• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.20 no.3
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• pp.135-140
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• 2020

Since the process gas that is essential in the semiconductor process is a harmful gas, it is an essential task to solve it in an environmentally friendly manner. Currently, the cleaning technology used in the semiconductor process is mostly a wet cleaning based on hydrogen peroxide developed in the 1970s, and the SC-1 cleaning liquid for removing particles on the surface uses a mixture of ammonia and hydrogen peroxide. Therefore, environmental problems are caused, and economic problems caused by excessive water use are also serious. For this reason, the products developed through this study are used to decompose the process harmful gas from the chamber outlet into a harmless gas before entering the vacuum pump, or by incineration and the gaseous components are deposited on the pump. I want to solve the problem. In this paper, CPS (Confined Plasma Source) is proposed to save environment and improve productivity by replacing harmful gases (N2, CF4, SF6⋯., Etc) which are indispensable in semi-contamination process with innocuous gases or incineration with plasma, to study.

• Journal of the Korean Institute of Gas
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• v.21 no.1
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• pp.80-86
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• 2017

In this paper, it is proposed to solve the problem of the harmful exhaust gas reduction device DPF. The exhaust gas is effectively guided through the control of the exhaust gas flow path which is separated in both directions. Through cross control of two DPF units, it helps to improve the purification and regeneration combustion characteristics of harmful emissions. It is possible to prevent an increase in internal pressure caused by deposition of particulate matter in the DPF. It is also an object of the present invention to provide an automobile harmful exhaust gas reduction device capable of solving the problem of lowering the output and lowering the fuel consumption.

• Journal of Institute of Control, Robotics and Systems
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• v.13 no.7
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• pp.616-623
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• 2007

A dual micro gas sensor array was fabricated using nano sized $SnO_2$ thin films which had good sensitivities to CO and combustible gases, or $H_2S$ gas for air quality sensors in automobile. The already existed air quality sensor detects oxidizing gases and reducing gases, the air quality sensor(AQS), located near the fresh air inlet detected the harmful gases, the fresh air inlet door/ventilation flap was closed to reduce the amount of pollution entering the vehicle cabin through HVAC(heating, ventilating, and air conditioning) system. In this study, to make $SnO_2$ thin film AQS sensor, thin tin metal layer between 1000 and $2000{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2$, $SnO_2$(pt) and $SnO_2$(+CuO) were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2$(+Pt) and $SnO_2$(CuO) showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.20 no.4
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• pp.238-244
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• 2008

This study investigates on the improvement of inhalation effect of hood which attached new device named as "gas-guide-device" in local exhaust ventilation system for the effective elimination of harmful material and dust in manufacturing factory. The gas-guide-device having a diamond shape is composed of width (b) and two sides of a device (X, Y) and its size is selected the industrial hood under application in manufacturing factory after due consideration. In order to investigate the effect of gas-guide-device, numerical and experimental study is performed that the flow velocity is calculated and is measured by a commercial program "COMSOL $Multiphysics^{TM}$" and a hot wire type of anemometer, respectively. The numerical and experimental results are revealed is a similar pattern and flow velocity has improved to hood attached gas-guide-device. Also, the numerical method and result is also verified the dependance. Moreover, the optimum shape and size of gas-guide-device is revealed that the width (b) and the ratio of two sides of gas-guide-device (X, Y) has 125mm and 4 to 6.

• Transactions of the Korean hydrogen and new energy society
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• v.28 no.2
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• pp.174-180
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• 2017

Recently, the world faces the environmental problem such as air pollution due to harmful gas discharged from car and abnormal climate due to the green-house gases increased by the discharge of $CO_2$. Compressed Natural Gas (CNG), one of alternative for this problem, is less harmful, compared to the existing fossil fuel, as gaseous fuel, and less carbon in fuel ingredients and carbon dioxide generation rate relatively favorable more than the existing fuel. However, CNG fuel has the weakness of slow flame propagation speed and difficult fast burn. On the other hand, hydrogen does not include carbon in fuel ingredients, and does not discharge harmful gas such as CO and HC. Moreover, it has strength of quick burning velocity and ignition is possible with small ignition energy source and it's has wide Lean Flammability Limit. If using this hydrogen with CNG fuel, the characteristics of output and discharge gas is improved by the mixer's burning velocity improved, and, at the same time, is possible to have stable lean combustion with the reduction of $CO_2$ expected. Therefore, this research tries to identify the characteristics of engine and emission gas when mixing CNG fuel and hydrogen in each portion and burning them in spark igniting engine, and grasp the lean combustion limit and emission gas characteristics according and use it as the basic data of hydrogen-CNG premixed engine.

• Transactions of the Korean hydrogen and new energy society
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• v.27 no.4
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• pp.357-364
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• 2016

Recently, the world faces the environmental problem such as air pollution due to harmful gas discharged from car and abnormal climate due to the green-house gases increased by the discharge of $CO_2$. Compressed Natural Gas (CNG), one of alternative for this problem, is less harmful, compared to the existing fossil fuel, as gaseous fuel, and less carbon in fuel ingredients and carbon dioxide generation rate relatively favorable more than the existing fuel. However, CNG fuel has the weakness of slow flame propagation speed and difficult fast burn. On the other hand, hydrogen does not include carbon in fuel ingredients, and does not discharge harmful gas such as CO and HC. Moreover, it has strength of quick burning velocity and ignition is possible with small ignition energy source and it's has wide Lean Flammability Limit. If using this hydrogen with CNG fuel, the characteristics of output and discharge gas is improved by the mixer's burning velocity improved, and, at the same time, is possible to have stable lean combustion with the reduction of $CO_2$ expected. Therefore, this research tries to identify the characteristics of engine and emission gas when mixing CNG fuel and hydrogen in each portion and burning them in spark igniting engine, and grasp the combustion stability and emission gas characteristics according and use it as the basic data of hydrogen-CNG premixed engine.

• Transactions of the Korean Society of Automotive Engineers
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• v.10 no.4
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• pp.43-50
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• 2002

In the present study, reduction of harmful exhaust gas in a diesel engine using stratified injection system of dual fuel (diesel fuel and methanol) was tried. The nozzle and fuel injection pump of conventional injection system were remodeled to inject dual fuel in order from the same injector. The quantity of each fuel was controlled by micrometers, which were mounted at rack of injection pumps. The injection ratio of dual fuel was certificated by volumetric ratio in injection quantity test. Cylinder pressure and exhaust gas were measured and analyzed under various supply condition of duel fuel. We confirmed that combustion of dual fuel was performed successful1y by using modified injection system in a D.I. diesel. Soot and NOx are simultaneously reduced by stratified injection without large deterioration of thermal efficiency, but THC and CO are relatively increased.

• Journal of Adhesion and Interface
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• v.21 no.2
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• pp.51-57
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• 2020

Recently, there has been growing interest in the study of removal of harmful and hazardous pollutants emitted by industrial activities. In this study, we have developed porous activated carbon fibers prepared by a water vapor activation method and analyzed the adsorptions of the harmful gases with electrochemical responses of activated carbon fibers. To control the uniformity of pore structures, active reaction areas, and active sites, the reaction conditions of activation temperatures were varied from 750 to 850 ℃ with the predetermined reaction time intervals (30 to 240 min). The SO₂ and NO gas adsorptions of activated carbon fibers prepared by various reaction conditions were analyzed and monitored by electrochemical sensor responses. In particular, the activated carbon fibers prepared at the reaction temperature of 850 ℃ and time of 45 min showed the highest specific surface area (1,041.9 ㎡/g) and pore characteristics (0.42 ㎤/g), and excellent adsorption capabilities of SO₂ (1.061 mg/g) and NO (1.210 mg/g) gases, respectively.

• Journal of environmental and Sanitary engineering
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• v.23 no.3
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• pp.9-22
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• 2008

This study was conducted to develop a system that processes harmful gases and dust, which being generated in the production of micro-inorganic fabric. This can be obtained by melt spinning raw materials such as agalmatolite, fluorspar, limestone, silica under high temperature at $1500-1600^{\circ}C$ in a glass recuperator using a dry method by Cyclone Reactor or Envelope Type (ET) type Bag Filter. If the number of the members of Korea Glass Industry Association reaches up to 45, the damage of the harmful gas being generated in recuperator should not be small. In addition, research of existing facilities showed the most of harmful gas treatment facilities which adopt wet treatment or semi-dry treatment process. This was caused the problems for wastewater and the second pollutive materials. Moreover, in the dust collecting facility behind recuperator, it is also problematic that electric dust collector requires enormous initial investment. We have researched various methods to show both economic and efficient new processes for the preventive facilities of recuperator. As the result of the experiments, the removal efficiencies of HF and SOx were 99% and 87%, respectively. Although it was insignificant reaction, a pretty much interesting result that NOx showed an absorption reaction with $Ca(OH)_2$(removal efficiency was more than 25%) was obtained.

• Journal of The Korean Society of Agricultural Engineers
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• v.62 no.1
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• pp.71-81
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• 2020

Enclosed pig house are creating an environment with high concentrations of gas and dust. Poor conditions in pig farms reduce pig weight and increase disease and accidents for livestock workers. In the pig house, the high concentration of harmful gas may cause asphyxiation accidents to workers and chronic respiratory disease by long-term exposure. As pig farm workers have been aging and feminized, the damage to the health of the harsh environment is getting serious, and real-time monitoring is needed to prevent the damage. However, most of the measuring devices related to humidity, harmful gas, and fine dust except temperature sensors are exposed to high concentrations of gas and dust inside pig house and are difficult to withstand for a long time. The purpose of this study is to develop an wearable based device to monitor the hazardous environment exposed to workers working in pig farms. Based on the field monitoring and previous researches, the measurement range and basic specifications of the equipment were selected, and wearable based device was designed in terms of utilization, economic efficiency, size and communication performance. Selected H₂S and NH₃ sensors showed the average error of 5.3% comparing to standard gas concentrations. The measured data can be used to manage the working environment according to the worker's location and to obtain basic data for work safety warning.