• The Journal of Korean Institute of Communications and Information Sciences
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• v.40 no.2
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• pp.397-407
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• 2015

In this paper, we designed 1 chip IC for 3-axis gyroscope and 3-axis accelerometer used for various IoT/M2M mobile devices such as smartphone, wearable device and etc. We especially focused on analysis of gyroscope noise and proposed new architecture for removing various noise generated by gyroscope MEMS and IC. Gyroscope, accelerometer and geo-magnetic sensors are usually used to detect user motion or to estimate moving distance, direction and relative position. It is very important element to designing a low noise IC because very small amount of noise may be accumulated and affect the estimated position or direction. We made a mathematical model of a gyroscope sensor, analyzed the frequency characteristics of MEMS and circuit, designed a low noise, compact and low power 1 chip 6-axis inertial sensor IC including 3-axis gyroscope and 3-axis accelerometer. As a result, designed IC has 0.01dps/${\sqrt{Hz}}$ of gyroscope sensor noise density.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.195-197
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• 1993

In this paper, a planar vibratory gyroscope is designed and fabricated in macro model. Elementary experiment and test are done for micro model. This gyroscope has a double gimbal structure with an active dimension $80{\times}120{\times}1\;mm^3$. Outer gimbal vibration is generated by electromagnetic force using ferrite E-core wounded by coil. Inner gimbal vibration is detected by inductive sensor. It is demonstrated' that mechanical and electrical symmetries are important for improvement of vibratory gyroscope.

• Korean Journal of Applied Biomechanics
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• v.21 no.4
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• pp.495-501
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• 2011

The purpose of this study was to develop the inertial sensor module system to detect gait event using single angular rate sensor(gyroscope), and evaluate the accuracy of this system. This sensor module is attached at the heel and gait events such as heel strike, foot flat, heel off, toe off are detected by using proposed automatic event detection algorithm. The developed algorithm detect characteristics of pitch data of the gyroscope to find gait event. To evaluate the accuracy of system, 3D motion capture system was used and synchronized with sensor module system for comparison of gait event timings. In experiment, 6 subjects performed 5 trials level walking with 3 different conditions such as slow, preferred and fast. Results showed that gait event timings by sensor module system are similar to that by kinematic data, because maximum absolute errors were under 37.4msec regardless of gait velocity. Therefore, this system can be used to detect gait events. Although this system has advantages of small, light weight, long-term monitoring and high accuracy, it is necessary to improve the system to get other gait information such as gait velocity, stride length, step width and joint angles.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.39C no.1
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• pp.82-89
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• 2014

Recently, inertial sensors are popularly used for the location and position recognition of small devices for M2M/IoT. In this paper, we designed low power, low noise, small sized 6-axis inertial sensor IC for mobile applications, which uses a 3-axis piezo-electric gyroscope sensor and a 3-axis piezo-resistive accelerometer sensor. Proposed IC is composed of 3-axis gyroscope readout circuit, two gyroscope sensor driving circuits, 3-axis accelerometer readout circuit, 16bit sigma-delta ADC, digital filter and control circuit and memory. TSMC $0.18{\mu}m$ mixed signal CMOS process was used. Proposed IC reduces 27% of the current consumption of LSM330.

• Smart Structures and Systems
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• v.31 no.3
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• pp.301-309
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• 2023

Tilt is a key indicator of structural safety. Real-time monitoring of tilt responses helps to evaluate structural condition, enable cost-effective maintenance, and enhance lifetime resilience. This paper presents a prototype wireless sensing system for structural tilt measurement. Long range (LoRa) technology is adopted by the sensing system to offer long-range wireless communication with low power consumption. The sensor integrates a gyroscope and an accelerometer as the sensing module. Although tilt can be estimated from the gyroscope or the accelerometer measurements, these estimates suffer from either drift issue or high noise. To address this challenging issue and obtain more reliable tilt results, two sensor fusion algorithms, the complementary filter and the Kalman filter, are investigated to fully exploit the advantages of both gyroscope and accelerometer measurements. Numerical simulation is carried out to validate and compare the sensor fusion algorithms. Laboratory experiment is conducted on a simply supported beam under moving vehicle load to further investigate the performance of the proposed wireless tilt sensing system.

• Journal of Korea Multimedia Society
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• v.20 no.8
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• pp.1421-1429
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• 2017

Human activity recognition has been studied using various sensors and algorithms. Human activity recognition can be divided into sensor based and vision based on the method. In this paper, we proposed an activity recognition system using acceleration sensor and gyroscope sensor in smartphone among sensor based methods. We used Deep Belief Network (DBN), which is one of the most popular deep learning methods, to improve an accuracy of human activity recognition. DBN uses the entire input set as a common input. However, because of the characteristics of different time window depending on the type of human activity, the RBMs, which is a component of DBN, are configured hierarchically by combining them from different time windows. As a result of applying to real data, The proposed human activity recognition system showed stable precision.

• Journal of Sensor Science and Technology
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• v.24 no.4
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• pp.274-279
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• 2015

This paper describes optimizing fabrication methods for 2-axis electrically levitated MEMS gyroscope. Electrostatically levitated gyroscope has very high potential of performance due to the fact that its proof mass is not mechanically bound to any other structures, but its complex structure and difficulty of fabrication holds back the research that only a few researches have been reported. In this work, fabrication method for glass-silicon-glass 3-floor structure for 2-axis electrically levitated MEMS gyroscope is presented, including simplified multi-level glass etch method utilizing photoresist attack, preventing metal diffusion by adding middle layer of metal electrode, overcoming Deep RIE limitation by separate fabrication of silicon structures and keeping the electrode safe from dicing debris.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.3
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• pp.258-264
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• 2009

This paper presents two control algorithms for the frequency and amplitude of the resonator of a micro sensor. One algorithm excites the resonator at its a priori unknown resonant frequency, and the other algorithm alters the resonator dynamics to place the resonant frequency at a fixed frequency, chosen by the designer. Both algorithms maintain a specified amplitude of oscillations. The control system behavior is analyzed using an averaging method, and a quantitative criterion is provided for the selecting the control gain to achieve stability. Tracking and estimation accuracy of the natural frequency under the presence of measurement noise is also analyzed. The proposed control algorithms are applied to the MEMS dual-mass gyroscope without mechanical connecting beam between two proof-masses. Simulation results show the effectiveness of the proposed control algorithms which guarantee the proof-masses of the gyroscope to move in opposite directions with the same resonant frequency and oscillation amplitude.

• Journal of Sensor Science and Technology
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• v.5 no.4
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• pp.47-56
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• 1996

The basic principle and characteristics of a DTG(dynamically tuned gyroscope) are presented in this paper, which is used for the detection of disturbance and for the stabilization of gimbal. An accurate model of the rate mode DTG is proposed. This model has a resonance characteristics which is more similar to the characteristics of practical systems than the conventional 2nd order system model. Therefore, this model is applicable to the general rate mode gyroscope. Some problems at using DTG for a real electro optical tracking system are discussed and a solution is described.

• Journal of Applied Reliability
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• v.3 no.2
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• pp.103-116
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• 2003

We carry out reliability tests and investigate the failure mechanisms. of the wafer level vacuum packaged MEMS gyroscope sensor using an accelerated degradation test. The accelerated degradation test (ADT) is used to evaluate reliability (and/or life) of the MEMS vacuum package and to select the accelerated test conditions, which reduce the reliability testing time. Using the failure distribution model and stress-life model, we are able to estimate the average life time of the vacuum package, which is well agreed with the measured data. After improving several package reliability issues such as prevention of gas diffusion through package, we carry out another set of accelerated tests at the chosen acceleration level. The results show that reliability of the vacuum packaged gyroscope has been greatly improved and can survive without degradation of performance, which is the Q-factor in gyroscope sensor, during environmental stress reliability tests.