• 한국재료학회:학술대회논문집
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• 한국재료학회 2012년도 춘계학술발표대회
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• pp.51-51
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• 2012

There is a growing interest in innovative chemical synthesis in microreactors owing to high efficiency, selectivity, and yield. In microfluidic systems, the low-volume spatial and temporal control of reactants and products offers a novel method for chemical manipulation and product generation. Glass, silicon, poly(dimethylsiloxane) (PDMS), and plastics have been used for the fabrication of miniaturized devices. However, these materials are not the best due to either of low chemical durability or expensive fabrication costs. In our group, we have recently addressed the demand for economical resistant materials that can be used for easy fabrication of microfluidic systems with reliable durability. We have suggested the use of various specialty polymers such as silicon-based inorganic polymers and fluoropolymer, flexible polyimide (PI) films that have not been used for microfluidic devices, although they have been used for other areas. And inexpensive lithography techniques were used to fabricate Lab-on-a-Chip type of microreactors with differently devised microchannel design. These microreactors were demonstrated for various synthetic reactions: liquid, liquid-gas organic chemical reactions in heterogeneous catalytic processes, syntheses of polymer and non-trivial inorganic materials. The microreactors were inert, and withstand even harsh conditions, including hydrothermal reaction. In addition, various built-in microstructures inside the microchannels, for example Pd decorated peptide nanowires, definitely enhance the uniqueness and performance of microreactors. These user-friendly Lab-on-a-Chip devices are useful alternatives for chemist and chemical engineer to conventional chemical tools such as glass.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2000년도 특별강연 및 춘계학술발표대회 개요집
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• pp.170-173
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• 2000

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.2102-2104
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• 2004

In this study, sheathless electrospray from PDMS/glass microchips with conducting metal emitter tip is described. A chip-based capillary electrophoresis/mass spectrometry (CE/MS) system has advantages of the CE separation and on-line electrospray detection of peptide solution. We have fabricated a new electrospray ionization(ESI) device composed of the metal emitter tip and CE separation channel monolithically in a glass microchip. The separation channel and metal emitter tip are fabricated using a glass wet etching and gold electro plating process, respectively. The fabricated micro electrospray chip was tested by spraying peptide sample for mass spectrometric analysis. Singlely-charged peak and doublely-charged peak of peptide were detected and further MS/MS fragmentation was performed in each peak. Direct comparisons with conventional glass or fused silica emitters showed very similar performance with respect to signal strength and stability.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1987년도 전기.전자공학 학술대회 논문집(I)
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• pp.481-485
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• 1987

The fabrication of a micro mass flow sensor on a silicon chip by means of micro-machining technology is described on this paper. The operation of micro mass flow sensor is based on the heat transfer from a heated chip to a fluid. The temperature differences on the chip is a measure for the flow velocity in a plane parallel with the chip surface. An anisotropic etching technigue was used for the formation of the V-type groove in this fabrication. The micro mass flow sensor is made up of two main parts ; A thin glass plate embodying the connecting parts and mass flow sensor parts in silicon chip. This sensor have a very small size and a neglible dead space. Micro mass flow sensor can fabricate on silicon chip by micro machining technology too.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2004년도 추계 기술심포지움 초록집
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• pp.67-67
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• 2004

• Biotechnology and Bioprocess Engineering:BBE
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• 제9권2호
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• pp.132-136
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• 2004

The LAL (Limulus amebocyte lysate) test for the detection and quantification of endotoxin is based on the gelation reaction between endotoxin and LAL from a blood extract of Limulus polyphemus. The test is labor intensive, requiring dedicated personnel, a relatively long reaction time (approximately 1 h), relatively large volumes of samples and reagents and the detection of the end-point is rather subjective. To solve these problems, a miniaturized LOC (lab-on-a-chip) prototype, 62mm (L) ${\times}$ 18 mm (W), was fabricated using PDMS (polydimethylsiloxane) bonded to glass. Using this prototype, in which 2mm (W) ${\times}$ 44.3mm (L) ${\times}$ 100 $\mu\textrm{m}$ (D) microfluidic channel was constructed, turbidometric and chromogenic assay detection methods were compared, and the chromogenic method was found the most suitable for a small volume assay. In this assay, the kinetic-point method was more accurate than the end-point method. The PDMS chip thickness was found to be minimized to around 2 mm to allow sufficient light transmittance, which necessitated the use of a glass slide bonding for chip rigidity. Due to this miniaturization, the test time was reduced from 1 h to less than 10 min, and the sample volume could be reduced from 100 to ca. 4.4 ${\mu}$L. In summation, this study suggested that the LOC using the LAL test principle could be an alternative as a semi-automated and reliable method for the detection of endotoxin.

• KSBB Journal
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• 제24권5호
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• pp.432-438
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• 2009

본 연구는 환경샘플 중 병원균을 진단하기 위한 목적을 가진다. 최소 챔버 칩에서 환경 샘플 중 병원균을 농축하고 mRNA를 증폭하여 효과적이고 간단한 진단방법을 고안하였다. PDMS로 면적 $1.5\;cm{\times}\;1.5\;cm$, 높이 $100\;{\mu}L$의 칩을 제작하여 유리에 부착시켰다. RNase에 의한 진단 오류 또는 실패를 막고자 RNase away 처리를 하고, RNA와 PDMS의 결합을 막기 위해 BSA 처리를 하였다. 수질에 있는 병원균은 매우 적은 농도로 존재하므로 농축의 과정이 필요하다. 농축의 방법에는 여러 가지가 있으나 본 연구에서는 유리 비드를 칩 내에 삽입하고 저농도의 시료를 주입함으로서 고농도로 농축을 하는 방법을 사용하였다. 그러나 부피가 작은 칩 내에서 수행하기에는 내부 압력이 작용하여 문제가 발생하여 $100\;{\mu}m$의 유리 비드를 사용하고 유리비드의 칩 내부 이탈을 방지하기 위하여 댐을 만들어 농축에 가장 적합한 칩의 형태를 잡았다. 시료의 주입속도에 따라 내부 압력이 상승하여 댐의 기능이 상실하여 유리 비드가 이탈하게 되므로 그것을 방지하기 위하여 칩 내에 댐을 강화하여 만들고 내부압력 증가가 방지되는 최적의 댐을 개발하여 시료의 주입 속도 5 mL/min까지 유리 비드의 이탈을 막았다. 유리 비드에서의 RNA 농축은 pH 5에서 효과적이고 pH가 증가할수록 유리 비드와 RNA의 결합이 끊어지는 현상을 보였으므로 시료에 pH 5의 버퍼를 첨가하여 농축을 진행하고 중성의 NASBA 용액을 주입하여 유리비드에서 탈착된 농축된 고농도의 RNA를 증폭하였다. NASBA는 항온 수조에서 온도에 변화 없이 $41^{\circ}C$에서 1시간 30분 동안 진행하며 증폭된 mRNA는 직접 확인하였다. 이 방법은 LOC 기술을 적용하여 저농도의 시료를 효과적으로 측정할 수 있도록 편리한 바이오 칩을 개발함으로써 대용량의 샘플 중 극 저농도의 대장균을 효과적으로 검출할 수 있는 장점을 가지고 있다.

• 센서학회지
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• 제18권1호
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• pp.42-47
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• 2009

In this paper we propose a microfluidic chip that measures the mechanical stiffness of cell membrane using impedance measurement. The microfluidic chip is composed of PDMS channel and a glass substrate with electrode. The proposed device uses patch-clamp technique to capture and deform a target cell and measures impedance of deformed cells. We demonstrated that the impedance increased after the membrane stretched and blocked the channel.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1526-1531
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• 2007

Data transmission capacity that is required in 2010 is forecasted that increase by optical communication capacity more than present centuple, and is doing increased demand of optical communication related industry product present. Specially, Lid glass' application that is one of optical communication parts is used in optical communication parts manufacture of Fiber array, Ferrule array, Fanout Black, Silica optical waveguide chip and splitter etc. Also, it is used widely for communication network system, CATV, ATM-PON, FTTH and system. But, Lid glass need much processing times and becomes cause in rising prices of optical communication parts because production cost is expensive. The objectives, of this work is to suggest the micro concave and convex pattern manufacturing technology on borosilicate plate using high temperature and compression molding method. As a result, could developed micro pattern Mold more than 5 pattern, and reduce Lid Glass manufacture cycle time.

• 마이크로전자및패키징학회지
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• 제21권2호
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• pp.53-57
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• 2014

Thin glass (< 100 microns) is a promising material from which advanced interposers for high density electrical interconnects for 2.5D chip packaging can be produced. But thin glass is extremely brittle, so mechanical micromachining to create through glass vias (TGVs) is particularly challenging. In this article we show how laser processing using deep UV excimer lasers at a wavelength of 193 nm provides a viable solution capable of drilling dense patterns of TGVs with high hole counts. Based on mask illumination, this method supports parallel drilling of up over 1,000 through vias in 30 to $100{\mu}m$ thin glass sheets. (We also briefly discuss that ultrafast lasers are an excellent alternative for laser drilling of TGVs at lower pattern densities.) We present data showing that this process can deliver the requisite hole quality and can readily achieve future-proof TGV diameters as small $10{\mu}m$ together with a corresponding reduction in pitch size.