• 센서학회지
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• 제25권2호
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• pp.79-85
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• 2016

This paper proposes a threshold-based fall recognition algorithm to discriminate between falls and activities of daily living (ADL) using a tri-axial accelerometer and a bi-axial gyroscope sensor mounted on the upper sternum. The experiment was executed ten times according to the proposed experimental protocol. The output signals of the tri-axial accelerometer and the bi-axial gyroscope were measured during eight falls and eleven ADL action sequences. The threshold values of the signal vector magnitude (SVM_Acc), angular velocity (${\omega}_{res}$), and angular variation (${\theta}_{res}$) parameter were calculated using MATLAB. From the preliminary study, three thresholds (TH1, TH2, and TH3) were set so that the falls could be distinguished from ADL. When the parameter SVM_Acc is greater than 2.5 g (TH1), ${\omega}_{res}$ is greater than 1.75 rad/s (TH2), and ${\theta}_{res}$ is greater than 0.385 rad (TH3), these action sequences are recognized as falls. If at least one or more of these conditions is not satisfied, the sequence is classified as ADL.

• 한국정밀공학회지
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• 제22권11호
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• pp.165-172
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• 2005

In MEMS (Micro-Electro-Mechanical System), packaging induced stress or stress induced structure deformation becomes increasing concerns since it directly affects the performance of the device. In the decoupled vibratory MEMS gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, packaged using the anodic bonding at the wafer level and EMC (epoxy molding compound) molding, has a deformation of MEMS structure caused by thermal expansion mismatch. This effect results in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) process technology. It uses a silicon wafer and two glass wafers to minimize the wafer warpage. Thus the warpage of the wafer is greatly reduced and the frequency difference is more uniformly distributed. In addition. in order to increase robustness of the structure against deformation caused by EMC molding, a 'crab-leg' type spring is replaced with a semi-folded spring. The results show that the frequency shift is greatly reduced after applying the semi-folded spring. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

• 대한기계학회논문집A
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• 제27권11호
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• pp.1840-1848
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• 2003

This paper presents the structural analysis and optimum design of a vertical micro-gyroscope with decoupled 2 degrees of freedom (DOF), driven by electrostatic force. Simplified beam models were presented to derive the structural stiffness of the driving spring of the U shape and the sensing spring of I shape. A finite element analysis (FEA) was performed to validate each derivation. A total mass and a polar mass moment of inertia were also obtained and used in calculating the resonance frequency at each mode of the 2 DOF. The resonance frequencies of the total system were calculated using the proposed models and it has been found that they were in excellent agreement with those of the FEA. Finally, the developed analysis program was then linked to an optimum design module, and an optimum design of the micro-gyroscope was successfully performed.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2230-2232
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• 2000

This paper reports an electrostatically driven and electromagnetically sensed planar vibratory gyroscope based on a surface-bulk combined micromachining. The fabricated structure has comb electrodes which are 400${\mu}m$ thick, 18${\mu}m$ wide, 600${\mu}m$ long and separated by 7${\mu}m$ so that the height-gap ratio is about 57. It also has electroplated gold springs which are 15${\mu}m$ wide, 14${\mu}m$ thick and 500${\mu}m$ long on both sides of the seismic mass. The open-loop characteristics of fabricated gyroscope at atmospheric pressure are measured on a rate table. The fabricated gyroscope has a sensitivity of 30mV/deg/sec, and a resolution of 0.1deg/sec at atmospheric pressure. It is expected that non linearity of full scale output is less than 0.8% with. the dynamic range of $\pm$500deg/sec.

• Smart Structures and Systems
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• 제6권7호
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• pp.793-810
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• 2010

This paper addresses the control issue of vibratory MEMS-based gyroscopes. This study considers a gyroscope that can be modeled by an inner mass attached to an outer mass by four springs and four dampers. The outer mass itself is attached to the rotating frame by an equal number of springs and dampers. In order to measure the angular rate of the rotating frame, a driving force is applied to the inner mass and the Coriolis force is sensed along the y-direction associated with the outer mass. Due to micro-fabrication imperfections, including anisoelasticity and damping effects, both gyroscopes do not allow accurate measurements, and therefore, it becomes necessary to devise feedback controllers to reduce the effects of such imperfections. Given an ideal gyroscope that meets certain performance specifications, a feedback control strategy is synthesized to reduce the error dynamics between the actual and ideal gyroscopes. For a dual-mass gyroscope, it is demonstrated that the error dynamics are remarkably decreased with the application of four actuators applied to both masses in the x and y directions. It is also shown that it is possible to reduce the error dynamics with only two actuators applied to the outer mass only. Simulation results are presented to prove the efficiency of the proposed control design.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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• pp.40-42
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• 2004

This paper describes a method to find an optimal driving condition of vibratory gyroscope. Mechanical coupling between driving and sensing mode degrades the performance of vibratory gyroscope. When the resonant frequencies of driving and sensing parts are fixed, frequency and amplitude of driving source affect mechanical coupling. Thus, they should be optimally tuned. To investigate the influence of driving source on mechanical coupling, we measured frequency response and displacement of driving and sensing mode using laser vibromenter. The measured frequency response and displacement show that the gyroscope has minimum mechanical coupling when the frequency of driving source is set to the intermediate value of driving and sensing part resonant frequency. Measurement also shows that the mechanical coupling increases abruptly at a certain driving voltage as the voltage increases.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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• pp.43-45
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• 2004

In this paper, new design concept of MEMS gyroscope using multi mass system is proposed. The gyroscope having wide bandwidth was designed utilizing the multi mass system in order to reduce the degradation of the performance by resonance variation. The multi mass system has more than two masses and separates the resonant peak of each mass. Using MATLAB, the variation of bandwidth and driving displacement according to mass ratio of the multi mass system was analyzed. This result was compared with that of current single mass system gyroscope. In the 7 kHz resonant frequency design, the multi mass system has 395.3Hz bandwidth, which is six times larger than single mass system bandwidth, 58.5 Hz.

• 한국정밀공학회지
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• 제18권1호
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• pp.89-97
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• 2001

A microgyroscope, which vibrates in two orthogonal axes on the substrate plane, is designed and fabricated. The shuttle mass of the vibrating gyroscope consists of two parts. The one is outer shuttle mass which vibrates in driving mode guided by four folded springs attached to anchors. And the other is inner shuttle mass which vibrates in driving mode as the outer frame does and also can vibrate in sensing mode guided by four folded springs attached to the outer shuttle mass. Due to the directions of vibrating mode, it is possible to fabricate the gyroscope with simplified process by using polysilicon on insulator structure. Fabrication processes of the microgyroscope are composed of anisotropic silicon etching by RIE, gas-phase etching (GPE) of the buried sacrificial oxide layer, metal electrode formation. An eletromechanical model of the vibrating microgyroscope was modeled and bandwidth characteristics of the gyroscope operates at DC 4V and AC 0.1V in a vacuum chamber of 100mtorr. The detection circuit consists of a discrete sense amplifier and a noise canceling circuit. Using the evaluated electromechanical model, an operating condition for high performance of the gyroscope is obtained.

• 한국HCI학회:학술대회논문집
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• 한국HCI학회 2008년도 학술대회 1부
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• pp.337-341
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• 2008

본 논문에서는 핀형 진동촉각 디스플레이 장치와 자이로스코프 칩을 이용한 진동 촉각 공간 마우스를 제시한다. 이 마우스는 자이로스코프 칩을 이용하여 공중에서 동작하는 공간마우스에 본 연구실에서 자체 제작한 진동촉각 디스플레이 모듈을 통합하여 위치 입력과 진동 촉각 출력이 동시에 가능한 새로운 형식의 인터페이스 장치이다. 최근 진동촉각 디스플레이의 소형화, 저전력 소모 방향으로의 발전으로 인해 마우스나 모바일 장치 등 소형 임베디드 환경에서도 사용이 가능하게 되었다. 또한 MEMS 기술로 인한 자이로스코프나 센서 기술의 발전으로 인해 이젠 마우스 같은 소형화 제품에도 소형 자이로스코프 칩을 이용하여 평면 환경이 아닌 공간상에서 사용 가능한 마우스를 제작할 수 있게 되었다. 이 진동 촉각 마우스는 자이로스코프 칩을 이용하여 손의 동작을 인식하고 그 데이터를 블루투스 통신을 통해 PC에 전달하여 포인터를 이동시킨다. 또한 마우스와 손가락의 접촉 부위에는 $2\;{\times}\;3$의 핀형 진동촉각 디스플레이 장치가 장착되어 PC 어플리케이션 상에서 포인터 위치에 따른 흑백 이미지 정보를 제공하거나 문자를 점자로 출력시켜 주는 등 진동 촉각을 통한 정보 전달을 가능하게 해준다.

• 한국항공우주학회지
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• 제34권4호
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• pp.47-52
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• 2006

불규칙 혼합잡음의 등가 ARMA 모델 표현을 사용하여 자이로의 불규칙 혼합잡음을 고려하는 보조항법시스템 칼만필터 설계 방법을 제안한다. 필터 설계 절차는 먼저 보조항법 시스템에 사용되는 필터는 간접 되먹임 칼만필터임을 고려하여 등가 ARMA 모델로 표현된 자이로 불규칙 잡음의 시간 차분을 구한다. 다음으로 시간 차분된 ARMA 모델을 상태 방정식으로 표현하는데 AR과 MA 차수에 따라 두 가지로 나누어진다. 먼저 AR 차수가 큰 경우 가제어 혹은 가관측 특이형태를 사용한다. MA 차수가 큰 경우에는 몇 단계 이후의 예측치를 상태변수로 하는 상태방정식을 사용하는데, 이때 자이로 출력을 보상하는 값에 따라 다시 고차수 필터와 저차수 필터로 구분된다. 마지막으로 자이로 불규칙 잡음을 보조항법시스템 칼만필터에 포함시켜 최종적인 필터 모델을 얻는다. 시뮬레이션 결과를 통하여 제안된 고차수 및 저차수 필터 모두 혼합잡음을 백색잡음으로 간주한 기존의 필터보다 항법오차를 감소시킬 수 있음을 보임으로써 그 효용성을 제시한다.