• 센서학회지
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• 제17권3호
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• pp.183-187
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• 2008

A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It is realized by using a zinc oxide (ZnO) thin-film material with a Ni-seed layer as a sensing material and by bulk micromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-seed layer was embedded with ZnO sensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was 9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 ppm, respectively. In addition, the minimum detection level of the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 V for 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The response and recovery times were 3 and 5 min, respectively. The consumption power of the Pt micro-heater under sensor testing was 184 mW and its operating temperature was $400^{\circ}C$.

• 대한원격탐사학회지
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• 제35권4호
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• pp.503-516
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• 2019

We have estimated the vertical column density (VCD) of formaldehyde (HCHO) on a global scale using a multiple linear regression method (MRM) with Ozone Monitoring Instrument (OMI) and Moderate-Resolution Imaging Spectroradiometer (MODIS) data. HCHO VCDs were estimated in regions of biogenic, pyrogenic, and anthropogenic emissions using independent variables, including $NO_2$ VCD, land surface temperature (LST), an enhanced vegetation index (EVI), and the mean fire radiative power (MFRP), which are strongly correlated with HCHO. To evaluate the HCHO estimates obtained using the MRM, we compared estimates of HCHO VCD data measured by OMI ($HCHO_{OMI}$) with those estimated by multiple linear regression equations (MRE) ($HCHO_{MRE}$). Good MRM performances were found, having the average statistical values (R = 0.91, slope = 1.03, mean bias = $-0.12{\times}10^{15}molecules\;cm^{-2}$, percent difference = 11.27%) between $HCHO_{MRE}$ and $HCHO_{OMI}$ in our study regions where high HCHO levels are present. Our results demonstrate that the MRM can be a useful tool for estimating atmospheric HCHO levels.

• 한국전기전자재료학회논문지
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• 제29권12호
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• pp.803-808
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• 2016

In this work, one dimension $In_2O_3$ nanostructures as detecting materials for indoor toxic gases were synthesized by an electrospinning process. The morphology of electrospun $In_2O_3$ nanofibers was controlled by electrolyte composition, applied voltage and working distance between a nozzle and a substrate. The synthesized $In_2O_3$ nanofibers-based paste with/without carbon black additives was prepared for the integration on a sensor device. The integration of $In_2O_3$ sensing materials was conducted by a hand-printing of the paste into the interdigit Au electrodes patterned on Si wafer. Gas sensing properties on CO and HCHO gases were characterized at $300^{\circ}C$. The evaluated sensing properties such as sensitivity, response time and recovery time were improved in $In_2O_3$ nanofiber pastes with carbon black, compared to the paste without carbon black.

• 한국재료학회지
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• 제33권5호
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• pp.195-204
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• 2023

Micro-electronic gas sensor devices were developed for the detection of carbon monoxide (CO), nitrogen oxides (NO_x), ammonia (NH₃), and formaldehyde (HCHO), as well as binary mixed-gas systems. Four gas sensing materials for different target gases, Pd-SnO₂ for CO, In₂O₃ for NO_x, Ru-WO₃ for NH₃, and SnO₂-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were then fabricated using a micro sensor platform. The gas sensing behavior and sensor response to the gas mixture were examined for six mixed gas systems using the experimental data in MEMS gas sensor arrays in sole gases and their mixtures. The gas sensing behavior with the mixed gas system suggests that specific adsorption and selective activation of the adsorption sites might occur in gas mixtures, and allow selectivity for the adsorption of a particular gas. The careful pattern recognition of sensing data obtained by the sensor array made it possible to distinguish a gas species from a gas mixture and to measure its concentration.

• 한국재료학회지
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• 제34권5호
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• pp.235-241
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• 2024

Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NO_x), and two odor gases, ammonia (NH₃) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO₂ for CO, In₂O₃ for NO_X, Ru-WO₃ for NH₃, and hybridized SnO₂-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

• 대한원격탐사학회지
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• 제31권6호
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• pp.523-530
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• 2015

본 연구에서는 다중회귀분석법과 Ozone Monitoring Instrument(OMI), Moderate Resolution Imaging Spectroradiometer(MODIS) 자료를 이용하여 2005년 1월부터 2008년 7월 사이 아시아 주요도시 지역의 포름알데하이드 층적분농도를 동북아시아에 위치한 3개도시(베이징, 서울, 도쿄)와 동남아시아에 위치한 3개도시(뉴델리, 다카, 방콕)에서 처음으로 추정하였다. 동북아시아의 3개 도시에서는 OMI로 측정된 포름알데하이드의 층적분농도($HCHO_{OMI}$)와 다중회귀분석방법으로 추정된 포름알데하이드의 층적분농도($HCHO_{MRM}$) 사이의 높은 상관성(0.78 < $R^2$ < 0.82)을 보였다. 동남아시아의 주요도시에서는 동북아시아 지역에 비해 $HCHO_{OMI}$와 $HCHO_{MRM}$사이의 낮은 상관성을 발견 할 수 있었다. 이외에도, 다중회귀분석법의 편중되지 않은 평가를 위하여, 다중회귀분석식을 도출해내기 위한 모델링 그룹과 다중회귀분석법의 성능을 보여줄 검증그룹으로 나누어 다중회귀분석법의 성능을 평가하였다. 본 연구는 아시아 일부 지역에서 다중회귀 분석법이 포름알데하이드 칼럼농도 추정에 있어 위성 관측이 어려울 경우 대안으로 활용될 수 있음을 제시하고 있다.

• 센서학회지
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• 제33권5호
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• pp.310-317
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• 2024

Formaldehyde (HCHO) is a major primary indoor air pollutant with various adverse effects on the human body, includingsuch as sick building syndrome, lung cancer, and nasal cancer. Therefore, gas sensors for effective HCHO detection detecting HCHO are crucial for maintaining a healthy indoor environments, and research is being conducted to develop high-performance sensors for this purpose. AnOne of the effective methods for enhancing the to enhance sensing properties is involves modifying the p-n heterojunction structure, which improves sensing through via electronic sensitization based on the expanded depletion region and chemical sensitization that dissociates specific gases. In this studyHerein, weWe fabricated NiO-decorated In₂O₃ NRs using an e-beam evaporator based on the glancing angle deposition technique by optimizing the NiO thickness (0, 1, 2, and 3 nm). When exposed to 50 ppm HCHO, NiO-decorated In₂O₃ NRs showed a 3.91%-fold enhancement in the gas response (Ra/Rg-1= 23.9) and a 41.47% faster response time (40.7 s) than-compared to bare In₂O₃ NRs with an extremely low theoretical detection limit of ≈approximately 9.3 ppb.

• ETRI Journal
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• 제34권5호
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• pp.713-718
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• 2012

Sensor nodes in ubiquitous sensor networks require autonomous replacement of deteriorated gas sensors with reserved sensors, which has led us to develop an encapsulation technique to avoid poisoning the reserved sensors and an autonomous activation technique to replace a deteriorated sensor with a reserved sensor. Encapsulations of $In_2O_3$ nanoparticles with poly(ethylene-co-vinyl alcohol) (EVOH) or polyvinylidene difluoride (PVDF) as gas barrier layers are reported. The EVOH or PVDF films are used for an encapsulation of $In_2O_3$ as a sensing material and are effective in blocking $In_2O_3$ from contacting formaldehyde (HCHO) gas. The activation process of $In_2O_3$ by removing the EVOH through heating is effective. However, the thermal decomposition of the PVDF affects the property of the $In_2O_3$ in terms of the gas reactivity. The response of the sensor to HCHO gas after removing the EVOH is 26%, which is not significantly different with the response of 28% in a reference sample that was not treated at all. We believe that the selection of gas barrier materials for the encapsulation and activation of $In_2O_3$ should be considered because of the ill effect the byproduct of thermal decomposition has on the sensing materials and other thermal properties of the barrier materials.

• 센서학회지
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• 제26권6호
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• pp.420-426
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• 2017

A colorimetric sensor was investigated to achieve a low-cost warning device for harmful gaseous formaldehyde (HCHO). The sensor is based on selective reactions between hydroxylamine sulfate and HCHO, leading to the production of sulfuric acid. The produced acid results in color-changing response through the acid-base reaction with dye molecules impregnated on a solid membrane substrate. For attaining this purpose, sensors were fabricated by drop-casting a dye solution prepared using different pH indicators on various commercially available polymer sheets, and their colorimetric responses were evaluated in terms of sensitivity and reliability. The colorimetric sensor using bromophenol blue (BPB) and nylon sheet was found to exhibit the best performance in HCHO detection. An initial bluish green of a sensor was changed to yellow when exposed to gaseous formaldehyde. The color change was recorded using an office scanner and further analyzed in term of RGB distance for quantifying sensor's response at different HCHO(g) concentrations. It exhibited a recognizable colorimetric response even at 50 ppb, being lower than WHO's standard of 80 ppb. In addition, the sensor was found to have quite good selectivity in HCHO detection under the presence of common volatile organic compounds such as ethanol, toluene, and hexane.

• 센서학회지
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• 제17권3호
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• pp.203-209
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• 2008

Thick film formaldehyde (HCHO) gas sensors were fabricated by using $La_1_{-x}Sr_xMO_3$ (M= Fe, Co, Mn) ceramics. The powders of $La_1_{-x}Sr_xMO_3$ (M=Fe, Co, Mn) were synthesized by conventional solid-state reaction method. By using the $La_1_{-x}Sr_xMO_3$ (M=Fe, Co, Mn) paste, the thick-film formaldehyde sensors were prepared on the alumina substrate by silkscreen printing method. The experimental results revealed that $La_1_{-x}Sr_xMO_3$ (M= Fe, Co, Mn) ceramic powder has a perovskite structure and the thick-film sensor shows excellent gas-sensing characteristics to formaldehyde gas (sensitivity of $La_{0.8}Sr_{0.2}FeO_3$, S= 14.7 at operating temperature of $150^{\circ}C$ in 50 ppm HCHO ambient).