae;Kim, Jin-Tae;Shin, Yong-Hyeon
    • Journal of the Korean Society for Nondestructive Testing
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    • v.28 no.2
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    • pp.151-156
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    • 2008
  • Many kinds of mass spectrometer type leak detectors have been widely used for detecting leak of vacuum processes in semiconductor and display industries etc. The leak detectors should be often calibrated by the permeation type standard leak in order to ensure accurate and reproducible leak measurement. We have developed a comparative calibration system for permeation type standard leak by using mass spectrometer type leak detector and specification of the calibration method. Following this technique the reliable calibration for leak standard ran be performed even in fields.

Time Resolced Molecular Beam Characteristic in a Pulsed Supersonic Jet

  • Gang, Wi Gyeong;Kim, Eun Jeong;Choe, Chang Ju;Jeong, Gwang U;Jeong, Gyeong Hun
    • Bulletin of the Korean Chemical Society
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    • v.16 no.3
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    • pp.238-243
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    • 1995
  • A pulsed molecular beam source having short pulse duration (typically 70 ${\mu}s)$ and narrow velocity distribution (${\Delta}$v/v=8% for helium) has been costructed utilizing a commercial fuel injector. Beam characteristics of helium and ammonia seeded in helium expansions are accomplished by the use of an electron impact time-or-flight mass spectrometer. The comparisons between experimental data and theoretical calculations show that the proper beam speed is important to predict the evolution of stream temperature and valve shutter function. The decreasing tendency of pulse duration with increasing cluster size leads to the conclusion that the cluster beam property is described as a function of cluster mass and disinct cluster temperature.

Development of a Residual Gas Analyzer Calibration System (잔류기체 분석기 교정장치 개발)

  • Hong, S.S.;Lim, I.T.;Kim, J.T.
    • Journal of the Korean Vacuum Society
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    • v.16 no.2
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    • pp.91-98
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    • 2007
  • The Korea Research Institute of Standards and Science (KRISS) has developed a residual gas analyzer (RGA) calibration system and measured gas sensitivities for two different types QMSs using nitrogen, argon, and helium. Different gas sensitivities were identified according to mass and pressure, so it was revealed that the gas sensitivity correction is necessary for proper use of mass spectrometers.

Design Considerations of Cryogenic Cooling System for High Field Magnets

  • Choi, Yeon-Suk;Kim, Dong-Lak;Lee, Byoung-Seob;Yang, Hyung-Suk;Yoo Jong-Shin;Painter Thomas A.;Miller John R.
    • Progress in Superconductivity and Cryogenics
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    • v.8 no.4
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    • pp.30-33
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    • 2006
  • Several crucial issues are discussed in the design of cryogenic cooling system for high field magnets. This study is mainly motivated by our ongoing program to develop a 21 T Fourier Transform Ion Cyclotron Resonance Mass Spectrometer (FT-ICR MS). The magnets of this system will be built horizontally to accomplish the requirement of user friendliness and reliability, and the replenishment of cryogen will not be necessary by a closed-loop cooling concept. The initial cool-down and safety are basically considered in this paper. The effects of the helium II volume and the gap distance of the weight load relief valve (or safety valve) on the cool-down time and temperature rising during an off-normal state are discussed. The total amount of cryogenic cooling loads and the required helium flow rate during cool-down are also estimated by a relevant heat transfer analysis. The temperatures of cryogen-free radiation shield are finally determined from the refrigeration power of a cryocooler and the total cryogenic loads.

Experimental Study on the Interference of Water Vapor on the Chemical Ionization of OH by Sulfur Hexafluoride Ion

  • Park, Jong-Ho
    • Mass Spectrometry Letters
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    • v.5 no.4
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    • pp.120-123
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    • 2014
  • The interference of water vapor on the chemical ionization (CI) of hydroxyl radicals (OH) by sulfur hexafluoride ion ($SF_6{^-}$) was investigated using a flow tube system coupled to a high-pressure CI mass spectrometer. Water vapor, which is required to study heterogeneous reactions of OH under real tropospheric conditions, transforms the reagent ion $SF_6{^-}$ into $SF_4O^-$ and $F^-(HF)_n$, resulting in a substantial loss in CI sensitivity. Therefore, under humid conditions, peaks corresponding to OH are drastically diminished, while those corresponding to OH-water complex ions ($[OH(H_2O)_n]^-$) are enhanced. $[OH(H_2O)_3]^-$ was observed as the major OH species. The obsercation of $[OH(H_2O)_n]^-$ by isolating humid conditions to the CI region and preliminary ab initio calculations suggested that $[OH(H_2O)_n]^-$ ions were produced from reactions between OH ions ($OH^-$) and water molecules. An additional helium buffer flow introduced into the CI region reduced loss of the reagent ion and resulted in a partial recovery of OH peak intensities under humid conditions.

A design study of a 4.7 T 85 mm low temperature superconductor magnet for a nuclear magnetic resonance spectrometer

  • Bae, Ryunjun;Lee, Jung Tae;Park, Jeonghwan;Choi, Kibum;Hahn, Seungyong
    • Progress in Superconductivity and Cryogenics
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    • v.24 no.3
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    • pp.24-29
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    • 2022
  • One of the recent proposals with nuclear magnetic resonance (NMR) is a multi-bore NMR which consists of array of magnets which could present possibilities to quickly cope with pandemic virus by multiple inspection of virus samples. Low temperature superconductor (LTS) can be a candidate for mass production of the magnet due to its low price in fabrication as well as operation by applying the helium zero boil-off technology. However, training feature of LTS magnet still hinders the low cost operation due to multiple boil-offs during premature quenches. Thus in this paper, LTS magnet with low mechanical stress is designed targeting the "training-free" LTS magnet for mass production of magnet array for multi-bore NMR. A thorough process of an LTS magnet design is conducted, including the analyses as the followings: electromagnetics, mechanical stress, cryogenics, stability, and protection. The magnet specification was set to 4.7 T in a winding bore of 85 mm, corresponding to the MR frequency of 200 MHz. The stress level is tolerable with respect to the wire yield strength and epoxy crack where mechanical disturbance is less than the minimum quench energy.

Validation of a New Design of Tellurium Dioxide-Irradiated Target

  • Fllaoui, Aziz;Ghamad, Younes;Zoubir, Brahim;Ayaz, Zinel Abidine;Morabiti, Aissam El;Amayoud, Hafid;Chakir, El Mahjoub
    • Nuclear Engineering and Technology
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    • v.48 no.5
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    • pp.1273-1279
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    • 2016
  • Production of iodine-131 by neutron activation of tellurium in tellurium dioxide ($TeO_2$) material requires a target that meets the safety requirements. In a radiopharmaceutical production unit, a new lid for a can was designed, which permits tight sealing of the target by using tungsten inert gaswelding. The leakage rate of all prepared targets was assessed using a helium mass spectrometer. The accepted leakage rate is ${\leq}10^{-4}mbr.L/s$, according to the approved safety report related to iodine-131 production in the TRIGA Mark II research reactor (TRIGA: Training, Research, Isotopes, General Atomics). To confirm the resistance of the new design to the irradiation conditions in the TRIGA Mark II research reactor's central thimble, a study of heat effect on the sealed targets for 7 hours in an oven was conducted and the leakage rates were evaluated. The results show that the tightness of the targets is ensured up to $600^{\circ}C$ with the appearance of deformations on lids beyond $450^{\circ}C$. The study of heat transfer through the target was conducted by adopting a one-dimensional approximation, under consideration of the three transfer modes-convection, conduction, and radiation. The quantities of heat generated by gamma and neutron heating were calculated by a validated computational model for the neutronic simulation of the TRIGA Mark II research reactor using the Monte Carlo N-Particle transport code. Using the heat transfer equations according to the three modes of heat transfer, the thermal study of I-131 production by irradiation of the target in the central thimble showed that the temperatures of materials do not exceed the corresponding melting points. To validate this new design, several targets have been irradiated in the central thimble according to a preplanned irradiation program, going from4 hours of irradiation at a power level of 0.5MWup to 35 hours (7 h/d for 5 days a week) at 1.5MW. The results showthat the irradiated targets are tight because no iodine-131 was released in the atmosphere of the reactor building and in the reactor cooling water of the primary circuit.

Hydrogen-Atom and Charge Transfer Reactions within Acetylene/Methanol and Ethylene/Methanol Heteroclusters

  • 신동남;최창주;정경훈;정광우
    • Bulletin of the Korean Chemical Society
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    • v.17 no.10
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    • pp.939-943
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    • 1996
  • Reactions that proceed within mixed acetylene-methanol and ethylene-methanol cluster ions were studied using an electron-impact time-of-flight mass spectrometer. When acetylene and methanol seeded in helium are expanded and ionized by electron impact, the ion abundance ratio, [CH3OH+]/[CH2OH+] shows a propensity to increase as the acetylene/methanol mixing ratio increases, indicating that the initially ionized acetylene ion transfers its charge to adjacent methanol molecules within the clusters. Investigations on the relative cluster ion intensity distributions of [CH3OH2+]/[CH3OH+] and [(CH3OH)2H+]/[CH3OH·CH2OH+] under various experimental conditions suggest that hydrogen-atom abstraction reaction of acetylene molecule with CH3OH ion is responsible for the effective formation of CH2OH ion. In ethylene/methanol clusters, the intensity ratio of [CH3OH2]/[CH3OH] increases linearly as the relative concentration of methanol decreases. The prominent ion intensities of (CH3OH)mH over (CH3OH)m-1CH2OH ions (m=1, 2, and 3) at all mixing ratios are also interpreted as a consequence of hydrogen atom transfer reaction between C2H4 and CH3OH to produce the protonated methanol cluster ions.

Microstructure evolution and effect on deuterium retention in oxide dispersion strengthened tungsten during He+ irradiation

  • Ding, Xiao-Yu;Xu, Qiu;Zhu, Xiao-yong;Luo, Lai-Ma;Huang, Jian-Jun;Yu, Bin;Gao, Xiang;Li, Jian-Gang;Wu, Yu-Cheng
    • Nuclear Engineering and Technology
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    • v.52 no.12
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    • pp.2860-2866
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    • 2020
  • Oxide dispersion-strengthened materials W-1wt%Pr2O3 and W-1wt%La2O3 were synthesized by wet chemical method and spark plasma sintering. The field emission scanning electron microscopy (FE-SEM) analysis, XRD and Vickers microhardness measurements were conducted to characterize the samples. The irradiations were carried out with a 5 keV helium ion beam to fluences up to 5.0 × 1021 ions/m2 under 600 ℃ using the low-energy ion irradiation system. Transmission electron microscopy (TEM) study was performed to investigate the microstructural evolution in W-1wt%Pr2O3 and W-1wt%La2O3. At 1.0 × 1020 He+/m2, the average loops size of the W-1wt%Pr2O3 was 4.3 nm, much lower than W-1wt% La2O3 of 8.5 nm. However, helium bubbles were not observed throughout in both doped W materials. The effects of pre-irradiation with 1.0 × 1021 He+/m2 on trapping of injected deuterium in doped W was studied by thermal desorption spectrometry (TDS) technique using quadrupole mass spectrometer. Compared with the samples without He+ pre-irradiation, deuterium (D) retention of doped W materials increased after He+ irradiation, whose retention was unsaturated at the damage level of 1.0 × 1022D2+/m2. The present results implied that irradiation effect of He+ ions must be taken into account to evaluate the deuterium retention in fusion material applications.