• Title/Summary/Keyword: HSG

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Influence of the process conditions for the amorphous silicon on the HSG-Si formation (비정질 규소막의 공정조건이 HSG-Si 형성에 미치는 영향)

  • Jeong, Jae-Young;Kang, Seong-Jun;Joung, Yang-Hee
    • The Journal of the Korea institute of electronic communication sciences
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    • v.10 no.11
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    • pp.1251-1256
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    • 2015
  • In this paper, the processing conditions of the amorphous silicon film growth were investigated the effect in forming the HSG-Si on the surface of the storage electrode. As a result, when the amorphous silicon film phosphorus concentration is greater than $5.5{\pm}0.1E19atoms/cm^3$, HSG-Si is not formed correctly and showed the concentration dependency of HSG formation. Also, the optimum condition of the phosphorus concentration for amorphous silicon and HSG thickness are $4.5E19atoms/cm^3$ and $450{\AA}$, respectively, because of the HSG thickness over the $500{\AA}$ create to bit failure according to a short of the electrodes and the electrode.

Hemispherical Grained Silicon formation Condition on In-Situ Phosphorous Doped Amorphous-Si Using The Seeding Method (Seeding Method를 이용한 인이 도우핑된 Amorphous-Si에서의 HSG형성 조건)

  • 정양희;강성준
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.5 no.6
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    • pp.1128-1135
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    • 2001
  • In this paper, a new HSG-Si formation technology, "seeding method', which employs Si$_2$H$_{6}$-molecule irradiation and annealing, was applied for realizing 64Mbit DRAMs. By using this technique, grain size controlled HSG-Si can be fabricated on in-situ phosphorous-doped amorphous-Si electrode. The new HSG-Si fabrication technology achieves twice the storage capacitance with high reliability for the stacked capacitors. In this technique, optimum process conditions of the phosphorous concentration, storage polysilicon deposition temperature and thickness of hemispherical grain silicon are in the range of 3.0-4.0E19atoms/㎤, 53$0^{\circ}C$ and 400$\AA$, respectively. In the 64M bit DRAM capacitor using optimum process conditions, limit thickness of dielectric nitride is about 65$\AA$.

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Crystallopraphic Growth Orientation of Polycrystalline HSG Silicon Film (반구형 다결정 실리콘 박막의 결정학적 성장방위)

  • Sin, Dong-Won;Park, Chan-Ro;Park, Chan-Gyeong;Kim, Jong-Cheol
    • Korean Journal of Materials Research
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    • v.4 no.7
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    • pp.750-758
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    • 1994
  • The purpose of present study is to find out the formation mechanism of hemi-spherical grained(HSG) polysilicon film. Silicon film was deposited using LPCVD. Polycrystalline silicon film was deposited at $575^{\circ}C$ contained crystalline HSG in the amorphous matrix phase. The crystalline HSG can be categorized into two grains : lower grains and upper grains. Lower grains are located at interface between silicon dioxide and silicon film, and upper grains are located at surface. The growth orientations of HSG were identified as (311) or (111) directions for lower grains and perferentially (110) direction for upper grains. This difference of growth orientations seems to be caused by the difference of formation mechanisms. That is, lower grain is formed by soild phase crystallization, on the other hand, upper grain is formed by surface diffusion of silicon atoms. It was thus, proposed that the formation of practical HSG polysilicon film is mainly controlled by surface diffusion of silicon atoms.

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The Accuracy of Hysterosalpingography for Evaluating Female Infertility (불임 검사시 자궁난관 조영술의 진단 정확도)

  • Park, Joon Cheol;Kim, Jong In;Rhee, Jeong Ho
    • Clinical and Experimental Reproductive Medicine
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    • v.32 no.3
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    • pp.223-230
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    • 2005
  • Objective: This study was performed to evaluate the accuracy of hysterosalpingography (HSG) for evaluating female infertility patients by comparison with hysteroscopic and laparoscopic examination. Methods and Material: Total 219 infertile patients were retrospectively analyzed between January 1, 2002 and December 31, 2003. Ninety seven patients (44.3%) were primary infertility, 122 patients (55.7%) were secondary infertility. We performed hysteroscopic and laparoscopic examination on next cycle when HSG revealed any abnormal finding, and 3~6 cycles later if HSG was normal. Results: The accuracy of HSG was 65.2% compared with hysteroscopic examination (sensitivity 88.4%, specificity 46.4%, false positive rate 53.6%, false negative rate 11.6%). The most common abnormal finding of hysteroscopy was uterine synechia (67.4%) followed by endometrial polyp, uterine anomaly (e.g. uterine septum), endometrial hyperplasia. Compared with laparoscopic examination, the accuracy of HSG was 76.9% (sensitivity 98.9%, specificity 70.6%, +LR 3.36, -LR 0.02). The positive predictive value of normal patent tube was excellent (99.6%) but that of proximal tubal blockage was only 46.7%. The unilateral tubal obstruction of HSG was poor accuracy (+LR 3.85 -LR 0.68) and 70% of those was patent by laparoscopic examination. Laparoscopic examination also revealed that 53% of patients had peritubal adhesion and 37% of patients has additional pelvic findings, especially endometriosis. Among the patients had normal HSG, 53.5% patients with normal ultrasonography was diagnosed endometriosis (25.6% of them had endometriosis stage I-II). Conclusion: Normal HSG shows a high negative predictive value. Nevertheless, the incidence of associated pelvic disease in the normal HSG group is high enough to warrant diagnostic laparoscopy if nonsurgical treatment is unsuccessful. Because HSG has poor accuracy in predicting distal tubal blockage and peritubal adhesion, and poor positive predictive value of proximal tubal blockage, laparoscopic examination could be considered in abnormal HSG group.

A Study on Capacitance Enhancement by Hemispherical Grain Silicon and Process Condition Properties (Hemispherical Grain Silicon에 의한 정전용량 확보 및 공정조건 특성에 관한 연구)

  • 정양희;정재영;이승희;강성준;이보희;유일현;최남섭
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.4 no.4
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    • pp.809-815
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    • 2000
  • The box capacitor structure with HSG-Si described here reliably achieves a cell capacitance of 28fF with a cell area of a $0.4820\mum^2$ for 128Mbit DRAM. An HSG-Si formation technology with seeding method, which employs Si2H6 molecule irradiation and annealing, was applied for realizing 64Mbit and larger DRAMS. By using this technique, grain size controlled HSG-Si can be fabricated on in-situ phosphorous doped amorphous silicon electrodes. The HSG-Si fabrication technology achieves twice the storage capacitance with high reliability for the stacked capacitors.The box capacitor structure with HSG-Si described here reliably achieves a cell capacitance of 28fF with a cell area of a $0.4820\mum^2$ for 128Mbit DRAM. An HSG-Si formation technology with seeding method, which employs Si2H6 molecule irradiation and annealing, was applied for realizing 64Mbit and larger DRAMS. By using this technique, grain size controlled HSG-Si can be fabricated on in-situ phosphorous doped amorphous silicon electrodes. The HSG-Si fabrication technology achieves twice the storage capacitance with high reliability for the stacked capacitors.

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The Relationship of Serum Calcium and Magnesium Levels to Depression and Anxiety Symptoms in Homemarkers (주부들의 심리적 자작 증세와 혈청칼슘 및 마그네슘 농도와의 관련성)

  • 박귀선
    • Journal of Nutrition and Health
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    • v.31 no.1
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    • pp.102-107
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    • 1998
  • This study was conducted to investigate the relationship of serum calcium and magnesium levels to depression and anxiety symptoms in 80 homemarker. Fasting blood samples were collected and serum calcium and magnesium concentrations were measured. At the same time, psychological conditions of subjects were estimated by questionnaire. As the result of psychological test, eighty homemarkers were divided into two groups according to psychologicaltest scores. The subjects in one group got high pssycholgoical test scores as high score group (HSG) and the others got low physchological test scores as low score group(LSG). Serum calcium and magnesium concentrations were significantly(p<0.05) lower in HSG than in HSG than in LSG. Many a subject who belonged to HSG appeared to have depression and anxiety symptoms. Drepression and anxiety scores of the subjects with calcium supplementation were significantly (p<0.05) lower than those without calcium supplementation . After calcium supplementation, depressiion and anxiety scores were significantly (p<0.05) decreased in HSG and serum calcium and magnesium concentrations in HSG were significantly increased to normal ranges . This results suggested that psychological conditions of homemarkers might be affected by serum calcium and magnesium levels.

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Estimation of SCS Runoff Curve Number and Hydrograph by Using Highly Detailed Soil Map(1:5,000) in a Small Watershed, Sosu-myeon, Goesan-gun (SCS-CN 산정을 위한 수치세부정밀토양도 활용과 괴산군 소수면 소유역의 물 유출량 평가)

  • Hong, Suk-Young;Jung, Kang-Ho;Choi, Chol-Uong;Jang, Min-Won;Kim, Yi-Hyun;Sonn, Yeon-Kyu;Ha, Sang-Keun
    • Korean Journal of Soil Science and Fertilizer
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    • v.43 no.3
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    • pp.363-373
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    • 2010
  • "Curve number" (CN) indicates the runoff potential of an area. The US Soil Conservation Service (SCS)'s CN method is a simple, widely used, and efficient method for estimating the runoff from a rainfall event in a particular area, especially in ungauged basins. The use of soil maps requested from end-users was dominant up to about 80% of total use for estimating CN based rainfall-runoff. This study introduce the use of soil maps with respect to hydrologic and watershed management focused on hydrologic soil group and a case study resulted in assessing effective rainfall and runoff hydrograph based on SCS-CN method in a small watershed. The ratio of distribution areas for hydrologic soil group based on detailed soil map (1:25,000) of Korea were 42.2% (A), 29.4% (B), 18.5% (C), and 9.9% (D) for HSG 1995, and 35.1% (A), 15.7% (B), 5.5% (C), and 43.7% (D) for HSG 2006, respectively. The ratio of D group in HSG 2006 accounted for 43.7% of the total and 34.1% reclassified from A, B, and C groups of HSG 1995. Similarity between HSG 1995 and 2006 was about 55%. Our study area was located in Sosu-myeon, Goesan-gun including an approx. 44 $km^2$-catchment, Chungchungbuk-do. We used a digital elevation model (DEM) to delineate the catchments. The soils were classified into 4 hydrologic soil groups on the basis of measured infiltration rate and a model of the representative soils of the study area reported by Jung et al. 2006. Digital soil maps (1:5,000) were used for classifying hydrologic soil groups on the basis of soil series unit. Using high resolution satellite images, we delineated the boundary of each field or other parcel on computer screen, then surveyed the land use and cover in each. We calculated CN for each and used those data and a land use and cover map and a hydrologic soil map to estimate runoff. CN values, which are ranged from 0 (no runoff) to 100 (all precipitation runs off), of the catchment were 73 by HSG 1995 and 79 by HSG 2006, respectively. Each runoff response, peak runoff and time-to-peak, was examined using the SCS triangular synthetic unit hydrograph, and the results of HSG 2006 showed better agreement with the field observed data than those with use of HSG 1995.

A Proposal of Hazard/Risk Assessment Criteria and an Asbestos Management Method for Asbestos-containing Building Materials

  • Park, Wha-Me;Kim, Yoon-Shin
    • Journal of Environmental Health Sciences
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    • v.38 no.1
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    • pp.66-72
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    • 2012
  • Objectives: The AHERA method by the US EPA, ASTM E2356-04, and HSG264 by the UK HSE, all of which are hazard/risk assessment methods for asbestos-containing building materials, were reviewed and compared based on 231 homogeneous areas. In addition, the current Act on Asbestos Safety Management (enforcement: April 29, 2012) was reviewed and analyzed. This trial provided fundamental data for improving the current asbestos hazard/risk assessment method. Methods: For the hazard/risk assessment of 77 asbestos-containing public buildings including schools, 231 homogeneous areas were selected, each of which was assessed using AHERA, ASTM E2356-04, and HSG264. Results: The matching rate of the hazard/risk assessment stood at 20.4 percent between AHERA and ASTM, at 71.4 percent between AHERA and HSG264 and at 17.8 percent between ASTM and HSG264. The AHERA method includes a seven-category rating scale. There were three categories, two of which have three subcategories. ASTM provides two decision-making charts consisting of ten rating scales for current condition estimation and for potential for disturbance estimation. In addition, the HSG264 method has a total of 20 scores with four items, and then provides four grades. This HSG264 method cannot clearly separate current condition and potential for disturbance. Conclusions: In the Korean Act on Asbestos Safety Management, the hazard/risk assessment method for asbestos-containing building materials should consider balance between current condition estimation and the potential for disturbance estimation.

Analysis of the Predictive Validity of College Entrance Criteria

  • Bae, Hyun-Wung
    • Journal of the Korean Data and Information Science Society
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    • v.18 no.4
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    • pp.973-983
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    • 2007
  • Korea Military Academy has been using College Scholastic Ability Test(CSAT) and High School Grades(HSG) with other measures such as an Essay-type Test(ET), Physical Test(PT) and Personal Interview(PI) as criteria for entrance. The purpose of study is to investigate the properness of the criteria in admission decisions by examining the relationship between the college GPA and criteria, and the prediction of academic performance. The study showed that CSAT and HSG are significantly correlated with the college GPA, and these two criteria are better predictors for academic performance. Regression analysis also provided an important message that HSG is a better predictor than CSAT.

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시선집중, 선진안전사업장 - 열정과 참여의 자율안전관리 적극 전개, HSG 중공업(주)

  • Jeong, Tae-Yeong
    • The Safety technology
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    • no.182
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    • pp.19-21
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    • 2013
  • 우리나라 경제발전 역사에서 제철, 조선, 기계제조업 등의 중공업은 따로 떼어 놓고 생각할 수 없을 정도로 막대한 영향을 미쳤다. 중공업이 발전하면서 다른 여타 산업의 기반이 조성된 것은 물론이고, 중공업 제품들이 수출의 일등 공신 역할을 하면서 경제성장에 크게 이바지한 것이다. 이처럼 남다른 위치에 있는 중공업 기업 가운데 특히 눈에 띄는 회사가 있다. 바로 46회에 이어 47회 무역의 날에서 '2천만 불 수출탑'을 달성한 HSG 중공업(주)이 그곳이다. 지난 1989년 금광기업사로 출범한 이곳은 LNG 운반선의 펌프타워를 비롯한 대형 조선기자재와 해양플랜트, 하역운반설비 등을 전문적으로 제작하는 기업이다. 그 명성에 걸맞게 HSG 중공업(주)에서는 자재 구매에서부터 설계, 제작까지 모든 공정이 이뤄지고 있다. 단순하게 제품만을 생산하고 있다고 판단하면 큰 오산이다. 이곳은 삼성중공업, 현대중공업, 대우조선해양 등 국내 유수의 기업은 물론 샌드빅, 지멘스 등 외국기업으로부터 많은 물량을 수주받고 있을 정도로 기술력과 품질 모두를 인정받고 있다. 그렇다면 무엇이 이처럼 회사를 성장 발전시켜나갔을까. 이곳 관계자들은 이 같은 물음의 답으로 하나같이 '안전'을 꼽고 있다. 근로자들의 안전을 위해 매진한 것이 곧 고품질의 제품을 생산해 낼 수 있는 밑거름이 됐다는 것이다. 무재해 일터를 구축하기 위해 빈틈없는 안전관리를 전개해 나가고 있는 HSG 중공업(주)을 찾아가봤다.

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